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International Journal of Minerals,Metallurgy and Materials 2024年第2期31卷 384-394页

作者： Kerui Song Zhou Li Mei Fang Zhu Xiao Qian Lei School of Materials Science and Engineering Central South UniversityChangsha 410083China State Key Laboratory of Powder Metallurgy Central South UniversityChangsha 410083China Hunan Key Laboratory of Super-Microstructure and Ultrafast Process School of Physics and electronicsCentral South UniversityChangsha 410083China Key Laboratory of Non-Ferrous Metal Materials Science and Engineering Ministry of EducationChangsha 410083China

Pure cobalt(Co)thin films were fabricated by direct current magnetron sputtering,and the effects of sputtering power and pres-sure on the microstructure and electromagnetic properties of the films were *** the sputtering power increases from 15 to 60 W,the Co thin films transition from an amorphous to a polycrystalline state,accompanied by an increase in the intercrystal pore ***,the resistivity decreases from 276 to 99μΩ·cm,coercivity increases from 162 to 293 Oe,and in-plane magnetic aniso-tropy *** the sputtering pressure decreases from 1.6 to 0.2 Pa,grain size significantly increases,resistivity significantly de-creases,and the coercivity significantly increases(from 67 to 280 Oe),which can be attributed to the increase in defect ***-pondingly,a quantitative model for the coercivity of Co thin films was *** polycrystalline films sputtered under pressures of 0.2 and 0.4 Pa exhibit significant in-plane magnetic anisotropy,which is primarily attributable to increased microstress.

关键词： cobalt thin film magnetron sputtering microstructure electromagnetic properties

Improvements in properties of NdFeB magnets obtained via magnetron sputtering and thermal diffusion

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Journal of Rare Earths 2024年第9期42卷 1710-1716,I0003页

作者： Jin Tang Weichao Huang Dan Li School of Electronic Engineering Guangxi University of Science and TechnologyLiuzhou545006China China Rare Earth(Guangxi)Jinyuan Rare Earth New Materials Co. Ltd.Hezhou542603China China Rare Earth Group Co. Ltd.Ganzhou341000China Center of Experimental Teaching for Common Courses Panzhihua UniversityPanzhihua617000China

The grain boundary diffusion process(GBDP) of Dy and DyAl on sintered NdFeB magnets was conducted via magnetron-sputtering deposition of Dy and DyAl films to enhance coercivity(H_(cj)),The magnetic properties,microstructure and anti-corrosion properties of Dy-surface-alloying NdFeB magnets obtained via magnetron sputtering and thermal diffusion were *** H_(cj) of the Dy_(95)Al_(5)-NdFeB magnet increases by 32.68%,while the remanence declines ***,X-ray diffraction and microstructural analysis confirm the formation of Dy-rich shells,the higher-magnetic-anisotropy field of hard(Nd_(x)Dy_(1-x))2(FeAl)_(14)B magnetic phases and an optimised grain boundary structu re,contributing to the H_(cj)enhancement of the *** elemental distribution and diffusion mechanism of the magnets are also ***,the corrosion resistance of the Dy_(95)Al_(5)-NdFeB magnet is substantially improved by enhancing the electrochemical stability and optimising the distribution and morphology of the intergranular *** findings of this study are of substantial importance in the development of low-heavy rare-earth sintered NdFeB magnets.

关键词： magnetron sputtering NdFeB Rare earths Microstructure Magnetic property Corrosion resistance

Al-doped ZnO/WO_(3) heterostructure films prepared by magnetron sputtering for isopropanol sensors

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Rare Metals 2024年第1期43卷 247-256页

作者： Wei-Xiang Gao Xue-Ting Chang Xiao-Jie Zhu Jun-Feng Li Ying-Chang Jiang Dong-Sheng Wang Chuan-Xiao Yang Shi-Bin Sun College of Logistics Engineering Shanghai Maritime UniversityShanghai 201306China College of Ocean Science and Engineering Shanghai Maritime UniversityShanghai 201306China Institute of Logistics Science and Engineering Shanghai Maritime UniversityShanghai 201306China

