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检索条件"基金资助=The experiments have been carried out in part in the Frederick Seitz Materials Research Laboratory Central Facilities,University of Illinois,which are partially supported by the U.S.Department of Energy under grants DE-FG02-07ER46453 and DE-FG02-07ER46471"
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A study of Electron Beam Induced deposition and Nano device Fabrication using Liquid Cell TEM Technology
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Chinese Journal of Chemistry 2014年 第5期32卷 399-404页
作者： Xin Chen Lihui Zhou Ping Wang Hongliang Cao Xiaoli Miao Feifei Wei Key laboratory for ultrafine materials of Ministry of Education and Shanghai Key Laboratory of Advanced Polymeric MaterialsSchool of Materials Science and EngineeringEast China University of Science and TechnologyShanghai 200237China department of materials science and Engineering University of Illinois at Urbana-ChampaignUrbanaIL 61801USA state Key laboratory of Functional materials for Informatics Shanghai Institute of Microsystem and Information TechnologyChinese Academy of SciencesShanghai 200050China East China university of science and Technology Shanghai 200237China state Key laboratory of Bioreactor Engineering Biomedical Nanotechnology CenterEast China University of Science and TechnologyShanghai 200237China
siCx nano dots and nano wires with sizes from 60 nm to approximately 2μm were fabricated using liquid cell transmission electron microscope(TEM)technology.A siCl_(4)in CH_(2)Cl_(2)solution was sealed between two piec... 详细信息
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