Voltage-tunable dual-layer terahertz metamaterials

作     者：Xiaoguang Zhao Kebin Fan Jingdi Zhang George R.Keiser Guangwu Duan Richard D.Averitt Xin Zhang 

作者机构：Department of Mechanical EngineeringBoston UniversityBostonMA 02215USA Department of PhysicsUniversity of CaliforniaSan DiegoLa JollaCA 92093USA Department of PhysicsBoston UniversityBostonMA 02215USA Department of Electrical and Computer EngineeringDuke UniversityDurhamNC 27708USA School of EngineeringBrown UniversityProvidenceRI 02912USA 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2016年第2卷第1期

页      面：173-180页

核心收录：

学科分类：0808[工学-电气工程] 080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0817[工学-化学工程与技术] 0807[工学-动力工程及工程热物理] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0803[工学-光学工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：We acknowledge the National Science Foundation under Grant No.ECCS-1309835 In addition,we acknowledge support from DOE—Basic Energy Sciences under Grant No.DE-FG02-09ER46643 

主　　题：broadside-coupled split-ring resonators(BC-SSRs) comb-drive actuator microelectromechanical systems(MEMS) tunable metamaterials 

摘      要：This paper presents the design,fabrication,and characterization of a real-time voltage-tunable terahertz metamaterial based on microelectromechanical systems and broadside-coupled split-ring *** our metamaterial,the magnetic and electric interactions between the coupled resonators are modulated by a comb-drive actuator,which provides continuous lateral shifting between the coupled resonators by up to 20μ*** these strongly coupled split-ring resonators,both a symmetric mode and an anti-symmetric mode are *** increasing lateral shift,the electromagnetic interactions between the split-ring resonators weaken,resulting in frequency shifting of the resonant *** the entire lateral shift range,the symmetric mode blueshifts by~60 GHz,and the anti-symmetric mode redshifts by~50 *** amplitude of the transmission at 1.03 THz is modulated by 74%;moreover,a 180°phase shift is achieved at 1.08 *** tunable metamaterial device has myriad potential applications,including terahertz spatial light modulation,phase modulation,and chemical ***,the scheme that we have implemented can be scaled to operate at other frequencies,thereby enabling a wide range of distinct applications.