Metal oxide semiconductors(MOSs) are ideal sensing materials for detecting volatile organic compounds due to their low cost, diversity, high stability, and ease of production. However, it remains a grand challenge to develop the MOSs-based gas sensors for sensing isopropanol with desired performance via a simple, effective,and controllable method. Herein, we reported the preparation of the Al-doped Zn O(AZO)/WO_(3) heterostructure films by directly depositing the AZO coating onto the WO_(3) coating using a strategy of magnetron sputtering. The AZO/WO_(3) heterostructure films were constructed by numbers of irregular nanoparticles that were interconnected with each other. The AZO/WO_(3) heterostructure films-based gas sensors exhibited excellent isopropanolsensing performance with high response, promising selectivity, low detection limit, fast response rate, wide detection range, and ideal reproducibility. The promising isopropanol-sensing performance of the AZO/WO_(3) heterostructure films arises mainly from their high uniformity, unique microstructures with high surface roughness,and the construction of the heterostructure between the AZO and WO_(3) coatings. This work provides a versatile approach to prepare the MOSs-based heterostructure films for assembling the gas sensors.

关键词： Metal oxide semiconductors Gas sensors Aldoped ZnO/WO_(3) Heterostructure films Isopropanol magnetron sputtering

Surface Metallization of Glass Fiber(GF)/Polyetheretherketone(PEEK) Composite with Cu Coatings Deposited by magnetron sputtering and Electroplating

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Journal of Wuhan University of Technology(Materials Science) 2024年第1期39卷 213-220页

作者：钟利金凡亚朱剑豪 TONG Honghui DAN Min Southwest Institute of Physics Chengdu 610000China City University of Hong Kong Tat Chee AvenueKowloonHong Kong 999077China

Surface metallization of glass fiber(GF)/polyetheretherketone(PEEK)[GF/PEEK] is conducted by coating copper using electroplating and magnetron sputtering and the properties are determined by X-ray diffraction(XRD), scanning electron microscopy(SEM), and electron backscatter diffraction(EBSD).The coating bonding strength is assessed by pull-out tests and scribing in accordance with GB/T *** results show that the Cu coating with a thickness of 30 μm deposited on GF/PEEK by magnetron sputtering has lower roughness, finer grain size, higher crystallinity, as well as better macroscopic compressive stress,bonding strength, and electrical conductivity than the Cu coating deposited by electroplating.

关键词： surface metallization Cu coating magnetron sputtering electroplating

Study of bias voltage effect on the performance of ta-C coating prepared by high power impulse magnetron sputtering

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China Welding 2024年第1期33卷 7-12页

作者：冯利民何哲秋严森李建中石俊杰 Key Laboratory for Ecological Metallurgy of Multimetallic Mineral(Ministry of Education) Northeastern UniversityShenyang 110819China School of Metallurgy Northeastern UniversityShenyang 110819China

The mechanical and frictional properties of ta-C coatings deposited on the substrate surface affect applications in the field of cutting tools and wear-resistant *** this paper,the effect of bias parameters on the performance of ta-C coatings was investigated based on high power impulse magnetron sputtering(HiPIMS)*** results show that bias voltage has a significant effect on the deposition rate,structure,and wear resistance of the *** the range of bias voltage−50 V to−200 V,the ta-C coating performance was the best under bias voltage−150 *** thickness reached 530.4 nm,the hardness value reached 35.996 GPa,and the bonding force in-creased to 14.2 *** maximum sp3 bond content was 59.53% at this condition.

