Research on a Ka-Band MEMS Power Sensor Investigated with an MEMS Cantilever Beam
Research on a Ka-Band MEMS Power Sensor Investigated with an MEMS Cantilever Beam作者机构：Laboratory of Modern Acoustics of MOE Nanjing University Nanjing University of Posts and Telecommunication
出 版 物：《Chinese Journal of Electronics》 (电子学报(英文))
年 卷 期：2020年第29卷第2期
页 面：378-384页
核心收录：
学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 0701[理学-数学]
基 金：supported by the National Natural Science Foundation of China(No.61704086,No.11674173,No.11874216) the China Postdoctoral Science Foundation(No.2017M621692) Jiangsu Postdoctoral Foundation(No.1701131B) the Postgraduate Research&Practice Innovation Program of Jiangsu Province(No.SJKY19_0816)
主 题：Power sensor Sensitivity Overload power Micro-electro-mechanical system(MEMS) Cantilever beam
摘 要：In this work, a novel high overload Ka-band power sensor with a Micro-electro-mechanical system(MEMS) cantilever beam is investigated in order to improve the measurement dynamic range and the *** fabrication of the Ka-band power sensor is divided into front side and back side processing with a combination of surface and bulk micromachining of Ga *** low-power measurement reveals that the terminating-type sensitivity is close to 0.081, 0.076 and0.072 m V/m W at 34, 35 and 36 GHz, respectively. The high-power measurement indicates that the capacitivetype sensitivity is around 4.9 f F/W at Ka-band. The overload power measurements show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than200 m W, and enhance the bandwidth by increasing the top end of the range into no less than 36 GHz. There is an important reference value to achieve the high overload and wide frequency band for the thermoelectric microwave power sensors.
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