Research on Scheduling of Cluster Tools with Residency Time
作者单位：Liaoning Police College Academy
会议名称：《第26届中国控制与决策会议》
会议日期：2014年
学科分类：1201[管理学-管理科学与工程(可授管理学、工学学位)] 08[工学] 080202[工学-机械电子工程] 0804[工学-仪器科学与技术] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0812[工学-计算机科学与技术（可授工学、理学学位）]
基 金：Supported by Program for Liaoning Excellent Talents in University(LJQ2011132)
关 键 词：Semiconductor Manufactory Cluster Tools Schedulability Analysis Residency Time
摘 要：Because of residency time constraits for cluster tools, it is very difficult to schedule them. This paper addresses their scheduling issues and conducts their schedulability and scheduling analysis. A linear programming model with temporal constraints of dual-blade robot and processing modules is developed. With the model, the cycle process of the dual-blade robot and processing module is analyzed. Based on the model and the analysis, necessary and sufficient conditions under which the system is schedulable are presented. At the same time, the control strategy to make the non-schedulability scheme into schedulable scheme is discussed by means of decreasing the processing mudule number and choosing the appropriate processing time. The simulation results show that the mentioned model and control strategy is helpful to decrease the number of the test wafers and to increase the wafer productivity.