检索结果-南通市图书馆

Study on Static Deflection Model of MEMS Capacitive Microwave power Sensors

Chinese Journal of Electronics 2024年第5期33卷 1188-1195页

作者： Ye JIN Debo WANG College of Electronic and Optical Engineering & College of Flexible Electronics (Future Technology) Nanjing University of Posts and Telecommunications College of Integrated Circuit Science and Engineering Nanjing University of Posts and Telecommunications

In this paper, a static deflection model of MEMS cantilever beam is proposed, which can better study the force deformation of micro-electro-mechanical system(MEMS) cantilever beam and the output characteristics of capacitive microwave power sensor. The deflection curve is used to describe the deformation of the cantilever beam and then the overload power and sensitivity of this power sensor are derived. It is found that the overload power decreases with the beam length, and increases with the initial height of beam. The sensitivity increases with the beam length, and has a linear growth relationship with the measuring electrode width. A MEMS dual-channel microwave power sensor is designed, fabricated and measured. At a microwave signal frequency of 10 GHz, the sensitivity of the sensor is measured to be 0.11 V/W for the thermoelectric detection channel and 65.17 fF/W for the capacitive detection channel. The sensitivity calculated by the lumped model is 92.93 fF/W, that by the pivot model is 50.88 fF/W,and that by the deflection model proposed in this work is 75.21 fF/W. Therefore, the theoretical result of the static deflection model is more consistent with the measured result and has better accuracy than the traditional lumped model and pivot model.

关键词： Microwave measurement Micromechanical devices Microelectromechanical systems Sensitivity Voltage measurement Accuracy Deformation Micro-electro-mechanical system (MEMS) cantilever beam Static deflection model power sensor overload power

来源：

同方期刊数据库

同方期刊数据库评论

在线全文

学校读者我要写书评

暂无评论

Research on a Ka-Band MEMS power Sensor Investigated with an MEMS Cantilever Beam

引用

Chinese Journal of Electronics 2020年第2期29卷 378-384页

作者： WANG Debo GU Xinfeng XIE Jiangcheng ZHANG Dong Laboratory of Modern Acoustics of MOE Nanjing University Nanjing University of Posts and Telecommunication

In this work, a novel high overload Ka-band power sensor with a Micro-electro-mechanical system(MEMS) cantilever beam is investigated in order to improve the measurement dynamic range and the *** fabrication of the Ka-band power sensor is divided into front side and back side processing with a combination of surface and bulk micromachining of Ga *** low-power measurement reveals that the terminating-type sensitivity is close to 0.081, 0.076 and0.072 m V/m W at 34, 35 and 36 GHz, respectively. The high-power measurement indicates that the capacitivetype sensitivity is around 4.9 f F/W at Ka-band. The overload power measurements show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than200 m W, and enhance the bandwidth by increasing the top end of the range into no less than 36 GHz. There is an important reference value to achieve the high overload and wide frequency band for the thermoelectric microwave power sensors.

关键词： power sensor Sensitivity overload power Micro-electro-mechanical system(MEMS) Cantilever beam

来源：

同方期刊数据库评论

在线全文

同方期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：