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A compressed wide period-tunable grating working at low voltage

Journal of Semiconductors 2010年第10期31卷 62-67页

作者：刘翔李铁明安杰王跃林 State Key Laboratory of Transducer Technology National Key Laboratory of Microsystem TechnologyShanghai Institute of Microsystems and Information TechnologyChinese Academy of Sciences Graduate University of the Chinese Academy of Sciences

A MEMS compressed period-tunable grating device with a wide tuning range has been designed, fabricated and characterized. To increase the tuning range, avoid instability with tuning and improve the performance, we propose in this paper a period-tunable grating which is compressed by large-displacement comb actuators with tilted folded beams. The experimental results show that the designed grating device has a compression range of up to 144μm within 37 V driving voltage. The period of the grating can be adjusted continuously from 16 to 14 μm with a tuning range of 12.5%. The maximum tuning range of the first-order diffraction angle is 0.34° at 632.8 nm and the reflectivity of the grating is more than 92.6% in the mid-infrared region. The grating device can be fabricated by simple processes and finds applications in mid-infrared spectrometers.

关键词： period-tunable grating compressed structure comb-drive actuator MEMS

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Voltage-tunable dual-layer terahertz metamaterials

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Microsystems & Nanoengineering 2016年第1期2卷 173-180页

作者： Xiaoguang Zhao Kebin Fan Jingdi Zhang George R.Keiser Guangwu Duan Richard D.Averitt Xin Zhang Department of Mechanical Engineering Boston UniversityBostonMA 02215USA Department of Physics University of CaliforniaSan DiegoLa JollaCA 92093USA Department of Physics Boston UniversityBostonMA 02215USA Department of Electrical and Computer Engineering Duke UniversityDurhamNC 27708USA School of Engineering Brown UniversityProvidenceRI 02912USA

This paper presents the design,fabrication,and characterization of a real-time voltage-tunable terahertz metamaterial based on microelectromechanical systems and broadside-coupled split-ring *** our metamaterial,the magnetic and electric interactions between the coupled resonators are modulated by a comb-drive actuator,which provides continuous lateral shifting between the coupled resonators by up to 20μ*** these strongly coupled split-ring resonators,both a symmetric mode and an anti-symmetric mode are *** increasing lateral shift,the electromagnetic interactions between the split-ring resonators weaken,resulting in frequency shifting of the resonant *** the entire lateral shift range,the symmetric mode blueshifts by~60 GHz,and the anti-symmetric mode redshifts by~50 *** amplitude of the transmission at 1.03 THz is modulated by 74%;moreover,a 180°phase shift is achieved at 1.08 *** tunable metamaterial device has myriad potential applications,including terahertz spatial light modulation,phase modulation,and chemical ***,the scheme that we have implemented can be scaled to operate at other frequencies,thereby enabling a wide range of distinct applications.

关键词： broadside-coupled split-ring resonators(BC-SSRs) comb-drive actuator microelectromechanical systems(MEMS) tunable metamaterials

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