Sensorless Image Based Positioning Control Strategy Design for AFM Systems
作者单位：Institute of Robotics and Automatic Information SystemNankai University Tianjin Key Laboratory of Intelligent RoboticsNankai University
会议名称：《第36届中国控制会议》
会议届次：36
主办单位：Dalian University of Technology;Systems Engineering Society of China (SESC);Technical Committee on Control Theory (TCCT), Chinese Association of Automation (CAA)
会议日期：2017年
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 0803[工学-光学工程]
基 金：supported by the National Science Fund for Distinguished Young Scholars of China under Grant No.61325017 the National Natural Science Foundation(NNSF)of China under Grant No.61633012
关 键 词：Atomic Force Microscope(AFM) Sensorless Positioning Control Strategy Image Based Positioning Control Distortion Compensation Model Spiral Trajectory Planning
摘 要：As a typical tool for micro/nano imaging and manipulations,an atomic force microscope（AFM） has been widely used in a variety of areas including biology,materials,chemistry,physics,and so ***,to accurately implement nanomanipulation tasks for an AFM system,it is essential to design a high-precision positioning control strategy with nanometer ***,unfortunately,owing to the drawbacks of piezo-hysteresis,cross-coupling of piezoelectric and other nonlinear characteristics of this system,the positioning control of the probe for an AFM-based nanomanipulation system is still a challenging ***,in most cases,a displacement sensor,which can detect position signals in real time,is hard to be applied into an AFM system directly,which leads to much more limitations in designing an efficient positioning *** tackle these problems,in this paper,an image based high-precision positioning control strategy for AFM systems is first proposed,which presents high-precision probe positioning without using any displacement sensors,and instead,the scanned image is the only feedback information we *** particular,firstly a constant velocity spiral scanning pattern as well as a Gaussian functionbased distortion compensation model are proposed to obtain an undistorted ***,a spiral trajectory planning based coarse positioning method is adopted to ensure a smooth and robust positioning process for most general ***,considering some regular structure samples like particles,an improved local line scanning based method is proposed to further ensure more accurate positioning ***,some simulation results are presented to demonstrate the performance of the whole proposed positioning control strategy.