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Bifurcation-Based Stability Analysis of Electrostatically Actuated micromirror as a Two Degrees of Freedom System

Computer Modeling in Engineering & Sciences 2018年第3期114卷 261-276页

作者： Kuntao Ye Yan Luo Yingtao Jiang Jiangxi University of Science and Technology School of ScienceGanzhouJiangxiChina 341000 University of Nevada Las Vegas Department of Electrical and Computer EngineeringLas VegasNVUSA 89154

Torsional micromirror devices have been widely used in micro displays,RF switches,optical communications,and optical coherence tomography *** order to study the stability of electrostatically driven torsional micromirror system with double bottom plates and two voltage sources,a dimensionless,two degrees of freedom(2-DoF)dynamic model was *** by the dimensionless phase space model equation,the pull-in and bifurcation phenomena were analyzed using the Hamiltonian method and numerical *** particular,the influence of the damping coefficient and the torsion-bending coupling effect on the phase trajectory was ***,the conditions that can lead to pull-in were numerically determined for saddle-node,pitchfork and Hopf bifurcations in the framework of 2-DoF *** showed that the dynamic pull-in voltage as predicted by the proposed 2-DoF system model is considerably lower than that by the one degree of freedom(1-DoF)system *** was also confirmed that the pull-in voltage varies with the damping coefficient and/or the ratio of the two voltages applied to the bottom plates of the *** modelling method and stability analysis presented in this paper shall provide valuable insight to the design and control of electrostatically actuated micromirror systems.

关键词： MEMS micromirror bifurcation pull-in stability phase trajectories DoF

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A Into-Plane Rotating micromirror Actuated by a Hybrid Electrostatic Driving Structure

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Journal of Semiconductors 2005年第9期26卷 1699-1704页

作者：吴文刚陈庆华尹冬青闫桂珍陈章渊郝一龙徐安士北京大学微电子学研究院微米/纳米加工技术国家级重点实验室北京100871 北京大学电子学系区域光纤通信网与新型光纤系统国家重点实验室北京100871

A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.

关键词： micromirror hybrid electrostatic driving structure planar plate drive vertical comb drive mixed sil icon micromachining

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Macro Model Study for Nonlinear Spring of Tense Torsion Bar in Gap-Closing Type Electrostatic micromirror

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Journal of Mechanics Engineering and Automation 2012年第7期2卷 446-454页

作者： Gyu II Shim Ryoichi Mimoto Shinya Kumagai Minoru Sasaki Dept. of Advanced Science and Technology Toyota Technological Institute Nagoya 468-8511 Japan

Nonlinear spring characteristics of the tense torsion bar in the gap-closing type electrostatic micromirror are examined. The macro model is introduced for the experimental study. The tension applied in the torsion bar is well controlled using the electromagnetic attraction. This controllability is suited for clearing the nonlinear nature. The tension is confirmed to have the effect to widen the controllable angle range of the mirror suppressing the pull-in. The pull-in angle is observed to increases to about 74% of the mechanical limit angle at the tension of 0,96 N. This is significantly larger than 44% of the case with the linear spring. The larger resonant frequency is maintained. The hardening of the spring can keep the balance with the electrostatic force over the limit of the linear spring. The observed features are explained reasonably with the combination of twisting and bending displacements of the torsion bar.

关键词： micromirror electrostatic actuator pull-in nonlinear spring macro model

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Integral sliding mode based optimal composite nonlinear feedback control for a class of systems

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Control Theory and Technology 2014年第2期12卷 139-146页

作者： Zhou ZHENG Weijie SUN Hui CHEN John T. W. YEOW College of Automation Science and Engineering South China University of Technology

This paper presents an optimization method of designing the integral sliding mode （ISM） based composite nonlinear feedback （CNF） controller for a class of low order linear systems with input saturation. The optimal CNF control is first designed as a nominal control to yield high tracking speed and low overshoot. The selection of all the tuning parameters for the CNF control law is turned into a minimization problem and solved automatically by particle swarm optimization （PSO） algorithm. Subsequently, the discontinuous control law is introduced to reject matched disturbances. Then, the optimal ISM-CNF control law is achieved as the sum of the optimal CNF control law and the discontinuous control law. The effectiveness of the optimal ISM-CNF controller is verified by comparing with a step by step designed one. High tracking performance is achieved by applying the optimal ISM-CNF controller to the tracking control of the micromirror.

关键词： Composite nonlinear feedback Integral sliding mode Input saturation PSO micromirror

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Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review

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Journal of Semiconductors 2022年第8期43卷 24-32页

作者： Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li Key Laboratory for Microstructural Material Physics of Hebei Province School of ScienceYanshan UniversityQinhuangdao 066004China Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(Ministry of Education) Beijing Key Laboratory of Nanophotonics&Ultrafine Optoelectronic Systemsand School of PhysicsBeijing Institute of TechnologyBeijing 100081China Yangtze Delta Region Academy of Beijing Institute of Technology Jiaxing 314019China

Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced *** simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical *** this paper,we will briefly review the technologies and applications of Si-based *** basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic *** to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical ***,future research and development prospects of Si-based MOEMS are discussed.

关键词： MOEMS Si-based micromachining technology micromirror micro-spectrometer optical switches

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