Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

作     者：Craig R.Copeland Craig D.McGray Jon Geist Vladimir A.Aksyuk Samuel M.Stavis 

作者机构：Center for Nanoscale Science and TechnologyNational Institute of Standards and TechnologyGaithersburgMD 20899USA Maryland NanocenterUniversity of MarylandCollege ParkMD 20742USA Engineering Physics DivisionNational Institute of Standards and TechnologyGaithersburgMD 20899USA Modern MicrosystemsSilver SpringMD 20904USA 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2016年第2卷第1期

页      面：106-115页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 080201[工学-机械制造及其自动化] 

基　　金：C.R.C.acknowledges support under the Cooperative Research Agreement between the University of Maryland and the NIST Center for Nanoscale Science and Technology award number 70ANB10H193 through the University of Maryland 

主　　题：Electrothermal linkage microelectromechanical nanoparticle noise rotation tracking translation 

摘      要：Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform *** their behavior in macroscale systems is well understood,there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale *** challenges impede experimental studies to answer such *** this study,we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical *** track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the *** models allow precise characterization of the electrothermal actuation of the *** transfer of motion between translating and rotating links can be nearly ideal,depending on the operating *** coupling and decoupling of the links agree with an ideal kinematic model to within approximately 5%,and the rotational output is perfectly repeatable to within approximately 20 ***,stiction can result in nonideal kinematics,and input noise on the scale of a few millivolts produces an asymmetric interaction of electrical noise and mechanical play that results in the nondeterministic transfer of *** study establishes a new approach towards testing the performance and reliability of the transfer of motion through assemblies of microscale parts,opening the door to future studies of complex microsystems.