Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation
作者机构：Chair of Manufacturing MetrologyFriedrich-Alexander-Universität Erlangen-NürnbergNägelsbachstr.2591052ErlangenGermany
出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)
年 卷 期：2022年第5卷第2期
页 面：139-148页
核心收录：
学科分类：08[工学] 082303[工学-交通运输规划与管理] 082302[工学-交通信息工程及控制] 0823[工学-交通运输工程]
基 金：funded by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)-TRR 285-Project-ID 418701707,subproject C05 Open Access funding enabled and organized by Projekt DEAL
主 题：Atomic force microscopy Tilting AFM Piezoresistive cantilever Self-actuated cantilever Nano measuring machine
摘 要：This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope(AFM)with an adjustable probe direction,which is integrated into a nano measuring machine(NMM-1).The AFM,which is operated in closed-loop intermittent contact mode,is based on two rotational axes that enable the adjustment of the probe direction to cover a complete *** axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion,which ultimately limits the achievable measurement uncertainty of the measuring ***,to reduce the thermal sensitivity of the system,the redesign of the rotational kinematics is ***,in this article,some preliminary investigations on the application of a self-sensing cantilever with an integrated micro heater for its stimulation will be *** previous investigations,a piezoelectric actuator has been applied to stimulate the ***,the removal of the piezoelectric actuator,which is enabled by the application of a cantilever with an integrated micro heater,promises an essential simplification of the sensor ***,in the future it might be possible to use materials with a low coefficient of thermal expansion,which are often difficult to machine and therefore only allow for rather simple ***,because of the creepage of piezoelectric actuators,their removal from the metrology frame might lead to improved metrological *** will be shown,there are no significant differences between the two modes of ***,the redesigned rotational system will be based on the cantilever with integrated sensing and actuation.
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