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Chinese Optics Letters 2022年第1期20卷 43-48页

作者： Guanfang Wang Zhu Li Jialing Huang Huizong Duan Xiangqing Huang Hongfan Liu Qi Liu Shanqing Yang Liangcheng Tu Hsien-Chi Yeh MOE Key Laboratory of TianQin Mission TianQin Research Center for Gravitational Physics&School of Physics and AstronomyFrontiers Science Center for TianQinCNSA Research Center for Gravitational WavesSun Yat-sen University(Zhuhai Campus)Zhuhai 519082China Shenhe Middle School Heyuan 517000China

In this paper,we present a suppression method for the thermal drift of an ultra-stable laser *** detailed analysis on the Michelson interferometer indicates that the change in optical path length induced by temperature variation can be effectively reduced by choosing proper thickness and/or incident angle of a *** the optical bench of the laser interferometer Space Antenna Pathfinder as an example,we analyze the optical bench model with a compensator and show that the temperature coefficient of this laser interferometer can be reduced down to 1 pm/K with an incident angle of 0.267828 *** method presented in this paper can be used in the design of ultra-stable laser interferometers,especially for space-based gravitational waves detection.

关键词： gravitational waves detection laser interferometer temperature compensation optical path calculation

New laser interferometer with OPD Multiplication for Nanometer Measurement

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Chinese Journal of lasers 1999年第5期8卷 3-5页

作者： ZHAO Meirong QU Xinghua WANG Hailong LU Boyin(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University, Tianjin 300072, China) 天津大学精密测试技术及仪器国家重点实验室天津

By using coupled differential interferometry a new laser displacement measurement interferometer with nanometric accuracy has been developed The resolution and the stability of the interferometer are improved by multiplicating the optical path difference (OPD). The new interferometer is simple in concept, symmetric in optical paths, without optical deadpath, easy to set up and align. λ/1600 resolution and nanometric accuracy are achieved within the measurement range of 10mm.

关键词： nanometer nanometroolgy laser interferometer displacement measurement differential interfrometry OPD multiplication

laser interferometer Nanometer Vibration Measurement Experiment Based on LabVIEW Workbench

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Laser Interferometer Nanometer Vibration Measurement Experim...

A New Development of a Single Mode laser interferometer

2007亚洲光电子会议先进的传感系统与应用分会场

作者： LIU Bin-bin*, YANG Jun, LIU Zhi-hai, YUAN Li-bo Photonics Research Center, School of Science, Harbin Engineering University, Harbin, 150001

This paper presented signal demodulation scheme of the laser vibration interferometer system using for measurement of low-frequency vibration. Based on principle of phase generated carrier (PGC) modulation and virtual instrument technology, laser vibration signal demodulation on software and hardware platform were established. Taking the PCI6221 multi-function data acquisition device as the core of hardware circuit,real time data acquisition of reference waveform generation and the signal for measurement was realized. Digital PGC algorithm was established by using LabVIEW software workbench, and then vibration signal real time demodulation was realized. The experiment results indicate that the PGC signal demodulation scheme based on virtual instrument technology reduced drift and noise by traditional analog PGC hardware circuit such as analog multiplier and differentiator, enhanced accuracy of signal demodulation, improved system Signal-to-Noise. High accuracy measurement of the low-frequency vibration signals ranging from 1000Hz comes true, the measuring resolution is better than 0.5nm, and the dynamic range is 110dB.

关键词： laser interferometer Vibration Measurement PGC Virtual Instrument LabVIEW

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Chinese Journal of lasers 1997年第4期 79-84页

作者： WANG Baoguang ZHU Mengzhou(Department of Precision Instrument Engineering, Tianjin University,Tianjin 300072, China)

ＡＮｅｗＤｅｖｅｌｏｐｍｅｎｔｏｆａＳｉｎｇｌｅＭｏｄｅＬａｓｅｒＩｎｔｅｒｆｅｒｏｍｅｔｅｒＷＡＮＧＢａｏｇｕａｎｇＺＨＵＭｅｎｇｚｈｏｕ（ＤｅｐａｒｔｍｅｎｔｏｆＰｒｅｃｉｓｉｏｎＩｎｓｔｒｕｍｅｎｔＥｎｇｉｎｅ... 详细信息

ＡＮｅｗＤｅｖｅｌｏｐｍｅｎｔｏｆａＳｉｎｇｌｅＭｏｄｅＬａｓｅｒＩｎｔｅｒｆｅｒｏｍｅｔｅｒＷＡＮＧＢａｏｇｕａｎｇＺＨＵＭｅｎｇｚｈｏｕ（ＤｅｐａｒｔｍｅｎｔｏｆＰｒｅｃｉｓｉｏｎＩｎｓｔｒｕｍｅｎｔＥｎｇｉｎｅｅｒｉｎｇ，ＴｉａｎｊｉｎＵｎｉｖ...

关键词： laser interferometer frequency stabilization optical subdividing

Signal Processing System for laser interferometer Angle Measurement Instrument Based On FPGA

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Signal Processing System for Laser Interferometer Angle Meas...

Method for measuring the granite surface topography of wafer stage with laser interferometer

2011 13th IEEE Joint International Computer Science and Information Technology Conference(JICSIT 2011)

作者： Xu You-wu Yancheng Institute of Technology,Yancheng Jiangsu Jiangsu Yancheng 224051 ChinaZhang Chun-fu Yancheng Institute of Technology,Yancheng Jiangsu Jiangsu Yancheng 224051 China

The signal processing system is designed for laser interferometer angle-measuring instrument,based on the principle of sine block,the system implements the function module of filter,subdivision,discerning direction an... 详细信息

关键词： signal processing FPGA laser interferometer angle measurement instrument

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Method for measuring the granite surface topography of wafer...

