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Electronic tattoos based on large-area Mo2C grown by chemical vapor deposition for electrophysiology

Nano Research 2023年第3期16卷 4100-4106页

作者： Shiyu Wang Xin Wang Weifeng Zhang Xiaohu Shi Dekui Song Yan Zhang Yan Zhao Zihan Zhao Nan Liu Beijing Graphene Institute Beijing 100094China Beijing Key Laboratory of Energy Conversion and Storage Materials College of ChemistryBeijing Normal UniversityBeijing 100875China

Tattoo electronics has attracted intensive interest in recent years due to its comfortable wearing and imperceivable sensing,and has been broadly applied in wearable healthcare and human-machine ***,the tattoo electrodes are mostly composed of metal films and conductive ***-dimensional(2D)materials,which are superior in conductivity and stability,are barely studied for electronic ***,we reported a novel electronic tattoo based on large-area Mo_(2)C film grown by chemical vapor deposition(CVD),and applied it to accurately and imperceivably acquire on-body electrophysiological signals and interface with ***-quality Mo_(2)C film was obtained via optimizing the distribution of gas flow during CVD *** to the finite element simulation(FES),bottom surface of Cu foil covers more stable gas flow than the top surface,thus leading to more uniform Mo_(2)C *** resulting Mo_(2)C film was transferred onto tattoo paper,showing a total thickness of~3μm,sheet resistance of 60-150Ω/sq,and skin-electrode impedance of~5×10^(5)Ω.Such thin Mo_(2)C electronic tattoo(MCET in short)can form conformal contact with skin and accurately record electrophysiological signals,including electromyography(EMG),electrocardiogram(ECG),and electrooculogram(EOG).These body signals collected by MCET can not only reflect the health status but also be transformed to control the robotics for human-machine interface.

关键词： electronic tattoo Mo2C film gas flow chemical vapor deposition electrophysiological signals

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