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Sensorless image based positioning control Strategy Design for AFM Systems 36

Sensorless Image Based Positioning Control Strategy Design f...

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第36届中国控制会议

作者： LU Han FANG Yongchun Institute of Robotics and Automatic Information System Nankai University Tianjin Key Laboratory of Intelligent Robotics Nankai University

ISBN: (纸本)9781538629185

As a typical tool for micro/nano imaging and manipulations,an atomic force microscope（AFM） has been widely used in a variety of areas including biology,materials,chemistry,physics,and so ***,to accurately implement nanomanipulation tasks for an AFM system,it is essential to design a high-precision positioning control strategy with nanometer ***,unfortunately,owing to the drawbacks of piezo-hysteresis,cross-coupling of piezoelectric and other nonlinear characteristics of this system,the positioning control of the probe for an AFM-based nanomanipulation system is still a challenging ***,in most cases,a displacement sensor,which can detect position signals in real time,is hard to be applied into an AFM system directly,which leads to much more limitations in designing an efficient positioning *** tackle these problems,in this paper,an image based high-precision positioning control strategy for AFM systems is first proposed,which presents high-precision probe positioning without using any displacement sensors,and instead,the scanned image is the only feedback information we *** particular,firstly a constant velocity spiral scanning pattern as well as a Gaussian functionbased distortion compensation model are proposed to obtain an undistorted ***,a spiral trajectory planning based coarse positioning method is adopted to ensure a smooth and robust positioning process for most general ***,considering some regular structure samples like particles,an improved local line scanning based method is proposed to further ensure more accurate positioning ***,some simulation results are presented to demonstrate the performance of the whole proposed positioning control strategy.

关键词： Atomic Force Microscope(AFM) Sensorless positioning control Strategy image based positioning control Distortion Compensation Model Spiral Trajectory Planning

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