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies

作者： Le He, Xiangzhao Wang, Weijie Shi, Jianming Hu Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China Graduate School of the Chinese Academy of Sciences, Beijing 100039, China

＜正＞Topography of a granite surface has an effect on the vertical positioning of a wafer table in a lithographic tool, when the wafer table moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, a method to measure the topography of a granite surface with high accuracy is presented. In this method, a double frequency laser interferometer is used to measure the tilts of the wafer table in the X and Y direction. From the tilts information, the height of every point on the surface can be obtained by a special algorithm. Then, according to the height information, a high order polynomial is fitted to express the topography of the granite surface with high accuracy. Experiment results shows that the measurement reproducibility of the method is better than 10 nm.

关键词： laser interferometer topography measurement least squares method scanning wafer stage optical lithography

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Chinese Optics Letters 2023年第10期21卷 30-35页

作者：王菊蔡滋恒于晋龙罗浩马闯 School of Electrical and Information Engineering Tianjin UniversityTianjin 300072China

In this Letter,we propose a simple structure of an orthogonal type double Michelson *** orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional interferometers to determine the displacement *** displacement measurement principle and signal processing method of the orthogonal double interferometer are *** the arctangent algorithm,the displacement analysis uses the arc cosine algorithm,avoiding any pole limit in the distance analysis *** minimum step size of the final experimental displacement system is 5 nm,which exhibits good repeatability,and the average error is less than 0.12 nm.

关键词： orthogonal detection nanoscale displacement measurement laser interferometer

Thermal Characteristic Identification of an Alcohol Flame by Measuring its Density Gradient in Shack-Hartmann Optical System

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Journal of Thermal Science 2011年第1期20卷 93-96页

作者： Md.T.I.Khan K.Teramoto Department of Mechanical Engineering Saga University1 HonjoSaga 840-8502Japan

Understanding the flame structure for different combustion in industries has drawn the increasing attention around the ***,for increasing the recent interest of using the hydrogen fuelled vehicles in recent world,structural analysis of flame in combustion chamber has attracted the attention of ***,the high flame temperature and strong flame emissions increase the experimental difficulties,especially,in all kinds of intrusive measurement systems for determining the flame structures and flame ***,a non-intrusive laser interferometer technique based on Shack-Hartmann optical system has been proposed to measure the thermal characteristic of a flame *** the present study,a low-stretched diffusion flame of methanol burner has been ***-Hartmann optical system is a type of wave front *** is commonly used in adaptive optical *** consists of an array of lenses to focus the image onto a photon sensor (photo-detector) at the focal plane and measures the wave front *** major objective of the present study is to develop a laser interferometer measurement technique for analyzing the flame structure and its temperature propagation by measuring the density gradient of the *** interferometer technique is a potential candidate for the non-invasive *** the present paper,a novel method for the measurement of density gradient in flame by using Shack-Hartmann optical system is proposed.A collimated laser beam that has been passed through the flame is tilted due to the density gradient inside the flame.A CCD camera (CCD photo sensor) has been used to observe the wave front tilts at the focal plane.

关键词： laser interferometer Density Gradient Shack-Hartmann Optical System Thermal Characteristics Alcohol Flame.

Real Time Correction and Evaluation of Nonlinear Errors in Single Frequency interferometers

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Chinese Journal of lasers 1999年第1期8卷 40-45页

作者： WANG Chunhai ZHANG Guoxiong (College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China) 天津大学精密仪器和光电工程学院天津

１ＩｎｔｒｏｄｕｃｔｉｏｎＳｉｎｇｌｅｆｒｅｑｕｅｎｃｙｉｎｔｅｒｆｅｒｏｍｅｔｅｒｐｏｓｅｓｅｓｓｏｍｅｉｍｐｏｒｔａｎｔａｄｖａｎｔａｇｅｓ：ａｖａｉｌａｂｉｌｉｔｙｏｆｏｂｔａｉｎｉｎｇｅｘｔｒｅｍｅｌｙｓｔａ... 详细信息

１ＩｎｔｒｏｄｕｃｔｉｏｎＳｉｎｇｌｅｆｒｅｑｕｅｎｃｙｉｎｔｅｒｆｅｒｏｍｅｔｅｒｐｏｓｅｓｅｓｓｏｍｅｉｍｐｏｒｔａｎｔａｄｖａｎｔａｇｅｓ：ａｖａｉｌａｂｉｌｉｔｙｏｆｏｂｔａｉｎｉｎｇｅｘｔｒｅｍｅｌｙｓｔａｂｌｅｆｒｅｑｕｅｎｃｙ，ｎｏｆｒ...

关键词： nonlinear errors laser interferometer error correction

Multi-channel phasemeter and its application in the heterodyne laser interferometry

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Science China(Technological Sciences) 2015年第4期58卷 746-749页

作者： LIU He Shan DONG Yu Hui LUO Zi Ren LI Yu Qiong JIN Gang National Microgravity Laboratory (NML) Institute of Mechanics Chinese Academy of Sciences School of Physics Chinese Academy of Sciences

The mission to detect gravitational wave in space requires a not only sophisticated but also ultra-precise laser interferometric measurement system. Within a single spacecraft, tens of interferometric beat signals are generated at the same time and they also need to be processed simultaneously. In this paper, a multi-channel phasemeter which can parallelly process the signals is constructed. The test shows that a sensitivity of 2n grad/√Hz could be achieved in the frequency range of 0.1 to 10 Hz. We also utilize the phasemeter to evaluate the performance of a heterodyne laser interferometer.

关键词： phasemeter laser interferometer gravitational waves detection