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检索条件"主题词=Sputtering parameters"
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Structural,Wettability and Optical Investigation of Titanium Oxynitride Coatings:Effect of Various sputtering parameters
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Journal of Materials Science & Technology 2012年 第6期28卷 512-523页
作者: Sushant K Rawal Amit Kumar Chawla R.Jayaganthan Ramesh Chandra Centre of Nanotechnology Indian Institute of Technology RoorkeeRoorkee-247667India Nano Science Laboratory Institute Instrumentation CentreIndian Institute of Technology RoorkeeRoorkee-247667India Department of Mechanical Engineering Charotar University of Science and TechnologyChanga 388421India Department of Physics University of Petroleum and Energy StudiesDehradun-48007India Department of Metallurgical and Materials Engineering Indian Institute of Technology RoorkeeRoorkee-247667India
The objective of the present work is to investigate the effect of various sputtering parameters such as nitrogen flow rate, deposition time and sputtering pressure on structural, wettability and optical properties of ... 详细信息
来源: 维普期刊数据库 维普期刊数据库 同方期刊数据库 同方期刊数据库 评论
Effect of the sputtering parameters on the Structure and Properties of Cu_3N Thin Film Materials
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Journal of Wuhan University of Technology(Materials Science) 2010年 第6期25卷 935-937页
作者: 钱显毅 黄致新 School of Electronic Information & Electric Engineering Changzhou Institute of Technology College of Physical Science and Technology Cental China Normal University
Copper nitride (Cu3N) thin films were successfully deposited on glass substrates by reactive radio frequency magnetron *** effects of sputtering parameters on the structure and properties of the films were *** exper... 详细信息
来源: 维普期刊数据库 维普期刊数据库 同方期刊数据库 同方期刊数据库 评论
Deposition and characterization for high-quality Ti-Ni-Cu thin films with higher Cu content
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Rare Metals 2021年 第8期40卷 2127-2133页
作者: Jun Li Xiao-Yang Yi Yu Zheng Jing Wang Hai-Zhen Wang Xiang-Long Meng Zhi-Yong Gao Yue-Hui Ma College of Mechanical and Electrical Engineering Northeast Forestry University150001HarbinChina School of Materials Science and Engineering Harbin Institute of Technology150001HarbinChina Lanzhou Seemine SMA Co.Ltd 730010LanzhouChina
In order to attain high-quality Ti-Ni-Cu film,the surface morphologies,chemical compositions and mechanical properties of Ti-Ni-Cu thin films prepared by direct current(DC)magnetron sputtering at various processes wer... 详细信息
来源: 维普期刊数据库 维普期刊数据库 同方期刊数据库 同方期刊数据库 评论