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Experimental study of fabricating SiC mirror in full aperture with optimized fixed abrasive polishing pad

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Chinese Optics Letters 2014年第A01期12卷 140-144页

作者：王旭张峰 Key Laboratory of optical System Advanced Manufacturing Technology Changchun Laboratory of Optics Fine Mechanics and Physics Chinese Academy of Science Changchun 130033 China

The removal function test is carried out on the earlier round-pellet polishing pad. The concept of filling factor is introduced to evaluate the removal function obtained from the experiments mentioned in the paper. To improve the filling factor and characteristics of the polishing pad, the pad structure is optimized according to the experimental results of the round-pellet pad. The removal function of the new polishing pad is simulated with MATLAB. The stability experiment is carried out in full aperture at the same time. The fixed abrasive and the slurry abrasive polishing experiment both are performed under the same conditions. Finally, the structural similarity index is introduced to evaluate the similarity between simulations and experiments. The best structural similaritv index of multi-square-mellet oad is 0.4257. The comparison results are acceptable and Positive. The optimized fixed abrasive polishing pad is proved to be highly promising for large-diameter SiC mirror fabrication.

关键词： 220.0220 optical design and fabrication 220.4000 Microstructure fabrication 220.4610 optical fabrication 220.5450 Polishing

Theoretical study on the removal function of computer controlled polishing SiC mirror with fixed abrasive

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Chinese Optics Letters 2012年第B06期10卷 168-173页

作者：王旭郑立功 Key Laboratory of optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

A fixed abrasive technology combined with computer controlled optical surfacing is discussed, and a removal function model for multi-pellet polishing pad is established based on the removal function theory of planar motion. The parameters of the model, such as the movement eccentricity of the polishing pad and the distance between pellets, are optimized by introducing a approaching factor and a curve RMS distance in the simulation. The comparison of the theoretical model and the experimental results indicate that the error between the theoretical maximum removal rate and the experimental data is 0.0073 #m/min, and its error ratio is 5.58~; the RMS distance error between the theoretical removal function curve and the experimental curve is 0.0849 /~m and its error ratio is 7.01%. The veracity of the theoretical model is verified by experimental results, which predicts the feasibility of the fixed abrasive polishing technology and establishes a promising basis for the SiC mirror precision fabrication field.

关键词： 220.0220 optical design and fabrication 220.4000 Microstructure fabrication 220.4610 optical fabrication 220.5450 Polishing

design of antireflective coatings for AZO low infrared emissivity layer

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Chinese Optics Letters 2013年第13期11卷 9-11页

作者：郭婷婷郑礼清 Jean Pierre Nshimiyimana 刁训刚陈强 School of Physics and Nuclear Energy Engineering Beihang University Beijing 100191 China Dongguan CAMDA New Energy Research Institute Dongguan 523407 China

In this letter, we investigate the structural, optical, and electrical properties of Al-doped ZnO （AZO） thin film coating prepared by direct current （DC） facing-target sputtering method at room temperature, of which the average optical transmittance is 81% between 400 and 700 nm while the sheet resistance is about 10 Ω/□. Then, based on this AZO coating, in order to enhance the transmittance, interfacial adhesion strength and weathering resistance, two kinds of antireflective coatings are designed for different application purposes. For the two kinds, the highest transmittances in the visible region （400 700 nm） can reach 86.9% and 81.8%. resoectivelv. The design is performed using Macleod optical design software.

关键词： 160.0160 Materials 200.0200 Optics in computing 220.0220 optical design and fabrication 310.0310 Thin films

Pulsed DC magnetron sputtering of transparent conductive oxide layers

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Chinese Optics Letters 2013年第13期11卷 21-25页

作者： Astrid Bingel Kevin Fiichsel Norbert Kaiser Andreas Tunnerman Institute of Applied Physics Abbe Center of Photonics Friedrich-Schiller-Universitgt Jena Max-Wien-Platz 1 07743 Jena Germany Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Str. 7 07745 3ena Germany

