3D nonlinear photolithography of tin oxide ceramics via femtosecond laser

作     者：Nianyao Chai Yanan Liu Yunfan Yue Ping Wei Xuewen Wang Junjie Zhao Qi Zhang Fuzhi Huang Zhongle Zeng Zongsong Gan Liqiang Mai Yibing Cheng 柴年垚;刘亚男;岳云帆;魏平;王学文;赵俊杰;张奇;黄福志;曾终乐;甘棕松;麦立强;程一兵

作者机构：State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingInternational School of Materials Science and EngineeringWuhan University of TechnologyWuhan 430070China Foshan Xianhu Laboratory of the Advanced Energy Science and TechnologyGuangdong LaboratoryFoshan 528216China Wuhan National Laboratory for OptoelectronicsHuazhong University of Science and TechnologyWuhan 430074China 

出 版 物：《Science China Materials》 (中国科学（材料科学（英文版）)

年 卷 期：2021年第64卷第6期

页      面：1477-1484页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 080503[工学-材料加工工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0802[工学-机械工程] 0702[理学-物理学] 080201[工学-机械制造及其自动化] 

基　　金：supported by Foshan Xianhu Laboratory of the Advanced Energy Science and Technology Guangdong Laboratory (XHT2020-003 and XHT2020-005) the Fundamental Research Funds for the Central Universities (2020IVA068) the Creative Research Group Project of Natural Science Foundation of China (61821003) the National Natural Science Foundation of China (61775068 and 51802239) 

主　　题：tin oxide ceramics nonlinear photolithography femtosecond laser 

摘      要：As a wide band gap semiconductor material,tin oxide(SnO_(2))has been widely used in gas sensing,optoelectronics and *** complex micro and nanoscale threedimensional(3D)geometric structures endow the conventional SnO_(2)ceramics with novel properties and ***,ceramics cannot be cast or machined easily due to their high mechanical toughness and *** additive manufacturing opens a great opportunity for flexibly geometrical shaping,while the arbitrary shaping of SnO_(2)ceramics at micro and nanoscale is always a ***,preceramic monomers which can be polymerized under ultrafast laser irradiation,were utilized to form complex and arbitrary 3D preceramic polymer *** calcination treatment,these green-body structures could be converted into pure high-dense SnO_(2)ceramics with uniform shrinkage,and the feature size was down to *** electron microscopy(TEM)analysis displays that the printed SnO_(2)ceramic nanostructures can be nanocrystallized with grain sizes of 2.5±0.4 *** work provides the possibility of manufacturing 3D SnO_(2)ceramic nanostructures arbitrarily with sub-100 nm resolution,thus making it promising for the applications of SnO_(2)in different fields.