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Influence of nitrogen flow rate on the Microstructure and Properties of N and Me (Me=Cr,Zr) Co-doped Diamond-like Carbon Films

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Journal of Materials Science & Technology 2010年第11期26卷 967-972页

作者： Zhiyun Han,Hongkai Li,Guoqiang Lin and Chuang Dong Key Laboratory for Material Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116085,China [a] Key Laboratory for Material Modification by Laser Ion and Electron Beams Dalian University of Technology Dalian 116085 China

In this paper,Me （Me=Cr,Zr） and N co-doped diamond like carbon （DLC-MeN） composite films were prepared on cemented carbide substrates by pulsed bias arc ion *** effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy （XPS）,Raman spectra,grazing incident X-ray diffraction （GIXRD）,high resolution transmission electron microscopy （HRTEM） and ***,GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix,which are vital for the mechanical properties of the *** nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films,and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.

关键词： Diamond like carbon films Doping nitrogen flow rate Arc ion plating

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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

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Chinese Physics B 2014年第4期23卷 616-621页

作者：张林马国佳林国强马贺韩克昌 Key Laboratory for Material Modification by Laser Ion and Electron Beams Dalian University of Technology Science and Technology on Power Beam Processes Laboratory Beijing Aeronautical Manufacturing Technology Research Institute

In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron mi- croscopy （FE-SEM）, x-ray photoelectron spectroscopy （XPS）, grazing incident x-ray diffraction （GIXRD）, Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti（C,N） phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti（C,N） phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.

关键词： arc ion plating Ti-C-N film nitrogen flow rate microstructure

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