A comprehensive material study of different transparent conductive oxides （TCOs） is presented. The layers are deposited by pulsed direct current （DC） magnetron sputtering in an inline sputtering system. Indium tin oxide （ITO） films are studied in detail. The optimum pressure of 0.33 Pa （15Ar：202） produces a 300- nm thin film with a specific resistivity p of 2.2 × 10-6 Ωm and a visual transmittance of 81%. Alternatively, ZnO：A1 and ZnO：Ga layers with thicknesses of 200 and 250 nm are deposited with a minimum resistivity of 5.5× 10-6 and 6.8× 10-6Ωm, respectively. To compare the optical properties in the ultraviolet （UV） range, the optical spectra are modeled and the band gap is determined.

关键词： 310.0310 Thin films 220.0220 optical design and fabrication 160.0160 Materials

Octagonal dual-concentric-core photonic crystal fiber for C-band dispersion compensation with low confinement loss

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Chinese Optics Letters 2013年第14期11卷 30-32页

作者：梁文斌刘宁亮李智华陆培祥 Wuhan National Laboratory for Optoelectronics School of Physics Huazhong University of Science ~: Technology Wuhan 430074 China Key Laboratory of Fundamental Physical Quantities Measurement of Ministry of Education Huazhong University of Science and Technology Wuhan 430074 China

A novel kind of octagonal dual-concentric-core photonic crystal fiber （PCF） is calculated with the finite element method （FEM） and proposed for broadband compensation. In order to realize highly negative dispersion, the hole diameter of the second ring is reduced relative to conventional PCFs. Numerical simulation results show that when the diameters of large holes and small holes are 0.77 pm and 0.5 #m, respectively, and the pitch of the adjacent rings is 1.1 μm, the negative dispersion can achieve about 840 ***^-***^-1 at 1 550 nm and the dispersion slope can match with single mode fiber （SMF-28） perfectly. This PCF can compensate the positive dispersion and also its slope of about 50 times its length of SMF-28 fiber, which is suitable for C-band optical fiber telecommunication as a dispersion compensation fiber.

关键词： 060.0060 Fiber optics and optical communications 220.0220 optical design and fabrication 230.0230 optical devices

fabrication of low loss polymer inverse ridge waveguide using inductively coupled plasma etching

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Chinese Optics Letters 2012年第B06期10卷 174-177页

作者：孙小强张琨陈长鸣李晓东王菲张大明 State Key Laboratory on Integrated Optoelectronics Jilin University Changchun 130012 China

The optimized oxygen inductively coupled plasma etching parameters are systematically studied to fabricate Poly （methyl-methacrylate-glycidly-methacrylate） inverse ridge waveguide with smooth vertical fea- tures. The etch rate surface roughness and vertical profile are characterized by atomic force microscopy and scanning electron microscopy. The optimized etching parameters are found to be 400-W antenna-RF power, 30oW radio frequency （RF） bias power, 1-Pa-chamber pressure, and 40-sccm be O2-flow rate. Spin- coating butyl acetate diluted polymer solution onto the channel waveguide is proved to be an effective method which can decrease the surface roughness. According the results, the RMS rouqhness of the film decreases 80%. optical propagation loss can be reduced from 2.6 to 1.5 dB/cm for the above reason.

关键词： 220.0220 optical design and fabrication 130.0130 Integrated optics

Measuring method for the vertex radius of curvature of an asphere with a laser tracker

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Chinese Optics Letters 2015年第13期13卷 66-69页

作者：李锐钢 Key Laboratory of optical System Advanced Manufacturing Technology Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences Changchun 130033 China

Aspheric elements are widely applied in optical systems and the vertex radius of curvature （VROC） is one of the important fundamental parameters of an asphere. We present a method for measuring the VROC of asphere. We use a portable laser tracker to measure the optical interval of the null testing path and then determine the VROC of the asphere through ray tracing. Based on this method, we carry out an accurate measurenlent. The accuracy can reach up to 0.056 mm on an asphere with VROC of approximately 2 m and the relative error is 0.003%.

关键词： 220.0220 optical design and fabrication 220.1250 Aspherics 220.4840 Testing 120.0120 Instrumentation, measurement, and metrology