检索结果-南通市图书馆

第26届中国控制与决策会议

作者： Lu Rui Liaoning Police College Academy

ISBN: (纸本)9781479937066

Because of residency time constraits for cluster tools, it is very difficult to schedule them. This paper addresses their scheduling issues and conducts their schedulability and scheduling analysis. A linear programming model with temporal constraints of dual-blade robot and processing modules is developed. With the model, the cycle process of the dual-blade robot and processing module is analyzed. Based on the model and the analysis, necessary and sufficient conditions under which the system is schedulable are presented. At the same time, the control strategy to make the non-schedulability scheme into schedulable scheme is discussed by means of decreasing the processing mudule number and choosing the appropriate processing time. The simulation results show that the mentioned model and control strategy is helpful to decrease the number of the test wafers and to increase the wafer productivity.

关键词： Semiconductor Manufactory Cluster Tools Schedulability Analysis residency time

来源： cnki会议评论

在线全文

cnki会议

学校读者我要写书评

暂无评论

Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy

引用

Journal of Southeast University(English Edition) 2013年第2期29卷 187-193页

作者：周炳海王翥陈佳同济大学机械与能源工程学院上海201804

In order to enhance the utilization of single-ann cluster tools and optimize the scheduling problems of dynamic reaching wafers with residency time and continuous reentrancy constraints, a structural heuristic scheduling algorithm is presented. A nonlinear programming scheduling model is built on the basis of bounding the scheduling problem domain. A feasible path search scheduling method of single-arm robotic operations is put forward with the objective of minimal makespan. Finally, simulation experiments are designed to analyze the scheduling algorithms. Results indicate that the proposed algorithm is feasible and valid to solve the scheduling problems of multiple wafer types and single-ann clusters with the conflicts and deadlocks generated by residency time and continuous reentrancy constraints.

关键词： cluster tools scheduling residency time continuous reentrancy

来源：

维普期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：