Integrated sensor based on acoustics-electricity-mechanics coupling effect for wireless passive gas detection
作者机构：School of Optical and Electronic InformationWuhan National Laboratory for OptoelectronicsOptics Valley LaboratoryHuazhong University of Science and TechnologyWuhan 430074China Shenzhen Huazhong University of Science and Technology Research InstituteShenzhen Virtual University ParkShenzhen 518000China Key Laboratory of Optoelectronic Devices and SystemsCollege of Physics and Optoelectronic EngineeringShenzhen UniversityShenzhen 518060China CAS Center for Excellence in NanoscienceNational Center for Nanoscience and TechnologyBeijing 100190China School of Energy Science and EngineeringNanjing Tech UniversityNanjing 211816China
出 版 物：《Nano Research》 (纳米研究（英文版）)
年 卷 期：2023年第16卷第2期
页 面：3130-3141页
核心收录：
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程]
基 金：supported by the National Natural Science Foundation of China(No.61922032) We thank the Program for the Academic Frontier Youth Team of Huazhong University of Science and Technology(HUST)(No.2018QYTD06) the Innovation Fund of Wuhan National Laboratory for Optoelectronics
主 题：integrated gas sensor bismuth sulfide surface acoustic wave coupling effect wireless passive
摘 要：Integrated sensor combines multiple sensor functions into a single unit,which has the advantages of miniaturization and better application ***,limited by the sensing platforms of the sensor and the selectivity of the sensitive film,there are still challenges to realize multi-component gas detection in one ***,a principle integration method is proposed to achieve the multi-component gas detection based on the acoustics-electricity-mechanics coupling *** electrical and mechanical properties of the Bi_(2)S_(3)nanobelts materials in different atmospheres indicate the possibility of realizing the principle *** the same time,the surface acoustic wave(SAW)sensor as a multivariable physical transducer can sense both electrical and mechanical *** exposure to 10 ppm NO_(2),NH_(3),and their mixtures,the integrated SAW gas sensor shows a 4.5 kHz positive frequency shift(acoustoelectric effect),an 11 kHz negative frequency shift(mechanics effects),and a reduced 4 kHz negative frequency shift(acoustics-electricity-mechanics coupling effect),***,we realize wireless passive detection of NO_(2)and NH_(3)based on the SAW *** work provides valuable insights that can serve as a guide to the design and fabrication of single sensors offering multi-component gas detection via different gas sensing mechanisms.
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