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Fabrication of diamond-like carbon films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering

Chinese Journal of Aeronautics 2006年第B12期19卷 119-125页

作者： ZHANG Yi-chen SUN Shao-ni ZHOU Yi MA Sheng-ge BA De-chun School of Mechanical Engineering and Automation Northeastern University Shenyang 110004 China National R＆D Center for Surface Engineering of China Shenzhen 518029 China

diamond-like carbon （DLC） films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the Hall discharging current and the argon/nitrogen ratio on the DLC film＇s performance were studied. The experimental results show that the film＇s surface roughness, the hardness and the Young＇s modulus increase firstly and then decrease with the bias voltage incrementally increases. Also when the substrate temperature rises, the surface roughness of the film varies slightly, but its hardness and Young＇s modulus firstly increase followed by a sharp decrease when the temperature surpassing 120 ℃. With the Hall discharging current incrementally rising, the hardness and Young＇s modulus of the film decrease and the surface roughness of the film on 316L stainless steel firstly decreased and then remains constant.

关键词： fluid machinery and engineering diamond-like carbon films middle frequency unbalanced magnetron sputtering hall ion source

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Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

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Chinese Physics B 2003年第11期12卷 1257-1260页

作者：杨武保王久丽张谷令范松华刘赤子杨思泽 InstituteofPhysics ChineseAcademyofSciencesBeijing100080China

In this paper, the structures, optical and mechanical properties of diamond-like carbon films are studied, which are prepared by a self-fabricated electron cyclotron resonance microwave plasma chemical vapour deposition method at room temperature in the ambient gases of mixed acetylene and nitrogen. The morphology and microstructure of the processed film are characterized by the atomic force microscope image, Raman spectra and middle Fourier transform infrared transmittance spectra, which reveal that there is an intertwisted fibrillar diamond-like structure in the film and the film is mainly composed of sp3 CH, sp3 C-C, sp2 C=C, C=N and C60. The film micro-hardness and bulk modulus are measured by a nano-indenter and the refractive constant and deposition rate are also calculated.

关键词： ECR microwave plasma diamond-like carbon films AFM FTIR

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Polyethylene glycol derived carbon quantum dots nanofluids:An excellent lubricant for diamond-like carbon film/bearing steel contact

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Friction 2022年第9期10卷 1393-1404页

作者： Fu WANG Lunlin SHANG Guangan ZHANG Zhaofeng WANG State Key Laboratory of Solid Lubrication Lanzhou Institute of Chemical PhysicsChinese Academy of SciencesLanzhou 730000China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of SciencesBeijing 100049China

Polyethylene glycol derived carbon quantum dots nanofluids were synthesized via a slow thermal oxidation *** size of carbon quantum dots was ca.2 nm and had a decreasing trend with the increase of oxidation *** used as lubricant in a diamond-like carbon film/bearing steel interface,the nanofluids achieved an ultra-low friction coefficient(μ≈0.02),much lower than that of original polyethylene glycol(μ=0.12).The worn surface analyses revealed that the nanofluids could effectively inhibit the tribo-oxidation of steel counterpart that occurred under original polyethylene glycol lubrication,and hence reduced the abrasion component of ***,the poly-hydroxyl carbon dots and oxidized polyethylene glycol species in nanofluids induced a hydroxyl-rich sliding interface via their tribochemical reactions with friction surfaces,which promoted the adsorption of polyethylene glycol molecules on sliding *** with the mild corrosion wear of steel counterface,this shifted the boundary lubrication to a mixed/film lubrication regime,thereby achieving an ultra-low friction *** above results suggest that the polyethylene glycol derived carbon quantum dots nanofluids should be a quite excellent candidate lubricant for solid–liquid synergy lubrication based on diamond-like carbon films.

关键词： polyethylene glycol diamond-like carbon films ultra-low friction synergy lubrication

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