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检索条件"主题词=moderately boron doped diamond"
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Effect of oxygen on regulation of properties of moderately boron-doped diamond films
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Chinese Physics B 2022年 第12期31卷 591-597页
作者: Dong-Yang Liu Li-Cai Hao Wei-Kang Zhao Zi-Ang Chen Kun Tang Shun-Ming Zhu Jian-Dong Ye Rong Zhang You-Dou Zheng Shu-Lin Gu School of Electronic Science and Engineering Nanjing UniversityNanjing 210093China The Shanghai Huahong Grace Semiconductor Manufacturing Corporation Shanghai 201203China Collaborative Innovation Center of Solid-State Lighting and Energy-Saving Electronics Nanjing UniversityNanjing 210093China
Regulation of oxygen on properties of moderately boron-doped diamond films is fully *** show that,with adding a small amount of oxygen(oxygen-to-carbon ratio<5.0%),the crystal quality of diamond is improved,and a supp... 详细信息
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