Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review

作     者：Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li Shanshan Chen;Yongyue Zhang;Xiaorong Hong;Jiafang Li

作者机构：Key Laboratory for Microstructural Material Physics of Hebei ProvinceSchool of ScienceYanshan UniversityQinhuangdao 066004China Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(Ministry of Education)Beijing Key Laboratory of Nanophotonics&Ultrafine Optoelectronic Systemsand School of PhysicsBeijing Institute of TechnologyBeijing 100081China Yangtze Delta Region Academy of Beijing Institute of TechnologyJiaxing 314019China 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2022年第43卷第8期

页      面：24-32页

核心收录：

学科分类：080805[工学-电工理论与新技术] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 080202[工学-机械电子工程] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China under Grant No.61975016 the Science and Technology Project of Guangdong(2020B010190001) Natural Science Foundation of Beijing Municipality(1212013 and Z190006) Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009 Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021 

主　　题：MOEMS Si-based micromachining technology micromirror micro-spectrometer optical switches 

摘      要：Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced *** simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical *** this paper,we will briefly review the technologies and applications of Si-based *** basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic *** to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical ***,future research and development prospects of Si-based MOEMS are discussed.