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Transient features of graphitization and nitrogen-vacancy color centers in a diamond fabricated by localization femtosecond laser direct writing

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Science China Technological Sciences 2024年第8期67卷 2530-2536页

作者： CUI Lin YIN SiYu HU ZiFan WANG Lei State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University

femtosecond laser direct writing provides an efficient approach to fabricating single nitrogen vacancy(NV) color centers with a relatively high yield. Different from previously reported NV color centers with a random distribution in a bulk diamond or nanocrystals, this gives an opportunity to study the photophysical properties of single NV color centers with precise numbers and positions. However, ultrafast studies on single NV color centers prepared by localization femtosecond laser direct writing are still rare, especially for the graphitization inside a diamond and its relationship with single NV color centers. Here, we report the broadband transient absorption(TA) spectroscopic features of the graphitization and NV color centers in a diamond fabricated by localization femtosecond laser direct writing at room temperature under 400 nm excitation. In comparison with the graphene oxide film, the bleaching features of the graphitization point array in a diamond are similar to reduced graphene oxide,accompanied by excited state absorption signals from local carbon atom vacancy defects in graphene-like structures induced by laser writing. On the other hand, transient features of laser processing array containing single NV color centers with a yield of～50% are different from those of the graphitization point array. Our findings suggest that for ultrashort pulse processing of diamonds, broadband TA spectral signals are sensitive to the surrounding atomic environment of processing sites, which could be applied to laser writing point defects in other materials used as solid-state single photon sources.

关键词： nitrogen-vacancy color center graphitization diamond femtosecond laser direct writing ultrafast spectroscopy

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femtosecond laser direct writing of functional stimulus-responsive structures and applications

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International Journal of Extreme Manufacturing 2023年第4期5卷 375-414页

作者： Yuxuan Zhang Dong Wu Yachao Zhang Yucheng Bian Chaowei Wang Jiawen Li Jiaru Chu Yanlei Hu CAS Key Laboratory of Mechanical Behavior and Design of Materials Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education InstitutesDepartment of Precision Machinery and Precision InstrumentationUniversity of Science and Technology of ChinaHefei 230027People’s Republic of China

Diverse natural organisms possess stimulus-responsive structures to adapt to the surrounding *** by nature,researchers have developed various smart stimulus-responsive structures with adjustable properties and functions to address the demands of ever-changing application environments that are becoming more *** many fabrication methods for stimulus-responsive structures,femtosecond laser direct writing(FsLDW)has received increasing attention because of its high precision,simplicity,true three-dimensional machining ability,and wide applicability to almost all *** paper systematically outlines state-of-the-art research on stimulus-responsive structures prepared by *** on the introduction of femtosecond laser-matter interaction and mainstream FsLDW-based manufacturing strategies,different stimulating factors that can trigger structural responses of prepared intelligent structures,such as magnetic field,light,temperature,pH,and humidity,are emphatically *** applications of functional structures with stimuli-responsive dynamic behaviors fabricated by FsLDW,as well as the present obstacles and forthcoming development opportunities,are discussed.

关键词： stimulus-responsive structures femtosecond laser direct writing laser–matter interaction multifunctionality

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Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

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Light(Advanced Manufacturing) 2023年第4期4卷 207-233页

作者： Long Huang Zhihan Hong Qi-Dai Chen Yong-Lai Zhang Shaoqing Zhao Yongjun Dong Yu-Qing Liu Hua Liu Center for Advanced Optoelectronic Functional Materials Research and Key Laboratory for UV-Emitting Materials and Technology of Ministry of EducationNational Demonstration Center for Experimental Physics EducationNortheast Normal University5268 Renmin StreetChangchun 130024China Wyant College of Optical Sciences The University of Arizona1630 E.University BlvdTucsonArizona 85721USA Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China

The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface ***,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and *** laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano *** exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano *** has demonstrated its value in the fabrication of various microoptical *** study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic ***,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.

