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All laser direct writing process for temperature sensor based on graphene and silver

Frontiers of Optoelectronics 2024年第1期17卷 45-55页

作者： Qi Li Ruijie Bai Lianbo Guo Yang Gao Shanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power EngineeringEast China University of Science and TechnologyShanghai 200237China North Automatic Control Technology Institute Taiyuan 030006China Wuhan National Laboratory for Optoelectronics Huazhong University of Science&TechnologyWuhan 430074China

A highly sensitive temperature sensing array is prepared by all laser direct writing(LDW)method,using laser induced silver(LIS)as electrodes and laser induced graphene(LIG)as temperature sensing layer.A finite element analysis(FEA)photothermal model incorporating a phase transition mechanism is developed to investigate the relationship between laser parameters and LIG properties,providing guidance for laser processing parameters selection with laser power of 1–5 W and laser scanning speed(greater than 50 mm/s).The deviation of simulation and experimental data for widths and thickness of LIG are less than 5%and 9%,*** electrical properties and temperature responsiveness of LIG are also *** changing the laser process parameters,the thickness of the LIG ablation grooves can be in the range of 30–120μm and the resistivity of LIG can be regulated within the range of 0.031–67.2Ω・*** percentage temperature coefficient of resistance(TCR)is calculated as−0.58%/°***,the FEA photothermal model is studied through experiments and simulations data regarding LIS,and the average deviation between experiment and simulation is less than 5%.The LIS sensing samples have a thickness of about 14μm,an electrical resistivity of 0.0001–100Ω・m is insensitive to temperature and pressure ***,for a LIS-LIG based temperature sensing array,a correction factor is introduced to compensate for the LIG temperature sensing being disturbed by pressure stimuli,the temperature measurement difference is decreased from 11.2 to 2.6°C,indicating good accuracy for temperature measurement.

关键词： laser direct writing Temperature sensor Finite element analysis laser induced graphene laser induced silver

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laser direct writing of Ga_(2)O_(3)/liquid metal-based flexible humidity sensors

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光电进展(英文) 2023年第7期6卷 30-39页

作者： Songya Cui Yuyao Lu Depeng Kong Huayu Luo Liang Peng Geng Yang Huayong Yang Kaichen Xu State Key Laboratory of Fluid Power and Mechatronic Systems School of Mechanical EngineeringZhejiang UniversityHangzhou 310030China School of Information and Electrical Engineering Hangzhou City UniversityHangzhou 310015China

Flexible and wearable humidity sensors play a vital role in daily point-of-care diagnosis and noncontact human-machine ***,achieving a facile and high-speed fabrication approach to realizing flexible humidity sensors remains a *** this work,a wearable capacitive-type Ga_(2)O_(3)/liquid metal-based humidity sensor is demonstrated by a one-step laser direct writing *** to the photothermal effect of laser,the Ga_(2)O_(3)-wrapped liquid metal particles can be selectively sintered and converted from insulative to conductive traces with a resistivity of 0.19Ω·cm,while the untreated regions serve as active sensing layers in response to moisture *** 95%relative humidity,the humidity sensor displays a highly stable performance along with rapid response and recover *** these superior properties,the Ga_(2)O_(3)/liquid metal-based humidity sensor is able to monitor human respiration rate,as well as skin moisture of the palm under different physiological states for healthcare monitoring.

关键词： laser direct writing liquid metal humidity sensors flexible electronics wearable sensors

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laser direct writing derived robust carbon nitride films with efficient photon-to-electron conversion for multifunctional photoelectrical applications

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Carbon Energy 2022年第6期4卷 1228-1241页

作者： Haotian Tan Wenping Si Wei Peng Yuqing Wang Daolan Liu Liqun Wang Chongyun Jiang Lu Di Ji Liang Feng Hou Institute of Advanced Ceramics Key Laboratory of Advanced Ceramics and Machining Technology of Ministry of EducationSchool of Materials Science and EngineeringTianjin UniversityTianjinChina Institute for Superconducting&Electronic Materials Australian Institute of Innovative MaterialsUniversity of WollongongNorth WollongongNew South WalesAustralia Applied Physics Department College of Physics and Materials ScienceTianjin Normal UniversityTianjinChina Institute of Photoelectronic Thin Film Devices and Techology College of Electronic Information and Optical EngineeringNankai UniversityTianjinChina School of Materials Science and Engineering Nankai UniversityTianjinChina

