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dry electrode for the measurement of biopotential signals

Science China(Information Sciences) 2011年第11期54卷 2435-2442页

作者： WANG Yu 1,2,PEI WeiHua 2,GUO Kai 2,GUI Qiang 2,LI XiaoQian 2,CHEN HongDa 2 & YANG JianHong 11 Institute of Microelectronics,School of Physical Science and Technology,Lanzhou University Lanzhou 730000,China 2 State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China 1. Institute of Microelectronics School of Physical Science and Technology Lanzhou University Lanzhou 730000 China2. State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China

This paper introduces a kind of silicon-based dry electrode for measuring biological *** uses microneedle arrays to penetrate into the stratum corneum to reduce skin *** dry electrode requires neither skin preparation nor the electrolytic gel,is easy to use and causes no skin *** different technologies are chosen to manufacture microneedle arrays of dry *** is deep dry etching combined with isotropic wet *** other is mechanical dicing combined with chemical wet etching (including isotropic wet etching and anisotropic wet etching).Microneedle arrays are coated with metal and divided into 25 mm 2 as dry electrode *** testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 Hz-10 kHz frequency *** steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography.

关键词： dry electrode microneedle array dry etching wet etching EEG

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High‑Performance Flexible Microneedle Array as a Low‑Impedance Surface Biopotential dry electrode for Wearable Electrophysiological Recording and Polysomnography

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Nano-Micro Letters 2022年第8期14卷 142-163页

作者： Junshi Li Yundong Ma Dong Huang Zhongyan Wang Zhitong Zhang Yingjie Ren Mengyue Hong Yufeng Chen Tingyu Li Xiaoyi Shi Lu Cao Jiayan Zhang Bingli Jiao Junhua Liu Hongqiang Sun Zhihong Li National Key Laboratory of Science and Technology on Micro/Nano Fabrication School of Integrated CircuitsPeking UniversityBeijing 100871People’s Republic of China Peking University Sixth Hospital Peking University Institute of Mental HealthNHC Key Laboratory of Mental Health(Peking University)National Clinical Research Center for Mental Disorders(Peking University Sixth Hospital)Beijing 100191People’s Republic of China School of Electronics Peking UniversityBeijing 100871People’s Republic of China Hypnometry Microsystem Beijing 100871People’s Republic of China College of Engineering Peking UniversityBeijing 100871People’s Republic of China

Microneedle array(MNA)electrodes are an effective solution to achieve high-quality surface biopotential recording without the coordination of conductive gel and are thus very suitable for long-term wearable *** schemes are limited by flexibility,biosafety,and manufacturing costs,which create large barriers for wider ***,we present a novel flexible MNA electrode that can simultaneously achieve flexibility of the substrate to fit a curved body surface,robustness of microneedles to penetrate the skin without fracture,and a simplified process to allow mass *** compatibility with wearable wireless systems and the short preparation time of the electrodes significantly improves the comfort and convenience of electrophysiological *** normalized electrode–skin contact impedance reaches 0.98 kΩcm^(2)at 1 kHz and 1.50 kΩcm^(2)at 10 Hz,a record low value compared to previous reports and approximately 1/250 of the standard *** morphology,biosafety,and electrical/mechanical properties are fully characterized,and wearable recordings with a high signal-to-noise ratio and low motion artifacts are *** first reported clinical study of microneedle electrodes for surface electrophysiological monitoring was conducted in tens of healthy and sleep-disordered subjects with 44 nights of recording(over 8 h per night),providing substantial evidence that the electrodes can be leveraged to substitute for clinical standard electrodes.

关键词： Flexible microneedle array dry electrode Low-impedance electrode–skin contact Wearable wireless electrophysiological recording Polysomnography

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A low-power portable ECG sensor interface with dry electrodes

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Journal of Semiconductors 2013年第5期34卷 104-109页

作者：浦小飞万磊张辉秦亚杰洪志良 State Key Laboratory of ASIC & System Fudan University

This paper describes a low-power portable sensor interface dedicated to sensing and processing elec- trocardiogram （ECG） signals. dry electrodes were employed in this ECG sensor, which eliminates the need of conductive gel and avoids complicated and mandatory skin preparation before electrode attachment. This ECG sensor system consists of two ICs, an analog front-end （AFE） and a successive approximation register analog-to- digital converter （SAR ADC） containing a relaxation oscillator. This proposed design was fabricated in a 0.18 #m 1P6M standard CMOS process. The AFE for extracting the biopotential signals is essential in this ECG sensor. In measurements, the AFE obtains a mid-band gain of 45 dB, referred noise of 2.8μV rms while consuming 1μW from the a bandwidth from 0.6 to 160 Hz, and a total input 1.8 V supply. The noise efficiency factor （NEF） of our design is 3.4. After conditioning, the amplified ECG signal is digitized by a 12-bit SAR ADC with 61.8 dB SNDR and 220 fJ/conversion-step. Finally, a complete ECG sensor interface with three dry copper electrodes is demonstrated in real-word setting, showing successful recordings of a capture ECG waveform.

关键词： ECG sensor interface dry electrode analog front-end SAR ADC

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Self-adhesive and biocompatible dry electrodes with conformal contact to skin for epidermal electrophysiology

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Interdisciplinary Materials 2024年第5期3卷 775-790页

作者： Xiaoxue Lin Zeping Ou Xuewei Wang Can Wang Yunfei Ouyang Ibrahim M.Mwakitawa Feng Li Rui Chen Yaru Yue Jihe Tang Wei Fang Shanshan Chen Bing Guo Jianyong Ouyang Tatyana Shumilova Yongli Zhou Liang Wang Chengwu Zhang Kuan Sun MOE Key Laboratory of Low-grade Energy Utilization Technologies and Systems School of Energy&Power EngineeringChongqing UniversityChongqingChina School of Basic Medical Sciences Shanxi Medical UniversityTaiyuanChina Shanxi Province Brain Degenerative Diseases Precision Diagnosis&Treatment Engineering Research Center Shanxi Medical UniversityJinzhongChina Department of Neurology The First Affiliated Hospital of Chongqing Medical UniversityChongqingChina Department of Materials Science&Engineering National University of SingaporeSingaporeSingapore FRC Komi Science Center Institute of GeologyUral BranchRussian Academy of SciencesSyktyvkarRussia

Long-term biopotential monitoring requires high-performance biocompatible wearable dry *** currently,it is challenging to establish a form-preserving fit with the skin,resulting in high interface impedance and motion *** research aims to present an innovative solution using an all-green organic dry electrode that eliminates the aforementioned *** dry electrode is prepared by introducing biocompatible maltitol into the chosen conductive polymer,poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate).Thanks to the secondary doping and plasticizer effect of maltitol,the dry electrode exhibits good stretchability(62%),strong self-adhesion(0.46 N/cm),high conductivity(102 S/cm),and low Young's modulus(7 MPa).It can always form a conformal contact with the skin even during body *** with good electrical properties,the electrode enables a lower skin contact impedance compared to the current standard Ag/AgCl gel ***,the application of this dry electrode in bioelectrical signal measurement(electromyography,electrocardiography,electroencephalogra-phy)and long-term biopotential monitoring was successfully demonstrated.

关键词： biocompatibility conductivity dry electrode self-adhesion Young's modulus

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