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Single-mode low threshold current multi-hole vertical-cavity surface-emitting lasers

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Chinese Physics B 2012年第3期21卷 232-235页

作者：赵振波徐晨解意洋周康刘发沈光地 Key Laboratory of Opto-electronics Technology of Ministry of Education Beijing University of Technology

A multi-hole vertical-cavity surface-emitting laser （VCSEL） operating in stable single mode with a low threshold current was produced by introducing multi-leaf scallop holes on the top distributed Bragg-refleetor of an oxidation- confined 850 nm VCSEL. The single-mode output power of 2.6 mW, threshold current of 0.6 mA, full width of half maximum lasing spectrum of less than 0.1 nm, side mode suppression ratio of 28.4 dB, and far-field divergence angle of about 10% are obtained. The effects of different hole depths on the optical characteristics are simulated and analysed, including far-field divergence, spectrum and lateral cavity mode. The single-mode performance of this multi-hole device is attributed to the large radiation loss from the inter hole spacing and the scattering loss at the bottom of the holes, particularly for higher order modes.

关键词： single mode low threshold current multi-hole vertical-cavity surlace-emitting laser

Reduction of the Far-Field Divergence Angle of an 850nm Multi-Leaf Holey Vertical Cavity Surface Emitting Laser

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Chinese Physics Letters 2011年第8期28卷 130-132页

作者：周康徐晨解意洋赵振波刘发沈光地 Key Laboratory of Opto-electronics Technology(Ministry of Education) Beijing University of TechnologyBeijing 100124

By introducing multi-leaf sectorial holes into an oxidation confined 850 nm vertical cavity surface emitting laser(VCSEL),the far-field divergence angle is reduced.The finite-difference time-domain method is used to simulate the far-field pattern of the multi-leaf holey VCSEL with different etching depths and different shapes of the oxide aperture in diameter R.Based on the simulation result,we design and fabricate a multi−leaf holey VCSEL and its divergence angle is only 6°.The experimental results agree well with the theoretical predication.

关键词： VCSEL Vertical Angle

Polarization Stable Vertical Cavity Surface Emitting Laser Array Based on Proton Implantation

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Chinese Physics Letters 2015年第10期32卷 44-47页

作者：荀孟徐晨解意洋邓军许坤蒋国庆潘冠中陈弘达 Key Laboratory of Optoelectronics Technology (Ministry of Education) Beijing University of Technology Beijing 100124 State Key Laboratory of Integrated Optoelectronies Institute of Semiconductors Chinese Academy of Sciences Beijing 100083

Polarization stable characteristic of vertical cavity surface emitting laser array with rectangular element structure based on proton implantation is achieved. Arrays with different aperture sizes and different array scales are investigated. The maximum orthogonal polarization suppression ratio of a 6 × 6 array with 6μm × 4μm elements is as high as 16.1 dB at 51 mA. The x-polarization dominates y-polarization in the operation current range from the threshold to the saturated current. The full widths at half maximum in far-field profiles for x-polarization and y-polarization are 8.8° and 10.7°, respectively. These results suggest that stable polarization is available in the implant-defined VCSEL array.

关键词： Polarization

Thermal Analysis of Implant-Defined Vertical Cavity Surface Emitting Laser Array

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Chinese Physics Letters 2015年第1期32卷 79-82页

作者：荀孟徐晨解意洋邓军许坤陈弘达 Key Laboratory of Optoelectronics Technology(Ministry of Education) Beijing University of Technology State Key Laboratory of Integrated Optoelectronics Institute of SemiconductorChinese Academy of Sciences

一个三维的电热的联合模型基于有限元素方法被使用学习射出激光(VCSEL ) 的垂直的洞表面穿的植入定义的热性质。包括内部元素的间距，规模，注射当前的密度和底层温度的几个参数被考虑。通过实验获得的实际温度在对计算结果的优秀同意... 详细信息

一个三维的电热的联合模型基于有限元素方法被使用学习射出激光(VCSEL ) 的垂直的洞表面穿的植入定义的热性质。包括内部元素的间距，规模，注射当前的密度和底层温度的几个参数被考虑。通过实验获得的实际温度在对计算结果的优秀同意，它证明模型的精确性。由于严重热问题，设计数组是必要的低自我加热。分析能为以后设计 VCSEL 数组提供一个基础。

关键词：垂直腔表面发射激光器激光器阵列定义热分析种植体 VCSEL 耦合模型未来设计

反谐振反射光波导型VCSEL侧向辐射损耗的分析

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半导体光电 2011年第6期32卷 769-772页

作者：魏晓航邓军徐晨苗霈毛明明李建军韩军北京工业大学光电子实验室北京100022

使用柱坐标的传输矩阵法计算并分析了在反谐振反射光波导(ARROW)型垂直腔面发射激光器(VCSEL)中,不同的第一包裹层厚度对应的基模和一阶横模的侧向辐射损耗。与传统平板近似的方法相比,该方法更为精确地计算出了损耗的值,同时更为详细... 详细信息

