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A Charge-Trap Memory Device with a Composition-Modulated Zr-Silicate High-k Dielectric Multilayer Structure

Chinese Physics Letters 2010年第6期27卷 254-257页

作者： LV Shi-Cheng GE Zhong-Yang ZHOU Yue XU Bo GAO Li-Gang YIN Jiang XIA Yi-Dong LIU Zhi-Guo Department of Physics and National Laboratory of Solid State Microstructures Nanjing University Nanjing 210093 Department of Materials Science and Engineering and National Laboratory of Solid State Mierostructures Nanjing University Nanjing 210093

We report a novel charge-trap memory device with a composition-modulated Zr-silicate high-k dielectric mul- tilayer structure prepared by using the pulsed laser deposition technique. The device employs amorphous （ZrO2）0.5（SiO2）0.5 as the tunneling and blocking oxide layers, and ZrO2 nanocrystals as the trapping storage layer. Zr02 nanocrystals are precipitated from the phase separation of （ZrO2）0.5（SiO2）0.2 films annealed at 800℃, and isolated from each other within the amorphous （ZrO2）0.5（SiO2）0.5 matrix. Our charge trapping device shows a memory window of 2.6 V and a stored electron density of 1×10^13/cm2.

关键词： ELECTRIC charge & distribution COMPUTER storage devices MODULATION (Electronics) zirconium compounds MULTILAYERED thin films PULSED laser deposition AMORPHOUS substances TUNNELING (Physics) TEMPERATURE effect

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Impact of polarization switching on the effective carrier mobility of HfZrOx ferroelectric field-effect transistor

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Science China(Information Sciences) 2023年第6期66卷 305-306页

作者： Fenning LIU Yue PENG Wenwu XIAO Yan LIU Xiao YU Genquan HAN School of Microelectronics Xidian University Research Center for Intelligent Chips Xi'an UniIC Semiconductors Hangzhou Institute of Technology Xidian University

Doped-HfO2ferroelectrics have attracted tremendous research interest for non-volatile memory and memory-incomputing applications due to their CMOS compatibility,advantages of non-destructive reading,and low power cons... 详细信息

关键词： zirconium compounds

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Structural characteristics and mechanism of hydrogen-induced disproportionation of the ZrCo alloy

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International Journal of Minerals,Metallurgy and Materials 2012年第11期19卷 1010-1015页

作者： Xiu-mei Guo Shu-mao Wang Xiao-peng Liu Zhi-nian Li Jian-hua Ye Hui-ping Yuan Li-jun Jiang Energy Material and Technology Institute General Research Institute for Nonferrous Metals Beijing 100088 China

The intermetallic compound ZrCo was prepared, and its hydrogen-induced disproportionation in hydrogen desorption processes was investigated. The hydrogenation-dehydrogenation thermodynamics of the ZrCo alloy was evaluated by pressure-composition isotherm measurements at different temperatures. The kinetic processes of hydrogen-induced disproportionation at different temperatures under certain pressures were detailedly studied. The disproportionation rate of the ZrCo alloy increased with the increases of temperature and initial hy- drogen pressure under experimental conditions. However, the maximum attainable extent of disproportionation did not change much with an increase in temperature or initial hydrogen pressure. The crystallographic structure analysis of the ZrCo alloy combining with its corre- sponding dehydrogenation kinetic curves under the conditions of an initial hydrogen pressure of 0.2 MPa and a temperature of 723 K indi- cated that the basic process of disproportionation reactions was composed of four stages： rapid dehydrogenation of ZrCoH3, equilibrium of dehydrogenation, simultaneity of dehydrogenation and disproportionation, and completion of disproportionation.

关键词： zirconium compounds cobalt compounds hydrogenation dehydrogenation structural analysis thermodynamics

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