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Measurement of Ion Parameters by Ion Sensitive Probe in ecr plasma

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plasma Science and Technology 2011年第1期13卷 68-72页

作者：谭必松马志斌沈武林吴振辉曹宏汪建华 Province Key Laboratory of plasma Chemistry and Advanced Materials School of Materials Science and EngineeringWuhan Institute of Technology

Ion parameters in electron cyclotron resonance （ecr） microwave plasma were measured by ion sensitive probe and were compared with the electron parameters obtained by double Langmuir probe. The effects of gas pressure and microwave power on the ion temperature and density were analyzed. The spatial distribution of the ion parameters was also investigated by the ion sensitive probes with a tunable radial depth installed on different probe windows along the chamber axis. Results showed that the ion density measured by the ion sensitive probe was in good agreement with the electron density measured by the double Langmuir probe. The influ- ence of gas pressure on the ion parameters was stronger than that of microwave power. With the increase in working pressure, the ion temperature decreased monotonously with a decreasing rate larger than that at higher pressure. The ion density first increased to a peak （42.3~ 101~ cm-3） at 1 Pa and then decreased. The ion temperature and density increased little with the increase in the microwave power from 400 W to 800 W, The plasma far away from the resonant point is found to be radially uniform.

关键词： ion sensitive probe double Langmuir probe ecr plasma ion parameter vspatial distribution

Spatial Distribution of ecr plasma Density in ecr-PECVD Reaction Chamber

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plasma Science and Technology 2006年第3期8卷 300-302页

作者：符斯列陈俊芳吴先球王宁星张茂平胡社军 School of Physics and Communication Engineering South China Normal University Guangzhou 510631 China

The spatial distribution of Electron Cyclotron Resonance （ecr） plasma in the ecrplasma Enhanced Metalorganic Chemical Vapour Deposition （ecr-PECVD） reaction chamber is diagnosed by a Langmuir probe. The uniformity is also investigated. The results show that the ecr plasma in the upper region of the reaction chamber under the influence of magnetic field has poor radial and axial uniformity. However, the plasma in the downstream region of the reaction chamber has fine radial uniformity. This excellent uniform plasma in the downstream has extensive application in plasma process.

关键词： ecr plasma plasma density spatial distribution radial uniformity

A Simulator for Producing of High Flux Atomic Oxygen Beam by Using ecr plasma Source

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Journal of Materials Science & Technology 2004年第6期20卷 759-762页

作者： Shuwang DUO, Meishuan LI and Yaming ZHANGShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China Shenyang Natl. Lab. for Mat. Sci. Inst. of Metal Res. Chinese Acad. of Sci. Shenyang 110016 China

In order to study the atomic oxygen corrosion of spacecraft materials in low earth orbit environment, an atomic oxygen simulator was established. In the simulator, a 2.45 GHz microwave source with maximum power of 600 W was launched into the circular cavity to generate ecr (electron cyclotron resonance) plasma. The oxygen ion beam moved onto a negatively biased Mo plate under the condition of symmetry magnetic mirror field confine, then was neutralized and reflected to form oxygen atom beam. The properties of plasma density, electron temperature, plasma space potential and ion incident energy were characterized. The atomic oxygen beam flux was calibrated by measuring the mass loss rate of Kapton during the atomic oxygen exposure. The test results show that the atomic oxygen beam with flux of 1016-1017 atoms-cm-2·s-1 and energy of 5-30 eV and a cross section of φ80 mm could be obtained under the operating pressure of 10-1-10-3 Pa. Such a high flux source can provide accelerated simulation tests of materials and coatings for space applications.

关键词： Atomic oxygen Low earth orbit space environment ecr plasma Microwave

Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ecr plasma Enhanced DC Magnetron Sputtering

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plasma Science and Technology 2010年第5期12卷 551-555页

作者：汝丽丽黄建军高亮齐冰 Applied Low Temperature plasma Laboratory Shenzhen Key Laboratory of Sensors TechnologySchool of PhysicsShenzhen University

Electron cyclotron resonance （ecr） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ecr working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ecr working gas, compared to hydrogen gas.

关键词： hydrogenated diamond-like carbon films ecr plasma magnetron sputtering,microwave power

Atomic-Oxygen Beam Source with Compact ecr plasma

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plasma Science and Technology 2002年第6期4卷 1545-1550页

作者：任兆杏沈克明吕庆敖 Institute of plasma Physics Chinese Academy of Sciences Hefei 230031 China

An atomic-oxygen beam source with compact ecr plasma was successfully investigated. The microwave was produced and transmitted in a coaxial mode, and coupled with the loop. The plasma was produced at a higher asymmetry magnetic mirror field, and neutralized with the molybdenum target at a lower asymmetry magnetic mirror field. The magnetic field was constituted with permanent magnets. This source has a higher flux density of atom beam, a lower operating pressure, a smaller power consumption and low-cost. When it was installed at the equipment to study the interaction of the beam with the surface, the operation was carried out very easily and with a good stability.

