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parylene film for sidewall passivation in SCREAM process

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Science China(Technological Sciences) 2009年第2期52卷 357-362页

作者： JI Xu YU HuaiQiang HUANG XianJu LEI YingHua LI ZhiHong State Key Laboratory of Micro/Nano Fabrication Technology Institute of MicroelectronicsPeking UniversityBeijing 100871China

Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve as the passivation layer owing to its excellent conformality, chemical inertness, mechanical performance, and especially, low growth temperature. The deposited parylene films are characterized and the test structures are released through SCREAM process utilizing the parylene films as a passivation layer. The results show that as a passivation layer the parylene has more merits than the PECVD SiO2 film.

关键词： parylene sidewall passivation stress conformality SCREAM (single crystal reactive etching and metallization) process

parylene photonics: a flexible, broadband optical waveguide platform with integrated micromirrors for biointerfaces

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Microsystems & Nanoengineering 2020年第1期6卷 435-448页

作者： Jay W.Reddy Maya Lassiter Maysamreza Chamanzar Department of Electrical and Computer Engineering Carnegie Mellon UniversityPittsburghPAUSA

Targeted light delivery into biological tissue is needed in applications such as optogenetic stimulation of the brain and in vivo functional or structural imaging of *** applications require very compact,soft,and flexible implants that minimize damage to the ***,we demonstrate a novel implantable photonic platform based on a high-density,flexible array of ultracompact(30μm×5μm),low-loss(3.2dB/cm at λ=680 nm,4.1 dB/cm at λ=633 nm,4.9 dB/cm at λ=532 nm,6.1 dB/cm at λ=450 nm)optical waveguides composed of biocompatible polymers parylene C and polydimethylsiloxane(PDMS).This photonic platform features unique embedded input/output micromirrors that redirect light from the waveguides perpendicularly to the surface of the array for localized,patterned illumination in *** architecture enables the design of a fully flexible,compact integrated photonic system for applications such as in vivo chronic optogenetic stimulation of brain activity.

关键词： waveguide optical parylene

Scalable nanocomposite parylene-based memristors:Multifilamentary resistive switching and neuromorphic applications

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Nano Research 2023年第2期16卷 3207-3214页

作者： Anna N.Matsukatova Artem Yu.Vdovichenko Timofey D.Patsaev Pavel A.Forsh Pavel K.Kashkarov Vyacheslav A.Demin Andrey V.Emelyanov National Research Centre“Kurchatov Institute” Moscow 123182Russia Physics Department Lomonosov Moscow State UniversityMoscow 119991Russia Moscow Institute of Physics and Technology DolgoprudnyjMoscow oblast 141701Russia Enikolopov Institute of Synthetic Polymeric Materials Russian Academy of SciencesMoscow 117993Russia Physics Department Saint Petersburg State UniversitySt.Petersburg 199034Russia

Memristors are promising candidates for synapse emulation in brain-inspired neuromorphic computing *** main obstacle to their usage in such systems is high variability of memristive characteristics and its severe negative effect on the neural network *** paper addresses the issue from two points of view on the example of the parylene-based memristors:(i)the methods of the memristor internal stochasticity decrease and(ii)the methods of the memristive neural network architecture *** introduction of an optimal Ag nanoparticle concentration(3 vol.%–6 vol.%)to the memristive structure leads to a statistically significant decrease in the switching voltage variation and endurance ***,it is shown that post-fabrication annealing improves memristive characteristics,e.g.,resistive switching window increases by an order of magnitude and exceeds 106,the switching voltage variation decreases by a factor of 2(down to 7%for the set and 17%for the reset voltage),and thermostability is *** transmission electron microscopy and impedance spectroscopy analysis allowed establishing a multifilamentary resistive switching mechanism for nanocomposite parylene-based *** simulation of the formal neural network based on these memristors demonstrates high classification accuracy with low variation for an important biomedical task,heart disease prediction,after careful feature selection and network architecture *** prospects of the controlled incorporation of the nanocomposite parylene-based memristors in neural networks are brightened by their scaling possibility in crossbar geometry.

关键词： memristor resistive switching neuromorphic computing parylene nanocomposite

2.5-Dimensional parylene C micropore array with a large area and a high porosity for high-throughput particle and cell separation

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Microsystems & Nanoengineering 2018年第1期4卷 286-297页

作者： Yaoping Liu Han Xu Wangzhi Dai Haichao Li Wei Wang Institute of Microelectronics Peking UniversityBeijing 100871China Department of Respirology No.1 Hospital of Peking UniversityBeijing 100034China National Key Laboratory of Science and Technology on Micro/Nano Fabrication Beijing 100871China Innovation Center for Micro-Nanoelectronics and Integrated Systems Beijing 100871China

Large-area micropore arrays with a high porosity are in high demand because of their promising potential in liquid biopsy with a large volume of clinical ***,a micropore array with a large area and a high porosity faces a serious mechanical strength *** filtration membrane may undergo large deformation at a high filtration throughput,which will decrease its size separation *** this work,a keyhole-free parylene molding process has been developed to prepare a large(>20 mm×20 mm)filtration membrane containing a 2.5-dimensional(2.5D)micropore array with an ultra-high porosity(up to 91.37% with designed pore diameter/space of 100μm/4μm).The notation 2.5D indicates that the large area and the relatively small thickness(approximately 10μm)of the fabricated membranes represent 2D properties,while the large thickness-to-width ratio(10μm/parylene C micropore array was implemented as an efficient filter for rare cancer cell separation from a large volume,approximately 10 cells in 10 mL PBS and undiluted urine,with high recovery rates of 87±13% and 56±13%,respectively.