关键词： bias voltage magnetron sputtering deposition rate wear resistance

magnetron sputtering NbSe_(2)film as lubricant for space current-carrying sliding contact

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Friction 2023年第3期11卷 383-394页

作者： Yang YANG Lulu PEI Hongzhang ZHANG Kai FENG Pengfei JU Wenshan DUAN Li JI Hongxuan LI Xiaohong LIU Huidi ZHOU Jianmin CHEN Key Laboratory of Science and Technology on Wear and Protection of Materials Lanzhou Insttute of Chemical PhysicsChinese Academy of SciencesLanzhou 730000China School of Physics and Electronic Engineering Northwest Normal UniversityLanzhou 730070China Division of Energy Storage Dalian Institute of Chemical PhysicsChinese Academy of SciencesDalian 116023China College of Chemistry&Engineering Yantai UniversityYantai 264005China Shanghai Aerospace Equipment Manufacture Shanghai 200245China

This study demonstrates that magnetron-sputtered NbSe_(2)film can be used as a lubricant for space current-carrying sliding contact,which accommodates both metal-like conductivity and MoS_(2)-like *** at low pressure and low energy is performed to avoid the generation of the interference phase of NbSe_(3).The composition,microstructure,and properties of the NbSe_(2)films are further tailored by controlling the sputtering *** an appropriate current,the film changed from amorphous to crystalline,maintained a dense structure,and exhibited excellent comprehensive *** to the currently available electrical contact lubricating materials,the NbSe_(2)film exhibits a significant advantage under the combined vacuum and current-carrying *** friction coefficient decreases from 0.25 to 0.02,the wear life increases more than seven times,and the electric noise reduces approximately 50%.

关键词： NbSe_(2)films magnetron sputtering vacuum current-carrying tribological properties

magnetron sputtering deposition of [FePt/Ag]_n multilayers for perpendicular recording

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Rare Metals 2006年第1期25卷 47-50页

作者： WANG Fang XU Xiaohong WU Haishun School of Chemistry and Materials Science Shanxi Normal University Linfen 041004 China

[FePt/Ag]n multilayers were deposited on glass substrates by RF magnetron sputtering and ex situ annealed at 550℃ for 30 min. The effects of inserted Ag layer thickness and the number of bilayer repetitions （n） on the structure and magnetic properties of the multilayers were investigated. It was found that the difference between in-plane and out-of-plane coercivities varied with an increase of inserted Ag layer thickness in the [FePt 2 nm/Ag x nm]10 multilayers. The ratio of out-of-plane coercivity to in-plane coercivity reached the maximum value with the Ag layer thickness of 5 nm, indicating that the Ag layer thickness plays an important role in obtaining perpendicular orientation. For the [FePt 2 nm/Ag 5 um]n multilayers, perpendicular orientation is also influenced by n. The maximum value of the ratio of out-of-plane coercivity to in-plane coercivity appeared when n was given as 8. It was found that the [FePt 2 nm/Ag 5 nm]8 had a high perpendicular coercivity of 520 kA/m and a low in-plane one of 88 kA/m, which shows a strong perpendicular anisotropy.

关键词： [FePt/Ag]n multilayer perpendicular orientation magnetron sputtering coercivity

Electrocatalytically active MoSe2 counter electrode prepared in situ by magnetron sputtering for a dye-sensitized solar cell

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Chinese Journal of Catalysis 2019年第9期40卷 1360-1365页

作者： Xueqin Cao Hanfang Li Guoran Li Xueping Gao Institute of New Energy Material Chemistry School of Materials Science and EngineeringNankai UniversityTianjin 300350China

Molybdenum selenide is a potential alternative to counter electrode of a platinum-free dye-sensitized solar cell(DSSC). In this work, an in situ magnetron sputtering method is developed to prepare MoSe2 electrodes. The MoSe2 electrodes obtained at various temperatures from 300 and 550 ℃ are used as counter electrode for a dye-sensitized solar cell. Photovoltaic measurement results indicate that the MoSe2 electrodes prepared at 400 ℃ has the optimized performance, and the corresponding DSSCs provide an energy conversion efficiency of 6.83% which is comparable than that of the reference DSSC with platinum as counter electrode(6.51%). With further increasing the preparation temperature of the MoSe2 electrodes, the corresponding DSSCs decrease gradually to 5.96% for 550 ℃. Electrochemical impedance spectra(EIS) reveal that charge transfer resistance(Rct) of MoSe2 electrodes is rising with increase of the temperature from 400 to 500 ℃, suggesting a downward electrocatalytic activity. Though the MoSe2 electrode prepared at 550 ℃ show a reduced Rct, its series resistance(Rs) and diffusion resistance(Zw) increase obviously. Considering that MoSe2 phase cannot be formed at 300 ℃, it can be concluded that the prepared temperature as low as possible is favored for its final electrochemical performance. The results are very significant for developing low-cost and responsible counter electrodes for dye-sensitized solar cells.

