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Improved magnetic anisotropy of Co-based multilayer film with nitrogen dopant

Rare Metals 2021年第10期40卷 2855-2861页

作者： Ling-Ran Yu xiu-Lan xu Yun-Long Jia xuan Geng xu-Jie Ma Yi-Fei Ma Yong-Hui Zan Chun Feng Jiao Teng School of Materials Science and Engineering University of Science and Technology BeijingBeijing 100083China School of Civil and Resources Engineering University of Science and Technology BeijingBeijing 100083China School of Mathematics and Physics University of Science and Technology BeijingBeijing 100083China

Modulating the magnetic anisotropy of ferromagnetic thin films is crucial for constructing high-density and energy efficient magnetic memory devices. Ta/W(N)/Co/Pt multilayers were deposited on silicon substrates by magnetron sputtering at room temperature. The influences of N dopant on the magnetic anisotropy of the multilayers were investigated by preparing the sample with N incorporation. The results indicate that when sputtering W target with only argon gas(Ar), Ta/W/Co/Pt sample shows inplane magnetic anisotropy(IMA). When sputtering W target at a different amount of N_(2) and Ar atmosphere, it can induce perpendicular magnetic anisotropy(PMA) for proper N-doped Ta/W(N)/Co/Pt sample. When the gas flow ratio of Ar:N_(2) is 16:6, the effective magnetic anisotropy constant reach its maximum value of 1.68×10^(5) J·m^(-3),which enhanced by about 400% than our past works(annealing treatment is necessary to induce PMA in Pt/Co/MgO system). x-ray diffraction(xRD) and x-ray reflection(xRR) results demonstrate that N dopants can effectively promote the formation of b-W phase and reduce the roughness of W(N)/Co interface, which are beneficial for PMA. x-ray electron spectroscopy(xPS) analysis reveals that N doping redistributes Co charges, nitrogen ions participate in electron allocation of Co and attract some electrons of Co to form orbital hybridization between Co3 d and N 2 p. This may be another important reason for the PMA formation.

关键词： Magnetic multilayers N dopants Perpendicular magnetic anisotropy x-ray electron spectroscopy

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