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Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Microsystems & Nanoengineering 2016年第1期2卷 106-115页

作者： Craig R.Copeland Craig D.McGray Jon Geist Vladimir A.Aksyuk Samuel M.Stavis Center for Nanoscale Science and Technology National Institute of Standards and TechnologyGaithersburgMD 20899USA Maryland Nanocenter University of MarylandCollege ParkMD 20742USA Engineering Physics Division National Institute of Standards and TechnologyGaithersburgMD 20899USA Modern Microsystems Silver SpringMD 20904USA

Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform *** their behavior in macroscale systems is well understood,there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale *** challenges impede experimental studies to answer such *** this study,we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical *** track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the *** models allow precise characterization of the electrothermal actuation of the *** transfer of motion between translating and rotating links can be nearly ideal,depending on the operating *** coupling and decoupling of the links agree with an ideal kinematic model to within approximately 5%,and the rotational output is perfectly repeatable to within approximately 20 ***,stiction can result in nonideal kinematics,and input noise on the scale of a few millivolts produces an asymmetric interaction of electrical noise and mechanical play that results in the nondeterministic transfer of *** study establishes a new approach towards testing the performance and reliability of the transfer of motion through assemblies of microscale parts,opening the door to future studies of complex microsystems.

关键词： Electrothermal linkage microelectromechanical nanoparticle noise rotation tracking translation

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Subnanometer localization accuracy in widefield optical microscopy

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Light(Science & Applications) 2018年第1期7卷 740-754页

作者： Craig R.Copeland Jon Geist Craig D.McGray Vladimir A.Aksyuk J.Alexander Liddle B.Robert Ilic Samuel M.Stavis Center for Nanoscale Science and Technology National Institute of Standards and TechnologyGaithersburgMD 20899USA Maryland NanoCenter University of MarylandCollege ParkMD 20742USA Engineering Physics Division National Institute of Standards and TechnologyGaithersburgMD 20899USA

The common assumption that precision is the limit of accuracy in localization microscopy and the typical absence of comprehensive calibration of optical microscopes lead to a widespread issue—overconfidence in measurement results with nanoscale statistical uncertainties that can be invalid due to microscale systematic *** this article,we report a comprehensive solution to this underappreciated *** develop arrays of subresolution apertures into the first reference materials that enable localization errors approaching the atomic scale across a submillimeter *** present novel methods for calibrating our microscope system using aperture arrays and develop aberration corrections that reach the precision limit of our reference *** correct and register localization data from multiple colors and test different sources of light emission with equal accuracy,indicating the general applicability of our reference materials and calibration *** a first application of our new measurement capability,we introduce the concept of critical-dimension localization microscopy,facilitating tests of nanofabrication processes and quality control of aperture *** a second application,we apply these stable reference materials to answer open questions about the apparent instability of fluorescent nanoparticles that commonly serve as fiducial *** study establishes a foundation for subnanometer localization accuracy in widefield optical microscopy.

关键词： optical limit field

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