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Fabrication of ordered micro/nanostructures Using Probe‑Based Force‑Controlled micromachining System

Chinese Journal of Mechanical Engineering 2022年第6期35卷 178-193页

作者： Yanquan Geng Yuzhang Wang Jianxiong Cai Jingran Zhang Yongda Yan Key Laboratory of micro‑systems and micro‑structures Manufacturing of Ministry of Education Harbin Institute of TechnologyHarbin 150001China Center for Precision Engineering Harbin Institute of TechnologyHarbin 150001China College of Mechanical and Electric Engineering Changchun University of Science and TechnologyChangchun 130000China

This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/*** the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/*** non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent *** the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array *** addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μ***,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe *** indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.

关键词： ordered micro/nanostructure Probe-based micromachining In-process force-controlled Indentation array micro cutting

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