关键词： Molybdenum selenium Counter electrode Electrocatalysis Dye-sensitized solar cell in situ synthesis magnetron sputtering

Growth and properties of hydrogenated microcrystalline silicon thin films prepared by magnetron sputtering with different substrate temperatures

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Rare Metals 2022年第3期41卷 1037-1042页

作者： Lin-Qing Wang Wei-Yan Wang Jin-Hua Huang Rui-Qin Tan Wei-Jie Song Jian-Min Chen State Key Laboratory of Solid Lubrication Lanzhou Institute of Chemical PhysicsChinese Academy of SciencesLanzhou 730000China University of Chinese Academy of Sciences Beijing 100049China Ningbo Institute of Material Technology and Engineering Chinese Academy of SciencesNingbo 315201China Faculty of Information Science and Engineering Ningbo UniversityNingbo 315211China

Hydrogenated microcrystalline silicon (μcSi:H) thin films were deposited by an radio frequency (RF)(13.56 MHz) magnetron sputtering at different substrate temperatures (100–300℃), and the influences of substrate temperature on the growth and properties ofμc-Si:H thin films were investigated. Surface roughness and crystallinity of the thin films increase as substrate temperature increases. And all thin films are at the transition region(X_(c)=49.2%~61.0%). Theμc-Si:H thin films deposited at lower substrate temperature (≤200℃) represent a weak(220) preferred orientation, while the thin films deposited at higher substrate temperature (≥250℃) exhibit a weak(111) preferred orientation. The μc-Si:H thin films have a dense structure, and the structural compactness of the thin films slightly increases with substrate temperature increasing. The Fourier transform infrared spectroscopy (FTIR) results indicate that theμc-Si:H thin films have a low hydrogen content (3.9 at%–5.6 at%), which is in favor of reducing light-induced degradation effect.

关键词： μc-Si:H thin films magnetron sputtering Substrate temperature Hydrogen content

Magnetic properties and microstructures of terbium coated and grain boundary diffusion treated sintered Nd-Fe-B magnets by magnetron sputtering

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Journal of Rare Earths 2021年第2期39卷 167-173页

作者： Wei Zhu Yang Luo Zilong Wang Xinyuan Bai Haijun Peng Dunbo Yu National Engineering Research Center for Rare Earth Materials GRINM Group Co.Ltd.Beijing 100088China GRIREM Advanced Materials Co. Ltd.Beijing 100088China General Research Institute for Nonferrous Metals Beijing 100088China

Tb coating on the surface of commercial sintered Nd-Fe-B magnet was prepared by DC magnetron *** secondary heat treatment was used to regulate the microstructure for the enhancement of coercivity,namely diffusion treatment and annealing *** coercivity increases significantly from 18.3 to 28.0 kOe,the remanence decreases slightly from 14.1 to 14.0 kGs,and the comprehensive magnetic properties are higher than 75(Hcj+(BH)_(max)=76.7).SEM results indicate that,on the one hand,950℃is the optimal diffusion *** diffusion temperature results in insufficient diffusion of Tb *** diffusion temperature can lead to the main phase grain growth,the decrease of Nd-rich phase,and forming holes in the *** the other hand,500℃is the optimal annealing *** annealing temperature can result in the reduction of Nd-rich *** annealing temperature can generate the non-defined Nd-rich thin layer between grains.

关键词： Sintered Nd-Fe-B magnets magnetron sputtering Tb coating Magnetic properties Rare earths