关键词： parylene separation porosity

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parylene C膜的光氧老化行为

高分子材料科学与工程 2009年第8期25卷 76-79页

作者：曹琼华徐瑞娟王建华 96411部队中国工程物理研究院

利用紫外-可见吸收光谱(UV-VIS)、X光电子能谱(XPS)及热裂解-气相色谱/质谱联用测试分析技术(PY-GC/MS),对经过氙灯照射的parylene C膜的紫外吸收、表面元素组成和含量以及热裂解的产物进行了分析研究。实验结果表明,parylene C膜在光... 详细信息

利用紫外-可见吸收光谱(UV-VIS)、X光电子能谱(XPS)及热裂解-气相色谱/质谱联用测试分析技术(PY-GC/MS),对经过氙灯照射的parylene C膜的紫外吸收、表面元素组成和含量以及热裂解的产物进行了分析研究。实验结果表明,parylene C膜在光照过程中会被氧化,表面出现了"黄化"现象,其表面的氧含量随着光照时间的增加而增加,随后趋于稳定,而裂解产物中氧化碎片的量首先出现了一个最大值,而后迅速减小。

关键词：高分子材料 parylene C膜光氧化老化产物

parylene F薄膜介电材料的制备与研究

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功能材料 2011年第B6期42卷 477-480页

作者：赵宗峰鲜晓斌唐贤臣吉祥波中国工程物理研究院四川绵阳621900

通过真空化学气相沉积方法制备了parylene F薄膜,采用扫描电镜(SEM)和原子力显微镜(AFM)观察了表面形貌,并用红外光谱(IR)、X射线光电子能谱(XPS)及热重分析仪(TGA)等分析手段对薄膜组成与性能进行了表征,阻抗分析仪测试了薄膜的介电参... 详细信息

通过真空化学气相沉积方法制备了parylene F薄膜,采用扫描电镜(SEM)和原子力显微镜(AFM)观察了表面形貌,并用红外光谱(IR)、X射线光电子能谱(XPS)及热重分析仪(TGA)等分析手段对薄膜组成与性能进行了表征,阻抗分析仪测试了薄膜的介电参数。研究结果表明化学气相沉积方法制备的parylene F薄膜是一种致密光滑、性能较优、易于成型且具有较大潜在应用前景的介电材料。

关键词：介电材料 parylene F薄膜化学气相沉积

气态二聚体裂解温度对parylene C膜力学和透气性能的影响

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高分子材料科学与工程 2011年第11期27卷 77-80页

作者：吉祥波陈志陈慧唐贤臣中国工程物理研究院四川绵阳621900

通过控制气态环状二聚体原料的裂解温度,在不同裂解温度下合成parylene C膜,分析了裂解温度对膜的微观组织、拉伸性能和透气性能的影响。研究结果表明,当温度低于600℃时,原料裂解不充分,膜中存在大量未裂解原料的球状聚集体,导致膜的... 详细信息

通过控制气态环状二聚体原料的裂解温度,在不同裂解温度下合成parylene C膜,分析了裂解温度对膜的微观组织、拉伸性能和透气性能的影响。研究结果表明,当温度低于600℃时,原料裂解不充分,膜中存在大量未裂解原料的球状聚集体,导致膜的拉伸强度降低,气体透过率较高;当裂解温度达到720℃,气态原料存在部分过度裂解,裂解温度在630℃~690℃时,原料的裂解较充分,而且过裂解程度较小,制备的膜综合性能优异。

关键词： parylene C 透气性能裂解温度化学气相沉积

新型涂敷材料parylene AF_4的研究进展

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现代化工 2008年第6期28卷 23-27页

作者：赵宗峰鲜晓斌唐贤臣帅茂兵吉祥波中国工程物理研究院四川绵阳621900

parylene AF4是一种新型的高分子敷型材料,除了拥有parylene同系列产品的共同性能外,还具有更优异的抗紫外和抗老化性能。系统介绍了parylene AF4环二体的合成方法、薄膜制备原理和性能参数,并对其研究的热点领域及应用前景进行了展望。

关键词： parylene AF4 涂敷材料化学气相沉积沉积动力学

硅烷偶联剂KH550对parylene C膜与金属铝基体结合强度的影响

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高分子材料科学与工程 2012年第3期28卷 57-59页

作者：吉祥波鲜晓斌唐贤臣帅茂兵中国工程物理研究院四川绵阳621900

采用拉开法分析了KH550(γ-氨丙基三乙氧基硅烷)偶联剂浓度对parylene C膜与金属铝基体间结合强度的影响,采用拉曼光谱(Raman)和红外光谱(FT-IR)分析了偶联剂在膜和基体间的作用机理。研究结果表明,使用10%的KH550偶联剂可提高parylene ... 详细信息

采用拉开法分析了KH550(γ-氨丙基三乙氧基硅烷)偶联剂浓度对parylene C膜与金属铝基体间结合强度的影响,采用拉曼光谱(Raman)和红外光谱(FT-IR)分析了偶联剂在膜和基体间的作用机理。研究结果表明,使用10%的KH550偶联剂可提高parylene C膜与铝基体的结合强度到7.5MPa。其增强作用机理为KH550偶联剂的烷氧基团水解后,-Si-OH与基体的Al-O键发生化学作用生成-Si-O-Al键,-NH2能与parylene C膜分子间形成氢键,从而使parylene C膜与金属铝之间产生化学键桥连。

关键词： parylene C 硅烷偶联剂结合强度