Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr,Zr) Co-doped Diamond-like Carbon Films

作     者：Zhiyun Han,Hongkai Li,Guoqiang Lin and Chuang Dong Key Laboratory for Material Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116085,China 

作者机构：Key Laboratory for Material Modification by Laser Ion and Electron Beams Dalian University of Technology Dalian 116085 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2010年第26卷第11期

页      面：967-972页

核心收录：

学科分类：07[理学] 0817[工学-化学工程与技术] 0806[工学-冶金工程] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0801[工学-力学（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：supported by the National High Technical Research and Development Program of China (Grant No. 2006AA03Z521) 

主　　题：Diamond like carbon films Doping Nitrogen flow rate Arc ion plating 

摘      要：In this paper,Me （Me=Cr,Zr） and N co-doped diamond like carbon （DLC-MeN） composite films were prepared on cemented carbide substrates by pulsed bias arc ion *** effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy （XPS）,Raman spectra,grazing incident X-ray diffraction （GIXRD）,high resolution transmission electron microscopy （HRTEM） and ***,GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix,which are vital for the mechanical properties of the *** nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films,and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.