关键词： femtosecond laser direct writing Microoptical elements 3D printing Micro/nano fabrication

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Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

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Opto-Electronic Science 2023年第1期2卷 11-22页

作者： Qilin Jiang Long Chen Jukun Liu Yuchan Zhang Shian Zhang Donghai Feng Tianqing Jia Peng Zhou Qian Wang Zhenrong Sun Hongxing Xu State Key Laboratory of Precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 200062China Huawei Technologies Co Ltd.Bantian Longgang DistrictShenzhen 518129China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China

This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical *** regular LIPSSs exhibited good properties as nanowires,with a resistivity almost equal to that of the initial ITO *** changing the laser fluence,the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of±10%.Furthermore,the average transmittance of the ITO films with regular LIPSSs in the range of 1200-2000 nm was improved from 21%to 60%.The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices-particularly in the near-infrared band.

关键词： transparent nanowires periodic surface nanostructures femtosecond laser direct writing ITO film anisotropic electrical conductivity

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Bioinspired micro/nanostructured surfaces prepared by femtosecond laser direct writing for multi-functional applications

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International Journal of Extreme Manufacturing 2020年第3期2卷 42-62页

作者： Yiyuan Zhang Yunlong Jiao Chuanzong Li Chao Chen Jiawen Li Yanlei Hu Dong Wu Jiaru Chu Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes CAS Key Laboratory of Mechanical Behavior and Design of MaterialsDepartment of Precision Machinery and Precision InstrumentationUniversity of Science and Technology of ChinaHefei 230026People's Republic of China Institute of Tribology Hefei University of TechnologyHefei 230009People's Republic of China School of Instrument Science and Opto-Eelectronics Engineering Hefei University of TechnologyHefei 230009People's Republic of China

manufacturing of biomimetic micro/nanostructures due to its specific advantages including high precision,simplicity,and compatibility for diverse materials in comparison with other methods(*** etching,sol-gel process,chemical vapor deposition,template method,and self-assembly).These biomimetic micro/nanostructured surfaces are of significant interest for academic and industrial research due to their wide range of potential applications,including self-cleaning surfaces,oil-water separation,and fog *** review presents the inherent relationship between natural organisms,fabrication methods,micro/nanostructures and their potential ***,we throw a list of current fabrication strategies so as to highlight the advantages of FLDW in manufacturing bioinspired microstructured ***,we summarize a variety of typical bioinspired designs(*** leaf,pitcher plant,rice leaf,butterfly wings,etc)for diverse multifunctional micro/nanostructures through extreme femtosecond laser processing *** on the principle of interfacial chemistry and geometrical optics,we discuss the potential applications of these functional micro/nanostructures and assess the underlying challenges and opportunities in the extreme fabrication of bioinspired micro/nanostructures by *** review concludes with a follow up and an outlook of femtosecond laser processing in biomimetic domains.

关键词： femtosecond laser direct writing multiscale micro/nanostructures extreme fabrication bioinspired applications

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Protein-based soft micro-optics fabricated by femtosecond laser direct writing

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Light(Science & Applications) 2014年第1期3卷 342-348页

作者： Yun-Lu Sun Wen-Fei Dong Li-Gang Niu Tong Jiang Dong-Xu Liu Lu Zhang Ying-Shuai Wang Qi-Dai Chen Dong-Pyo Kim Hong-Bo Sun State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China College of Physics Jilin UniversityChangchun 130023China National Center of Applied Microfluidic Chemistry Department of Chemical EngineeringPohang University of Science and TechnologyPohang 790-784Korea

In this work,we report a novel soft diffractive micro-optics,called‘microscale kinoform phase-type lens(micro-KPL)’,which is fabricated by femtosecond laser direct writing(FsLDW)using bovine serum albumin(BSA)as building blocks and flexible polydimethylsiloxane(PDMS)slices as *** carefully optimizing various process parameters of FsLDW(e.g.,average laser power density,scanning step,exposure time on a single point and protein concentration),the as-formed protein micro-KPLs exhibit excellent surface quality,well-defined three-dimensional(3D)geometry and distinctive optical properties,even in relatively harsh operation environments(for instance,in strong acid or base).laser shaping,imaging and other optical performances can be easily *** importantly,micro-KPLs also have unique flexible and stretchable properties as well as good biocompatibility and ***,such protein hydrogel-based micro-optics may have great potential applications,such as in flexible and stretchable photonics and optics,soft integrated optical microsystems and bioimplantable devices.