Carbon nitride,an emerging polymeric semiconductor,has attracted attention in research ranging from photocatalysis to photodetection due to its favorable visible light response and high physicochemical *** its practical device application,the fabrication of high-quality carbon nitride films on substrates is ***,conventional methodologies to achieve high polymerization of carbon nitride are often accompanied by its decomposition,significantly compromising the film ***,we report an ultrafast fabrication of carbon nitride film by laser direct writing(LDW).The instantaneous high temperature and pressure during LDW can efficiently boost the polymerization of carbon nitride and suppress its decomposition,resulting in high-quality carbon nitride film with excellent mechanical stability with the *** to the efficient photon-to-electron conversion,it exhibits an outstanding photoelectrochemical water splitting and optoelectronic detection capability,even under strong acid/alkaline *** study thus offers a facile and efficient LDW strategy for the rapid fabrication of carbon nitride film photoelectrodes,demonstrating its great feasibility in multifunctional photoelectrical applications,including but not limited to photoelectrochemical water splitting and optoelectronic detection.

关键词： carbon nitride laser direct writing photodetectors photoelectrochemical water splitting

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laser direct writing of Ag Films from Solution on Si Substrate

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Journal of Materials Science & Technology 2003年第6期19卷 634-636页

作者： KeSUN CaibeiZHANG YanZHAO SchoolofScience NortheasternUniversityShenyang110004China InstituteofMetalResearch ChineseAcademyofSciencesShenyang110016China

Pulsed Nd:YAG laser was used to irradiate Si substrate immersed in AgNO3 ethylene glycol solution to deposit Ag films along the lines scanned by laser on the substrate, which is a photo-thermal decomposing process. The decomposed Ag atoms congregate and form polycrystalline Ag particles. The Ag concentration changes greatly with the total laser energyA absorbed by substrate. Transmission electron microscopy (TEM) observation shows the Ag particles are inlaid in the Si substrate. Auger electron spectrum (AES) shows that the Ag concentration decreases with the increase of the sputtering depth, and there is no oxygen element on the surface of the deposited Ag films.

关键词： Pulsed Nd:YAG laser laser direct writing Ag deposited film Si substrate

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Memristive feature and mechanism induced by laser-doping in defect-free 2D semiconductor materials

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Journal of Semiconductors 2024年第7期45卷 85-91页

作者： Xiaoshan Du Shu Wang Qiaoxuan Zhang Shengyao Chen Fengyou Yang Zhenzhou Liu Zhengwei Fan Lijun Ma Lei Wang Lena Du Zhongchang Wang Cong Wang Bing Chen Qian Liu College of Electronic and Information Engineering Shandong University of Science and TechnologyQingdao 266590China National Center for Nanoscience and Technology&University of Chinese Academy of Sciences Beijing 100190China Hebei University of Water Resources and Electric Engineering Electrical Automation Department Cangzhou 061001China The MOE Key Laboratory of Weak-Light Nonlinear Photonics and International Sino-Slovenian Join Re-search Center on Liquid Crystal Pho-tonics TEDA Institute of Applied Physics and School of PhysicsNankai UniversityTianjin 300457China College of Mathematics and Physics Shandong Advanced Optoelectronic Materials and Technologies Engineering LaboratoryQingdao Uni-versity of Science and TechnologyQingdao 266061China Department of Physics Capital Normal UniversityBeijing 100048China Department of Advanced Materials and Computing International Iberian Nanotechnology Laboratory(INL)4715-330 BragaPortugal College of Mathematics and Physics Beijing University of Chemical TechnologyBeijing 100029China

