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All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

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Chinese Physics B 2017年第12期26卷 332-338页

作者：刘豫孙月衣云骥田亮曹悦陈长鸣孙小强张大明 State Key Laboratory on Integrated Optoelectronics College of Electronic Science and Engineering Jilin University Changchun 130012 China

We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.

关键词： integrated optics devices polymer waveguides sensors microstructure fabrication

Integrated thin film lithium niobate Fabry–Perot modulator[Invited]

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Chinese Optics Letters 2021年第6期19卷 8-12页

作者： Mengyue Xu Mingbo He Yuntao Zhu Lin Liu Lifeng Chen Siyuan Yu Xinlun Cai State Key Laboratory of Optoelectronic Materials and Technologies and School of Electronics and Information Technology Sun Yat-sen UniversityGuangzhou 510000China

Integrated traveling-wave lithium niobate modulators need relatively large device lengths to achieve low drive voltage. To increase modulation efficiency within a compact footprint, we report an integrated Fabry–Perot-type electro-optic thin film lithium niobate on insulator modulator comprising a phase modulation region sandwiched between two distributed Bragg reflectors. The device exhibits low optical loss and a high tuning efficiency of 15.7 pm/V. We also confirm the modulator's high-speed modulation performance by non-return-to-zero modulation with a data rate up to 56 Gbit/s.

关键词： integrated optic devices lithium niobate optical modulators microstructure fabrication

Investigation on an all-optical intensity modulator based on an optical microfiber coupler

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Chinese Optics Letters 2018年第4期16卷 35-39页

作者：于洋卞强张楠路阳张学亮杨俊波 College of Meteorology and Oceanology National University of Defense Technology College of Liberal Arts and Sciences National University of Defense Technology The Medical Engineering & Maintenance Center Chinese PLA General Hospital

An all-optical intensity modulator based on an optical microfiber coupler（OMC） is presented. The modulator works at 1550 nm wavelength and is modulated directly by heating the coupling region with 980 nm pump light injected through the coupling port of the OMC. The OMC is controlled to have at least a 30 mm long coupling region with diameter smaller than 8 μm, and the uniform waist region diameter is about 3 μm. This is helpful to ensure the optical modulation function based on the light induced thermal effect in the coupling region, while pump light is injected. The modulation response is measured to show good linearity when the 980 nm pump light has a lower intensity（with power below 2.5 mW）, which proves that the OMC acts as an all-optical *** bandwidth of the modulator can be at 0.2–50 kHz with the average power of the intensity-modulated pump light about 2 mW, which can be further improved by optimizing the design of the coupler. The demonstrated modulator may have potential value for the application in an all-optical integration system.

关键词： 230.4000 microstructure fabrication

Facile preparation of silver nanoparticles in bulk silicate glass by high-repetition-rate picosecond laser pulses

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Chinese Optics Letters 2021年第1期19卷 75-79页

作者： Danyang Shen Jing Qian Chengwei Wang Guande Wang Xuehui Wang Quanzhong Zhao State Key Laboratory of High Field Laser Physics Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghai 201800China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China Technology Center Huagong Laser Engineering Co.Ltd.Wuhan 430000China

One-step precipitation of Ag nanoparticles in Ag+-doped silicate glasses was achieved through a focused picosecond laser with a high repetition rate. Absorption spectra and transmission electron microscopy(TEM) confirmed that metallic Ag nanoparticles were precipitated within glass samples in the laser-written domain. The surface plasmon absorbance fits well with the experimental absorption spectrum. The nonlinear absorption coefficient β is determined to be 2.47 × 10-14 m/W by fitting the open aperture Z-scan curve, which originated from the intraband transition in the s-p Ag band. The formation mechanism of Ag-glass nanocomposites is discussed as well.

关键词： nonlinear optical materials laser materials processing microstructure fabrication

Theoretical study on the removal function of computer controlled polishing SiC mirror with fixed abrasive

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Chinese Optics Letters 2012年第B6期10卷 168-173页

作者：王旭郑立功 Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

A fixed abrasive technology combined with computer controlled optical surfacing is discussed, and a removal function model for multi-pellet polishing pad is established based on the removal function theory of planar motion. The parameters of the model, such as the movement eccentricity of the polishing pad and the distance between pellets, are optimized by introducing a approaching factor and a curve RMS distance in the simulation. The comparison of the theoretical model and the experimental results indicate that the error between the theoretical maximum removal rate and the experimental data is 0.0073 #m/min, and its error ratio is 5.58~; the RMS distance error between the theoretical removal function curve and the experimental curve is 0.0849 /~m and its error ratio is 7.01%. The veracity of the theoretical model is verified by experimental results, which predicts the feasibility of the fixed abrasive polishing technology and establishes a promising basis for the SiC mirror precision fabrication field.

关键词： 220.0220 Optical design and fabrication 220.4000 microstructure fabrication 220.4610 Optical fabrication 220.5450 Polishing

Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad

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Chinese Optics Letters 2014年第A1期12卷 140-144页

作者：王旭张峰 Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Laboratory of Optics Fine Mechanics and Physics Chinese Academy of Science Changchun 130033 China

The removal function test is carried out on the earlier round-pellet polishing pad. The concept of filling factor is introduced to evaluate the removal function obtained from the experiments mentioned in the paper. To improve the filling factor and characteristics of the polishing pad, the pad structure is optimized according to the experimental results of the round-pellet pad. The removal function of the new polishing pad is simulated with MATLAB. The stability experiment is carried out in full aperture at the same time. The fixed abrasive and the slurry abrasive polishing experiment both are performed under the same conditions. Finally, the structural similarity index is introduced to evaluate the similarity between simulations and experiments. The best structural similaritv index of multi-square-mellet oad is 0.4257. The comparison results are acceptable and Positive. The optimized fixed abrasive polishing pad is proved to be highly promising for large-diameter SiC mirror fabrication.

关键词： 220.0220 Optical design and fabrication 220.4000 microstructure fabrication 220.4610 Optical fabrication 220.5450 Polishing