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A novel restricted-flow etching method for glass

Journal of Zhejiang University-Science A(Applied Physics & Engineering) 2009年第11期10卷 1601-1608页

作者： Hai-bo XIE Yi ZHENG Yu-run FAN Xin FU Hua-yong YANG State Key Laboratory of Fluid Power Transmission and Control Zhejiang University Hangzhou 310027 China

This paper presents a novel micro fabrication method based on the laminar characteristics of micro-scale flows. Therein the separator and etchant are alternatively arranged in micro channels to form multiple laminar streams, and the etchant is located at the site where the reaction is supposed to occur. This new micro fabrication process can be used for the high aspect ratio etching inside a microchannel on glass substrates. Furthermore, the topography of microstructure patterned by this method can be controlled by changing the flow parameters of the separator and etchant. Experiments on the effects of flow parameters on the aspect ratio, side wall profile and etching rate were carried out on a glass substrate. The effect of flow rates on the etching rate and the micro topography was analyzed. In addition, experiments with dynamical changes of the flow rate ratio of the separator and etchant showed that the verticality of the side walls of microstructures can be significantly improved. The restricted flowing etching technique not only abates the isotropic effect in the traditional wet etching but also significantly reduces the dependence on expensive photolithographic equipment.

关键词： microfluidics micro fabrication Etching Laminar flow

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Flexible Evanescent Wave Interference Lithography System for Sub-half-Wavelength Complex Relief Structures fabrication

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Nanomanufacturing and Metrology 2021年第4期4卷 256-270页

作者： Yuki Torii Shuzo Masui Yuki Matsumoto Kunikazu Suzuki Masaki Michihata Kiyoshi Takamasu Satoru Takahashi Department of Precision Engineering The University of TokyoHongo 7-3-1BunkyoTokyo 113-8656Japan Research Center for Advanced Science and Technology The University of TokyoKomaba 4-6-1MegroTokyo 153-8904Japan

Surface microstructures impart various useful properties to objects,for example,improving optical characteristics,wettability,and sliding *** is well known that biomimicking relief structures are effective in making such properties arise and have been studied to be applied to various ***,they are expected to be utilized not only for improving a particular property but also for adding more complex functions on a device's urface by fabricating different multi-functional structures on a single surface in the ***,to begin with,artificially fabricating such biomimicking special functional relief is *** typical feature of biomimicking surfaces is the dual-scale structure,the smaller one of which is less than 200 ***,in the case of realizing the more complex devices,it is necessary to fabricate various forms as changing process conditions *** this study,we proposed and developed a flexible evanescent wave interference lithography system as a novel fabrication method,which allows us to realize the fabrication of sub-half-wavelength complex relief ***,we theoretically analyzed the fundamental behavior of the fabricated structure and found that the proposed concept has the potential to realize one of the target complex ***,we developed the proposed system with high process flexibility,in which the number of beams,the azimuth angles,and the polarization can be simply ***,we validated the concept of the designed system by some experiments,where we fabricated dual-scale structures with 840-nm and 190-nm fringe patterns simultaneously.

关键词： Evanescent wave Biomimetics Interference lithography micro fabrication Surface structure

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Aerodynamically Assisted Tip-Pen Direct Writing

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Tsinghua Science and Technology 2009年第S1期14卷 116-119页

作者：刘丰张人佶 Advanced Manufacture Technology Center China Academy of Machinery Science & Technology State Key Laboratory of Advanced Forming Technology and Equipment Department of Mechanical Engineering Tsinghua University

Scaffolds require individual external shape and well-defined internal structure, which is of great importance for tissue engineering. Rapid prototyping (RP) uses layer-manufacturing strategies to create physical objects and has the advantage on scaffold fabrication. A new RP technology called aerodynamically assisted tip-pen direct writing was developed to construct the complex architectures. Compared with the traditional nozzle, the new nozzle has a micro-tip in the center of the micro-hole. The flow is determined by the gap between the micro-hole and micro-tip, which makes it practical for more accurate flow control. A highly accurate three-dimensional (3-D) micro-positioning system was employed with the new nozzle to deposit maltose structures. 3-D architectures had been made by this method, the width of fiber in which is about 120 μm. The results show that this method provides a possibility to construct 3-D scaffolds with tissue-scale features (i.e., 10-100 μm) without bad influence on the biological activities.