Memristors as non-volatile memory devices have gained numerous attentions owing to their advantages in storage,in-memory computing, synaptic applications, etc. In recent years, two-dimensional(2D) materials with moderate defects have been discovered to exist memristive feature. However, it is very difficult to obtain moderate defect degree in 2D materials, and studied on modulation means and mechanism becomes urgent and essential. In this work, we realized memristive feature with a bipolar switching and a configurable on/off ratio in a two-terminal MoS_(2) device(on/off ratio ~100), for the first time, from absent to present using laser-modulation to few-layer defect-free MoS_(2)(about 10 layers), and its retention time in both high resistance state and low resistance state can reach 2×10^(4) s. The mechanism of the laser-induced memristive feature has been cleared by dynamic Monte Carlo simulations and first-principles calculations. Furthermore, we verified the universality of the laser-modulation by investigating other 2D materials of TMDs. Our work will open a route to modulate and optimize the performance of 2D semiconductor memristive devices.

关键词： 2D-material memristor laser doping laser direct writing memristive mechanism

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Anomalous refinement and uniformization of grains in metallic thin films

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Nano Research 2023年第12期16卷 13358-13365页

作者： Lei Wang Shu Wang Xiaofeng Wang Jianming Zhang Jianjie Dong Bin Wei Haiguang Yang Zhongchang Wang Ziyang Zhang ChuanFei Guo Qian Liu Chinese Academy of Sciences(CAS)Key Laboratory of Nanosystem and Hierarchical Fabrication CAS Center for Excellence in NanoscienceNational Center for Nanoscience and Technology&University of Chinese Academy of SciencesBeijing 100190China College of Mathematics and Physics Qingdao University of Science and TechnologyQingdao 266061China Department of Materials Science and Engineering Southern University of Science and TechnologyShenzhen 518055China School of Materials Sun Yat-Sen UniversityGuangzhou 510275China International Iberian Nanotechnology Laboratory(INL) Department of Quantum and Energy MaterialsBraga 4715-330Portugal School of Electronic and Information Engineering Qingdao UniversityQingdao 266071China The MOE Key Laboratory of Weak-Light Nonlinear Photonics and TEDA Applied Physics Institute and School of Physics Nankai UniversityTianjin 300457China

When a laser beam writes on a metallic film,it usually coarsens and deuniformizes grains because of Ostwald ripening,similar to the case of *** we show an anomalous refinement effect of metal grains:A metallic silver film with large grains melts and breaks into uniform,close-packed,and ultrafine(~10 nm)grains by laser direct writing with a nanoscale laser spot size and nanosecond pulse that causes localized heating and adaptive *** method exhibits high controllability in both grain size and uniformity,which lies in a linear relationship between the film thickness(h)and grain size(D),D∝*** linear relationship is significantly different from the classical spinodal dewetting theory obeying a nonlinear relationship(D∝h5/3)in common laser *** also demonstrate the application of such a silver film with a grain size of~10.9 nm as a surface-enhanced Raman scattering chip,exhibiting superhigh spatial-uniformity and low detection limit down to 10-15 *** anomalous refinement effect is general and can be extended to many other metallic films.

关键词： laser direct writing anomalous refinement localized heating ripening linear relationship

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laser Ablation and Chemical Oxidation Synergistically Induced Micro/Nano Re-entrant Structures for Super-Oleophobic Surface with Cassie State

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Nanomanufacturing and Metrology 2023年第2期6卷 79-89页

作者： Jiaqi Chao Faze Chen Lei Xia Zexin Cai Fujun Wang Yanling Tian Dawei Zhang School of Mechanical Engineering Tianjin UniversityTianjin 300072China Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education Tianjin UniversityTianjin 300072China School of Engineering University of WarwickCoventry CV47DLUK

Generally,re-entrant structures are a key part of fabricating superoleophobic surfaces,and this structure appears in almost all kinds of published research articles regarding ***,the application of related fabrication methods is usually too complex and costly in real *** this paper,we present a simple method to generate micro-cauliflower structures,which work as re-entrant structures in microcone arrays,to promote the formation of superoleophobic *** heating process after alkali-assisted surface oxidation is the main reason for the appearance of a micro-ball structure,and the oxidation time can influence the size of the *** the best of our knowledge,the influence of the heating process after alkali-assisted surface oxidation on the birth of the micro-ball structure is seldom researched.A low-surface-energy treatment was also analyzed in influencing the size of the re-entrant structure and its relative *** of 5μl of n-decane show contact angles of 155±1°on the as-prepared superoleophobic surface,and air pockets can be clearly seen underneath,indicating a stable Cassie contacting state and a promising application value in the near future.

