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Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation

Nanomanufacturing and Metrology 2022年第2期5卷 139-148页

作者： Janik Schaude Tino Hausotte Chair of Manufacturing Metrology Friedrich-Alexander-Universität Erlangen-NürnbergNägelsbachstr.2591052ErlangenGermany

This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope(AFM)with an adjustable probe direction,which is integrated into a nano measuring machine(NMM-1).The AFM,which is operated in closed-loop intermittent contact mode,is based on two rotational axes that enable the adjustment of the probe direction to cover a complete *** axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion,which ultimately limits the achievable measurement uncertainty of the measuring ***,to reduce the thermal sensitivity of the system,the redesign of the rotational kinematics is ***,in this article,some preliminary investigations on the application of a self-sensing cantilever with an integrated micro heater for its stimulation will be *** previous investigations,a piezoelectric actuator has been applied to stimulate the ***,the removal of the piezoelectric actuator,which is enabled by the application of a cantilever with an integrated micro heater,promises an essential simplification of the sensor ***,in the future it might be possible to use materials with a low coefficient of thermal expansion,which are often difficult to machine and therefore only allow for rather simple ***,because of the creepage of piezoelectric actuators,their removal from the metrology frame might lead to improved metrological *** will be shown,there are no significant differences between the two modes of ***,the redesigned rotational system will be based on the cantilever with integrated sensing and actuation.

关键词： Atomic force microscopy Tilting AFM piezoresistive cantilever Self-actuated cantilever Nano measuring machine

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