关键词： tip-pen direct writing micro fabrication rapid prototyping scaffold

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Characteristics of suspended planar-type gas sensor based on MEMS process

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Journal of Southeast University(English Edition) 2012年第3期28卷 315-320页

作者：张子立殷晨波陶春旻朱斌南京工业大学机械与动力工程学院南京210009

In order to simplify the fabrication process,distribute the temperature uniformly and reduce the power consumption of the micro-hotplate（MHP） gas sensor,a planar-type gas sensor based on SnO2 thin film with suspended structure is designed through a MEMS ***-state thermal analysis of the gas sensor and the closed membrane type sensor where the membrane overlaps the Si substrate is carried out with the finite element model,and it is shown that the suspended planar-type gas sensor has a more homogeneous temperature distribution and a lower power *** the maximum temperature on the sensor reaches 383℃,the power consumption is only 7 mW,and the temperature gradient across the thin film is less than 14℃.To overcome the fragility of the suspended beams,a novel fabrication process in which the deposition of the gas sensing film occurs prior to the formation of suspended beams is *** back side of the Si substrate is etched through deep reactive ion etching（DRIE） to avoid chemical pollution of the front *** fabrication steps in which only four masks are used for the photolithography are described in *** Fe doped SnO2 thin film synthesized by sol-gel spin-coating is used as the gas sensing *** device is tested on hydrogen and exhibits satisfactory sensing *** sensitivity increases with the rise of the concentration from 50×10-6 to 2000×10-6,and reaches about 30 at 2000×10-6.

关键词： gas sensor suspended planar-type micro fabrication gas sensing characteristic

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NOVEL ELECTROFORMING PROCESS OF METAL microSTRUCTURES BY USING SHIELDED ANODE

NOVEL ELECTROFORMING PROCESS OF METAL MICROSTRUCTURES BY USI...

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International Technology and Innovation Conference 2006

作者： ZENG Yongbin ZHU Di MING Pingmei HU Yangyang College of Mechanical and Electrical Engineering Nanjing University of Aeronautics and Astronautics Nanjing 210016 China

＜正＞Rapid growth of MEMS calls for metal microstructures with complex features whose fabrication has become a real challenge. Current microfabrication processes （such as bulk and surface micromachining and LIGA） have some limitations in materials and structure geometries. This paper presents a novel electroforming process which has the potential of fabricating complex, high-aspect-ratio metal microstructures. In this paper, shielded anode, which has micro features of SU-8 photoresist patterned by UV source, is employed to confine the region of electrodeposition. The cathode moves along a specific trajectory depends on the contour of the required structure in a number of incontinuous steps. The principle and procedure are discussed in detail and the relative technologies are introduced. Experiments demonstrate its feasibility. micro gear with vertical sidewall and micro cross structure with slanting profile are fabricated successfully.

关键词： Electro forming shielded anode micro fabrication microstructure.

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micro fluidic Oscillator for Gas Flow Control and Measurement

Micro fluidic Oscillator for Gas Flow Control and Measuremen...

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The 12～(th) International Conference on Flow Measurement

作者： Eliphas Wagner Simes Rogerio Furlan Roberto Eduardo Bruzetti Leminski MárioRicardoGongora-Rubio Marcos Tadeu Pereira Nilton Itiro Morimoto Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil Instituto de Pesquisas Tecnológicas S（a| o Paulo SPBrazil Laboratório de Sistemas Integráveis Universidade de S Paulo SP Brazil University of Puerto RicoDepartment of Physics and ElectronicsHumacaoPR Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil Laboratório de Sistemas Integráveis Universidade de So Paulo SP Brazil Institute de Pesquisas Tecnológicas S（a| o Paulo SPBrazil Instituto de Pesquisas Tecnológicas So PauloSPBrazil Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil

＜正＞ micro fluidic oscillators were obtained from wall attachment micro fluidic amplifiers using a feedback loop from the outputs to the control inputs. These devices can be used as actuators, as mixers, and also as flow meters, when the oscillation frequency is proportional to the volumetric flow in subsonic and moderately compressible conditions. The devices were then made in a SU-8 based epoxy photo resist using photolithography ultraviolet process. The article shows the results obtained in the experimental tests of the devices with gases （nitrogen, argon, and carbon dioxide）. The dimensions are of the order of 280 urn. The typical variation of the frequency with volumetric flow presents a range close to thousands of Hz. The oscillation frequencies were obtained using hot wire filaments （in this case with 12 urn of diameter）. The experimental results indicated which operation of the micro fluidic oscillator were direct function of the length of feedback loop and the velocity inside of the interaction region.

关键词： fluidic flow control flow meter micro fabrication and fluidic oscillator

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