Fabrication of Ordered Micro/Nanostructures Using Probe‑Based Force‑Controlled Micromachining System

作     者：Yanquan Geng Yuzhang Wang Jianxiong Cai Jingran Zhang Yongda Yan Yanquan Geng;Yuzhang Wang;Jianxiong Cai;Jingran Zhang;Yongda Yan

作者机构：Key Laboratory of Micro‑systems and Micro‑structures Manufacturing of Ministry of EducationHarbin Institute of TechnologyHarbin 150001China Center for Precision EngineeringHarbin Institute of TechnologyHarbin 150001China College of Mechanical and Electric EngineeringChangchun University of Science and TechnologyChangchun 130000China 

出 版 物：《Chinese Journal of Mechanical Engineering》 (中国机械工程学报（英文版）)

年 卷 期：2022年第35卷第6期

页      面：178-193页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0702[理学-物理学] 

基　　金：National Natural Science Foundation of China(Grant Nos.52035004,51911530206,51905047) Heilongjiang Provincial Natural Science Foundation of China(Grant No.YQ2020E015) Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(Grant No.SKLRS202001C) Young Elite Scientist Sponsorship Program by CAST(Grant No.YESS20200155) 

主　　题：Ordered micro/nanostructure Probe-based micromachining In-process force-controlled Indentation array Micro cutting 

摘      要：This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/*** the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/*** non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship between the adjacent *** the one array indentations,nanostructures with good depth consistency and periodicity can be formed after the depth of the indentation becoming stable,and the variation of the rotation angle results in the large difference between the morphology of the formed nanostructures at the bottom of the one array *** addition,for the indentation arrays,the nanostructures with good consistency and periodicity of the shape and depth can be generated with the spacing greater than 1μ***,Raman tests are also carried out based on the obtained ordered micro/nanostructures with Rhodamine probe *** indentation arrays with a smaller spacing lead to better the enhancement effect of the substrate,which has the potential applications in the fields of biological or chemical molecular detection.