关键词： ecr plasma atomic-oxygen beam source

Bended probe diagnostics of the plasma characteristics within an ecr ion source with a rectangular waveguide

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plasma Science and Technology 2018年第8期20卷 29-34页

作者： Juan YANG Yuliang FU Xianchuang LIU Haibo MENG Yizhou JIN School of Astronautic Northwestern Polytechnical UniversityXi＇an 710072People＇s Republic of China

To reveal the argon plasma characteristics within the entire region of an electron cyclotron resonance（ecr） ion source, the plasma parameters were diagnosed using a bended Langmuir probe with the filament axis perpendicular to the diagnosing plane. Experiments indicate that,with a gas volume flow rate and incident microwave power of 4 sccm and 8.8 W, respectively,the gas was ionized to form plasma with a luminous ring. When the incident microwave power was above 27 W, the luminous ring was converted to a bright column, the dark area near its axis was narrowed, and the microwave power absorbing efficiency was increased. This indicates that there was a mode transition phenomenon in this ecr ion source when the microwave power increased. The diagnosis shows that, at an incident microwave power of 17.4 W, the diagnosed electron temperature and ion density were below 8 eV and 3×10^17 m^-3, respectively, while at incident microwave power levels of 30 W and 40 W, the maximum electron temperature and ion density were above 11 eV and 6.8×10^17 m^-3, respectively. Confined by magnetic mirrors, the higher density plasma region had a bow shape, which coincided with the magnetic field lines but deviated from the ecr layer.

关键词： ecr plasma probe diagnosing ion thruster

Probe Diagnosing on the plasma Characteristics within the ecr Ion Source

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Probe Diagnosing on the Plasma Characteristics within the EC...

Preliminary Results of Drift Instability by Fast Optical Images in KT-5D Toroidal plasma

第十八届全国等离子体科学技术会议

作者： Juan Yang Xu Xia Xianchuan Liu Yizhou Jin Northwestern Polytechnic University

In order to precisely reveal the plasma characteristics within the whole region of electron cyclotron resonance(ecr)ion source d on a rectangular waveguide,this article has carried out experiment on plasma generation and diagnosing study by using a Langmuir probe perpendicular to the magnetic field *** results showed that,with argon gas volume flow rate at 4 sccm and gradually increasing input microwave power to 8.8W,the gas would be ionized to form plasma with a luminous *** the input microwavepower was increased to 27W and higher,the luminous ring would be converted to a approximate bright column,and the dark area near the axis narrowed,while the microwave power absorbing efficiency increased *** results showed that,at the input microwave power of 17.4W,the diagnosed electron temperature and ion density were 0-8eV and 1×10-3×10/m,*** the input microwave power of 30W or 40W,the diagnosed electron temperature,and ion density were 0-11e V and 1×10-6.8×10/m,*** the ion source,electron got microwave energy according to ecr and microwave *** to magnetic mirror confining,the higher plasma density region was in non-ecr.

关键词： ecr plasma Ion source Prob diagnosing

来源： cnki会议评论

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plasma Science and Technology 2008年第3期10卷 273-277页

作者：胡伶英余羿朱振华闻一之俞昌旋马锦秀万树德刘万东徐小圆徐明 Chinese Academy of Sciences Key Laboratory of Plasma Physics School of Science University of Science and Technology of China Hefei 230026 China

Drift instability in plasma generated by electron cyclotron resonance （ecr） in KT- 5D device was investigated by using a fast camera and Langmuir probes. The similarity between the distribution of light intensity from the images and the plasma pressure indicates a nearly linear relationship. The discharge images taken by the camera and the plasma parameters measured by the probes also indicate the existence of low frequency turbulent events with a time scale less than a few mini-seconds.

关键词： fast imaging ecr plasma drift instability

Characteristics of C_2 Radical in CHF_3 and CF_4 Electron Cyclotron Resonance plasmas Studied by Optical Emission Spectroscopy

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plasma Science and Technology 2002年第6期4卷 1535-1540页

作者：杜伟叶超程珊华宁兆元 Department of Physics Suzhou University Suzhou 215006 China

The characteristics of CHF3 and CF4 electron cyclotron resonance (ecr) plasma have been studied by optical emission spectroscopy (OES) and Langmuir probe. It is found that C2 radical is one of main compositions in both of the two plasmas. We investigated the relative concentration of C2 radical as a function of F (H) radical and ion density. The formation mechanism of C2 radical is analyzed.

关键词： ecr plasma optical emission spectroscopy fluorocarbon gas