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Electronic tattoos based on large-area Mo2C grown by chemical vapor deposition for electrophysiology

作     者:Shiyu Wang Xin Wang Weifeng Zhang Xiaohu Shi Dekui Song Yan Zhang Yan Zhao Zihan Zhao Nan Liu Shiyu Wang;Xin Wang;Weifeng Zhang;Xiaohu Shi;Dekui Song;Yan Zhang;Yan Zhao;Zihan Zhao;Nan Liu

作者机构:Beijing Graphene InstituteBeijing 100094China Beijing Key Laboratory of Energy Conversion and Storage MaterialsCollege of ChemistryBeijing Normal UniversityBeijing 100875China 

出 版 物:《Nano Research》 (纳米研究(英文版))

年 卷 期:2023年第16卷第3期

页      面:4100-4106页

核心收录:

学科分类:0831[工学-生物医学工程(可授工学、理学、医学学位)] 0710[理学-生物学] 1002[医学-临床医学] 1001[医学-基础医学(可授医学、理学学位)] 07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0703[理学-化学] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基  金:supported by the National Natural Science Foundation of China(Nos.21903007,22072006,and 22275022) Young Thousand Talents Program(No.110532103) Beijing Normal University Startup funding(No.312232102) Beijing Municipal Science&Technology Commission(No.Z191100000819002) the Fundamental Research Funds for the Central Universities(No.310421109) 

主  题:electronic tattoo Mo2C film gas flow chemical vapor deposition electrophysiological signals 

摘      要:Tattoo electronics has attracted intensive interest in recent years due to its comfortable wearing and imperceivable sensing,and has been broadly applied in wearable healthcare and human-machine ***,the tattoo electrodes are mostly composed of metal films and conductive ***-dimensional(2D)materials,which are superior in conductivity and stability,are barely studied for electronic ***,we reported a novel electronic tattoo based on large-area Mo_(2)C film grown by chemical vapor deposition(CVD),and applied it to accurately and imperceivably acquire on-body electrophysiological signals and interface with ***-quality Mo_(2)C film was obtained via optimizing the distribution of gas flow during CVD *** to the finite element simulation(FES),bottom surface of Cu foil covers more stable gas flow than the top surface,thus leading to more uniform Mo_(2)C *** resulting Mo_(2)C film was transferred onto tattoo paper,showing a total thickness of~3μm,sheet resistance of 60-150Ω/sq,and skin-electrode impedance of~5×10^(5)Ω.Such thin Mo_(2)C electronic tattoo(MCET in short)can form conformal contact with skin and accurately record electrophysiological signals,including electromyography(EMG),electrocardiogram(ECG),and electrooculogram(EOG).These body signals collected by MCET can not only reflect the health status but also be transformed to control the robotics for human-machine interface.

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