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Toward monolithic growth integration of nanowire electronics in 3D architecture: a review

Science China(Information Sciences) 2023年第10期66卷 105-134页

作者： Lei LIANG Ruijin HU Linwei YU School of Electronic Science and Engineering Nanjing University School of Physical Science and technology/microelectronics Industry Research Institute Yangzhou University

Quasi-one-dimensional(1D) semiconducting nanowires(NWs), with excellent electrostatic control capability, are widely regarded as advantageous channels for the fabrication of high-performance microelectronics, memories, and sensors. For example, the latest Si field-effect-transistor(FET) technology nodes,fabrication is reaching physical limits, necessitating the development of new fabrication or integration technologies in monolithic three dimensional(3D) architecture to push Moore’s law forward. These new capabilities are also critical, for implementing of more advanced non von Neumann paradigms of in-memory and neuromorphic computing. For this, a versatile and highly controllable low-temperature growth integration of orderly 1D SiNW channels is desired, as it will provide an alternative or complementary new route to fabricate a multilayer of Si CMOS logics/memories in a fully 3D stacked manner. In this study, we assess the evolution and recent progress of catalytic growth strategies for ultrathin 1D channels in-plane or planar NWs, and revisit the key mechanisms and technological milestones in geometry, lattice quality, line-shape, position, and composition controls. We aim to eventually establish a reliable catalytic growth integration strategy, suitable for the fabrication of GAA FETs and the implementation of a monolithic 3D integration architecture. Finally, we also present a summary and perspectives on the current challenges and future opportunities of monolithic growth integration of NW electronics in 3D architecture.

关键词： catalytic growth silicon nanowires electronics monolithic 3D-integration

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Property modulations of two-dimensional materials under compression

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Nano Research Energy 2023年第4期2卷 103-119页

作者： Zhen Wu Yuxi Wang Yunjie Dou Lin Zhou Jia Zhu National Laboratory of Solid State microstructures College of Engineering and Applied Sciences and Jiangsu Key Laboratory of Artificial Functional MaterialsNanjing UniversityNanjing 210093China

Two-dimensional(2D)materials have attracted considerable research interest,leading to significant advances in energy applications in recent years,such as lithium batteries,catalysis,electronics,and thermoelectrics,owing to their rich controllable properties and excellent ***,pressure has been successfully employed as an effective method for property modulation of 2D materials,through tuning electronic orbitals and bonding *** this review,we summarize recent progresses in the pressure-driven property modulations and elucidate the underlying mechanism of the pressure modulation of 2D ***,we identify the remaining challenges and opportunities in this new,vibrant area of research for energy conversion and *** the different property modulation strategies,the in situ application of high pressure is systematically identified as a promising knob for 2D *** review is expected to inspire further research on the fundamental understanding and practical applications of high-pressure modulation in 2D materials.

关键词： two-dimensional material property modulations hydrostatic pressure diamond anvil cell energy applications

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