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integrated sensor based on acoustics-electricity-mechanics coupling effect for wireless passive gas detection

Nano Research 2023年第2期16卷 3130-3141页

作者： Licheng Zhou Bohui Zhai Zhixiang Hu Mingqi Zhang Long Li Xiangxin Wang Guangzu Zhang Jingting Luo Honglang Li Bingbing Chen Shenglin Jiang Hua-Yao Li Huan Liu School of Optical and Electronic Information Wuhan National Laboratory for OptoelectronicsOptics Valley LaboratoryHuazhong University of Science and TechnologyWuhan 430074China Shenzhen Huazhong University of Science and Technology Research Institute Shenzhen Virtual University ParkShenzhen 518000China Key Laboratory of Optoelectronic Devices and Systems College of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China CAS Center for Excellence in Nanoscience National Center for Nanoscience and TechnologyBeijing 100190China School of Energy Science and Engineering Nanjing Tech UniversityNanjing 211816China

integrated sensor combines multiple sensor functions into a single unit,which has the advantages of miniaturization and better application ***,limited by the sensing platforms of the sensor and the selectivity of the sensitive film,there are still challenges to realize multi-component gas detection in one ***,a principle integration method is proposed to achieve the multi-component gas detection based on the acoustics-electricity-mechanics coupling *** electrical and mechanical properties of the Bi_(2)S_(3)nanobelts materials in different atmospheres indicate the possibility of realizing the principle *** the same time,the surface acoustic wave(SAW)sensor as a multivariable physical transducer can sense both electrical and mechanical *** exposure to 10 ppm NO_(2),NH_(3),and their mixtures,the integrated SAW gas sensor shows a 4.5 kHz positive frequency shift(acoustoelectric effect),an 11 kHz negative frequency shift(mechanics effects),and a reduced 4 kHz negative frequency shift(acoustics-electricity-mechanics coupling effect),***,we realize wireless passive detection of NO_(2)and NH_(3)based on the SAW *** work provides valuable insights that can serve as a guide to the design and fabrication of single sensors offering multi-component gas detection via different gas sensing mechanisms.

关键词： integrated gas sensor bismuth sulfide surface acoustic wave coupling effect wireless passive

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