Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

作     者：Long Huang Zhihan Hong Qi-Dai Chen Yong-Lai Zhang Shaoqing Zhao Yongjun Dong Yu-Qing Liu Hua Liu 

作者机构：Center for Advanced Optoelectronic Functional Materials Researchand Key Laboratory for UV-Emitting Materials and Technology of Ministry of EducationNational Demonstration Center for Experimental Physics EducationNortheast Normal University5268 Renmin StreetChangchun 130024China Wyant College of Optical SciencesThe University of Arizona1630 E.University BlvdTucsonArizona 85721USA Key Laboratory on Integrated OptoelectronicsCollege of Electronic Science and EngineeringJilin UniversityChangchun 130012China 

出 版 物：《Light(Advanced Manufacturing)》 (光（先进制造）（英文）)

年 卷 期：2023年第4卷第4期

页      面：207-233页

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：supported by the National Natural Science Foundation of China(Nos.62275044,62205174,61875036) the Jinan“20 New Colleges and Universities”Innovation Team Introduction Project(202228047) 

主　　题：Femtosecond laser direct writing Microoptical elements 3D printing Micro/nano fabrication 

摘      要：The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface ***,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and *** laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano *** exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano *** has demonstrated its value in the fabrication of various microoptical *** study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic ***,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.