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Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering

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Chinese Physics B 2012年第6期21卷 360-363页

作者：赵孟珂梁艳郜小勇陈超陈先梅赵显伟 Key Laboratory of Material Physics(Ministry of Education) School of Physics and EngineeringZhengzhou UniversityZhengzhou 450052China College of Information Science and Engineering Henan University of TechnologyZhengzhou 450001China

Nitrogen doping of silver oxide （AgxO） film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios （FRs） of nitrogen to 02. Evolutions of the structure, the refiectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular refiectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.

关键词： silver oxide film nitrogen doping optical properties magnetron reactive sputtering

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Properties of boron doped ZnO films prepared by reactive sputtering method: Application to amorphous silicon thin film solar cells

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Journal of Materials Science & Technology 2020年第20期52卷 136-143页

作者： Sukanta Bose Sourav Mandal Asok K.Barua Sumita Mukhopadhyay Centre of Excellence for Green Energy and Sensor Systems Indian Institute of Engineering Science and TechnologyShibpurHowrah 711103West BengalIndia Centre for Energy Studies Indian Institute of Technology DelhiNew Delhi 110016India

reactive sputtered boron-doped zinc oxide(BZO) film was deposited from argon,hydrogen and boron gas *** reactive sputtering technique provides us the flexibility of changing the boron concentration in the produced films by using the same intrinsic zinc oxide *** surface was obtained in the as-deposited *** surface morphology and the opto-electronic properties of the films can be controlled by simply varying the gas concentration *** varying the gas concentration ratio,the best obtained resistivity ~6.51×10^-4Ω-cm,mobility ~19.05 cm^2 V^-1 s^-1 and sheet resistance ~7.23Ω/□ were *** lower wavelength of light,the response of the deposited films improves with the increase of boron in the gas mixture and the overall transmission in the wavelength region 350-1100 nm of all the films are>85 %.We also fabricated amorphous silicon(a-Si) thin film solar cell on the best obtained BZO *** overall efficiency of the a-Si solar cell is 8.14 %,found on optimized BZO layer.

关键词： magnetron reactive sputtering BZO Amorphous silicon Solar cells Zinc oxide(ZnO)

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Rain Erosion Behavior of Silicon Dioxide Films Prepared on Sapphire

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Journal of Materials Science & Technology 2005年第6期21卷 883-886页

作者： Liping FENG+, Zhengtang LIU and Wenting LIU Laboratory of Functional Materials, College of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an710072, China Laboratory of Functional Materials College of Materials Science and Engineering Northwestern Polytechnical University Xi'an 710072 China

Silicon dioxide （SiO2） films were prepared on sapphire （α-Al2O3） by radio frequency magnetron reactive sputtering in order to increase both transmission and rain erosion resistant performance of infrared domes of sapphire. Composition and structure of SiO2 films were analyzed by X-ray photoelectron spectroscopy （XPS） and X-ray diffraction （XRD）, respectively. The transmittance of uncoated and coated sapphire was measured using a Fourier transform infrared （FTIR） spectrometer. Rain erosion tests of the uncoated and coated sapphire were performed at 211 m/s impact velocity with an exposure time ranging from 1 to 8 min on a whirling arm rig. Results show that the deposited films can greatly increase the transmission of sapphire in mid-wave IR. After rain erosion test, decreases in normalized transmission were less than 1% for designed SiO2 films and the SiO2 coating was strongly bonded to the sapphire substrate. In addition, sapphires coated with SiO2 films had a higher transmittance than uncoated ones after rain erosion.

关键词： Silicon dioxide films Sapphire magnetron reactive sputtering Rain erosion

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