关键词： femtosecond laser direct writing micro-optics protein soft

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High throughput direct writing of a mesoscale binary optical element by femtosecond long focal depth beams

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Light(Advanced Manufacturing) 2023年第4期4卷 130-139页

作者： Yue Yang Erse Jia Xinyu Ma Chen Xie Bowen Liu Yanfeng Li Minglie Hu Ultrafast laser Laboratory Key Laboratory of Opto-electronic Information Technical Science of Ministry of EducationSchool of Precision Instruments and Opto-electronics EngineeringTianjin UniversityTianjin 300072China

Bessel beams have multiple applications owing to their propagation-invariant properties,including particle trapping,optical coherence tomography,and material ***,traditional Bessel-beam shaping techniques require bulky components,which limits the development of miniaturized optical systems for integration with other ***,we report a novel femtosecond laser direct writing strategy for fabricating mesoscale(from submicrometer to subcentimeter)binary optical elements with microscale *** strategy utilizes femtosecond beams with a long focal depth to increase throughput while reducing the constraints on critical sample *** a demonstration,we manufactured and characterized a 2.2 mm diameter binary *** experimentally measured quasi-Bessel beam intensity distribution and the numerical results were remarkably consistent,demonstrating a suitable tradeoff between the overall size,efficiency,and structural ***,a compact Bessel lens containing binary axicons was constructed and successfully used for femtosecond laser mask-less ablation of periodic grating-type surface plasmon polariton excitation *** demonstrated approach shows significant potential for fabricating customizable integrated optical components.

关键词： femtosecond laser direct writing Spatial light modulator Binary optical element Mesoscale Bessel beam

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Photonic circuits written by femtosecond laser in glass:improved fabrication and recent progress in photonic devices

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Advanced Photonics 2021年第2期3卷 15-37页

作者： Dezhi Tan Zhuo Wang Beibei Xu Jianrong Qiu Zhejiang University College of Optical Science and EngineeringState Key Laboratory of Modern Optical InstrumentationHangzhouChina Chinese Academy of Sciences CAS Center for Excellence in Ultra-Intense Laser ScienceShanghaiChina

Integrated photonics is attracting considerable attention and has found many applications in both classical and quantum optics,fulfilling the requirements for the ever-growing complexity in modern optical experiments and big data ***(fs)laser direct writing(FLDW)is an acknowledged technique for producing waveguides(WGs)in transparent glass that have been used to construct complex integrated photonic *** possesses unique features,such as three-dimensional fabrication geometry,rapid prototyping,and single step fabrication,which are important for integrated communication devices and quantum photonic and astrophotonic *** fully take advantage of FLDW,considerable efforts have been made to produce WGs over a large depth with low propagation loss,coupling loss,bend loss,and highly symmetrical mode *** summarize the improved techniques as well as the mechanisms for writing high-performance WGs with controllable morphology of cross-section,highly symmetrical mode field,low loss,and high processing uniformity and efficiency,and discuss the recent progress of WGs in photonic integrated devices for communication,topological physics,quantum information processing,and *** challenges and future research directions in this field are also pointed out.

关键词： photonic integrated circuit waveguides femtosecond laser direct writing improved techniques photonic devices

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Simultaneous additive and subtractive three-dimensional nanofabrication using integrated two-photon polymerization and multiphoton ablation

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Light(Science & Applications) 2012年第1期1卷 123-126页

作者： Wei Xiong Yun Shen Zhou Xiang Nan He Yang Gao Masoud Mahjouri-Samani Lan Jiang Tommaso Baldacchini Yong Feng Lu Department of Electrical Engineering University of Nebraska-LincolnLincolnNE 68588-0511USA Department of Mechanical and Automation Engineering Beijing Institute of TechnologyBeijing 100081China Technology and Applications Center Newport CorporationIrvineCA 92606USA

Modern three-dimensional nanofabrication requires both additive and subtractive ***,both processes are largely isolated and generally regarded as incompatible with each *** this study,we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond(fs)laser multiphoton *** demonstrate the new capability,submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully *** method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures,promising for a wide range of applications in integrated optics,microfluidics and microelectromechanical systems.

关键词： femtosecond laser direct writing femtosecond laser multiphoton ablation micro-/nanofabrication two-photon polymerization

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