使用柱坐标的传输矩阵法计算并分析了在反谐振反射光波导(ARROW)型垂直腔面发射激光器(VCSEL)中,不同的第一包裹层厚度对应的基模和一阶横模的侧向辐射损耗。与传统平板近似的方法相比,该方法更为精确地计算出了损耗的值,同时更为详细地表明了损耗随第一包裹层厚度变化的规律。并且指出第一包裹层的最佳厚度并不一定是传统认为的使基模得到反谐振效果即侧向辐射损耗最小时的值,而需要综合考虑基模和一阶模的侧向损耗。这对ARROW型VCSEL的设计具有重要的指导意义。

关键词：激光器侧向辐射损耗传输矩阵法反谐振反射光波导垂直腔面发射激光器

Vertical cavity surface emitting laser transverse mode and polarization control by elliptical hole photonic crystal

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Chinese Physics B 2013年第2期22卷 261-264页

作者：曹田徐晨解意洋阚强魏思民毛明明陈弘达 Key Laboratory of Optoelectronics Technology(Beijing University of Technology) Ministry of Education State Key Laboratory of Integrated Optoelectronics Institute of SemiconductorChinese Academy of Sciences

The polarization of traditional photonic crystal（PC） vertical cavity surface emitting laser（VCSEL） is uncontrollable,resulting in the bit error increasing easily.Elliptical hole photonic crystal can control the transverse mode and polarization of VCSEL efficiently.We analyze the far field divergence angle,and birefringence of elliptical hole PC VCSEL.When the ratio of minor axis to major axis b/a = 0.7,the PC VCSEL can obtain single mode and polarization.According to the simulation results,we fabricate the device successfully.The output power is 1.7 mW,the far field divergence angle is less than 10°,and the side mode suppression ratio is over 30 dB.The output power in the Y direction is 20 times that in the X direction.

关键词： photonic crystal,vertical cavity surface emitting laser（VCSEL）,elliptical holes,single mode,polarization control

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垂直腔面发射激光器DBR的优化设计

半导体光电 2013年第2期34卷 190-192页

作者：李鹏飞邓军陈永远杨立鹏吴波徐晨北京工业大学光电子技术省部共建教育部重点实验室北京100124

模拟分析了垂直腔面发射激光器分布布拉格反射镜铝组分不同分布对价带的影响,并对两种不同结构的器件进行了测试,测试结果表明抛物线渐变结构可以有效降低价带的势垒,进而可以改善垂直腔面发射激光器的电流热效应,为实现室温连续工作打... 详细信息

模拟分析了垂直腔面发射激光器分布布拉格反射镜铝组分不同分布对价带的影响,并对两种不同结构的器件进行了测试,测试结果表明抛物线渐变结构可以有效降低价带的势垒,进而可以改善垂直腔面发射激光器的电流热效应,为实现室温连续工作打下基础。

关键词：渐变布拉格反射镜价带势垒 DBR电阻

Single-Fundamental-Mode 850 nm Surface Relief VCSEL

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Chinese Physics Letters 2012年第8期29卷 110-114页

作者：魏思民徐晨邓军朱彦旭毛明明解意洋许坤曹田刘久澄 Key Laboratory of Opto-electronics Technology(Ministry of Education) Beijing University of TechnologyBeijing 100124

The performance of the oxide-confined surface-relief(SR)structure vertical-cavity surface-emitting laser(VCSEL)is simulated and analyzed by using the three-dimensional finite-difference time-domain(FDTD)method.The impacts of the device structure parameters on the far-field characteristics are researched.A single-fundamental-mode SR VCSEL with an oxide-aperture of 15μm is designed and produced.The single-mode power of the VCSEL is 5 mW,the threshold current is 2.5 mA,far-field divergent angles range from 7.8°to 10.8°and the side-mode suppression ratio is over 30 dB.The optical and electrical properties of the device are in agreement with the results of FDTD simulation,which shows that the SR technology can effectively suppress the higher-order-mode lasing,and make the SR VCSEL work in a single mode under a larger oxide aperture.

关键词： VCSEL mode Relief

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低阈值单横模852nm半导体激光器

物理学报 2017年第8期66卷 113-118页

作者：刘储关宝璐米国鑫廖翌如刘振扬李建军徐晨北京工业大学信息学部电子科学与技术学院光电子技术省部共建教育部重点实验室北京100124

基于波导理论、等效折射率方法,设计并制备了非对称波导隔离双沟结构脊型边发射激光器,最终获得了低闽值单基侧模852 nm激光器.详细研究了不同脊型台深宽比参数设计对激光器侧向模式特性的影响规律,实现了腔面未镀膜情况下脊型波导边发... 详细信息

基于波导理论、等效折射率方法,设计并制备了非对称波导隔离双沟结构脊型边发射激光器,最终获得了低闽值单基侧模852 nm激光器.详细研究了不同脊型台深宽比参数设计对激光器侧向模式特性的影响规律,实现了腔面未镀膜情况下脊型波导边发射激光器的单基侧模稳定输出,同时激射波长可以精确调谐到852 nm;工作电流达到150 mA,工作温度30℃;斜率效率最高可达0.89 nW/mA,光谱半宽小于1 nm.研究结果为进一步实现超窄线宽激光器提供了参考和借鉴,并且为实现激光器稳定输出提供了实验基础.

关键词：脊型波导边发射激光器侧向模式模式稳定性