关键词： Superoleophobic Re-entrant structure Cassie state laser direct writing

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A direct laser-synthesized magnetic metamaterial for low-frequency wideband passive microwave absorption

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International Journal of Extreme Manufacturing 2023年第3期5卷 667-680页

作者： Yihe Huang Yize Li Kewen Pan Yixian Fang Kai Chio Chan Xiaoyu Xiao Chao Wei Kostya S Novoselov John Gallop Ling Hao Zhu Liu Zhirun Hu Lin Li laser Processing Research Centre Department of MechanicalAerospace and Civil EngineeringThe University of ManchesterOxford RoadM139PLManchesterUnited Kingdom Ningbo Institute of Materials Technology and Engineering Chinese Academy of SciencesNingbo 315201People’s Republic of China Department of Electrical and Electronics Engineering The University of ManchesterOxford RoadM139PL ManchesterUnited Kingdom National Physical Laboratory United Kingdom National Graphene Institute The University of ManchesterOxford RoadM139PL ManchesterUnited Kingdom Department of Materials The University of ManchesterOxford RoadM139PLManchesterUnited Kingdom Department of Physics and Astronomy The University of ManchesterOxfordRoadM139PL ManchesterUnited Kingdom Institute for Functional Intelligent Materials National University of Singapore117544 SingaporeSingapore Chongqing 2D Materials Institute Liangjiang NewAreaChongqing 400714People’s Republic of China

Microwave absorption in radar stealth technology is faced with challenges in terms of its effectiveness in low-frequency ***,we report a new laser-based method for producing an ultrawideband metamaterial-based microwave absorber with a highly uniform sheet resistance and negative magnetic permeability at resonant frequencies,which results in a wide bandwidth in the L-to *** of the electrical sheet resistance uniformity has been achieved with less than 5%deviation at 400Ωsq^(-1)and 6%deviation at 120Ωsq^(-1),resulting in a microwave absorption coefficient between 97.2%and 97.7%within a1.56–18.3 GHz bandwidth for incident angles of 0°–40°,and there is no need for providing energy or an electrical power source during the *** N-and S-doped turbostratic graphene 2D patterns with embedded magnetic nanoparticles were produced simultaneously on a polyethylene terephthalate substrate via laser direct *** proposed low-frequency,wideband,wide-incident-angle,and high-electromagnetic-absorption microwave absorber can potentially be used in aviation,electromagnetic interference(EMI)suppression,and 5G applications.

关键词： laser direct writing degrees of crystallization Fe_(3)O_(4)nanoparticles wide bandwidth low frequency

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laser-Assisted Reduction of Highly Conductive Circuits Based on Copper Nitrate for Flexible Printed Sensors

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Nano-Micro Letters 2017年第4期9卷 49-61页

作者： Shi Bai Shigang Zhang Weiping Zhou Delong Ma Ying Ma Pooran Joshi Anming Hu Institute of laser Engineering Beijing University of Technology School of Civil and Transportation Engineering Beijing University of Civil Engineering and Architecture Oak Ridge National Laboratory Department of Mechanical Aerospace and Biomedical Engineering University of Tennessee Knoxville

Stretchable electronic sensing devices are defining the path toward wearable electronics. High-performance flexible strain sensors attached on clothing or human skin are required for potential applications in the entertainment,health monitoring, and medical care sectors. In this work,conducting copper electrodes were fabricated onpolydimethylsiloxane as sensitive stretchable microsensors by integrating laser direct writing and transfer printing approaches. The copper electrode was reduced from copper salt using laser writing rather than the general approach of printing with pre-synthesized copper or copper oxide nanoparticles. An electrical resistivity of 96 l X cm was achieved on 40-lm-thick Cu electrodes on flexible substrates. The motion sensing functionality successfully demonstrated a high sensitivity and mechanical *** in situ fabrication method leads to a path toward electronic devices on flexible substrates.

关键词： laser direct writing Copper circuit Stretchable sensor laser reduction

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