Micro fluidic Oscillator for Gas Flow Control and Measurement
作者单位：Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil Instituto de Pesquisas Tecnológicas S（a| o PauloSPBrazil Laboratório de Sistemas Integráveis Universidade de S Paulo SP Brazil University of Puerto RicoDepartment of Physics and ElectronicsHumacaoPR Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil Laboratório de Sistemas Integráveis Universidade de So Paulo SP Brazil Institute de Pesquisas Tecnológicas S（a| o PauloSPBrazil Instituto de Pesquisas Tecnológicas So PauloSPBrazil Laboratório de Sistemas Integráveis Universidade de So PauloSPBrazil
会议名称：《The 12～(th) International Conference on Flow Measurement》
会议日期：2004年
学科分类：08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 081102[工学-检测技术与自动化装置] 0811[工学-控制科学与工程]
关 键 词：fluidic flow control flow meter micro fabrication and fluidic oscillator
摘 要：正 Micro fluidic oscillators were obtained from wall attachment micro fluidic amplifiers using a feedback loop from the outputs to the control inputs. These devices can be used as actuators, as mixers, and also as flow meters, when the oscillation frequency is proportional to the volumetric flow in subsonic and moderately compressible conditions. The devices were then made in a SU-8 based epoxy photo resist using photolithography ultraviolet process. The article shows the results obtained in the experimental tests of the devices with gases （nitrogen, argon, and carbon dioxide）. The dimensions are of the order of 280 urn. The typical variation of the frequency with volumetric flow presents a range close to thousands of Hz. The oscillation frequencies were obtained using hot wire filaments （in this case with 12 urn of diameter）. The experimental results indicated which operation of the micro fluidic oscillator were direct function of the length of feedback loop and the velocity inside of the interaction region.