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Scratch formation and its mechanism in chemical mechanical planarization (CMP)

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Friction 2013年第4期1卷 279-305页

作者： Tae-young KWON Manivannan RAMACHANDRAN jin-Goo park Department of Materials Engineering Hanyang UniversityAnsan 426-791Korea

Chemical mechanical planarization(CMP)has become one of the most critical processes in semiconductor device fabrication to achieve global *** achieve an efficient global planarization for device node dimensions of less than 32 nm,a comprehensive understanding of the physical,chemical,and tribo-mechanical/chemical action at the interface between the pad and wafer in the presence of a slurry medium is *** the CMP process,some issues such as film delamination,scratching,dishing,erosion,and corrosion can generate defects which can adversely affect the yield and *** this article,an overview of material removal mechanism of CMP process,investigation of the scratch formation behavior based on polishing process conditions and consumables,scratch formation mechanism and the scratch inspection tools were extensively *** advantages of adopting the filtration unit and the jet spraying of water to reduce the scratch formation have been *** current research trends in the scratch formation,based on modeling perspective were also discussed.

关键词： Chemical mechanical planarization(CMP) defects,scratch post-CMP cleaning defect source

Semi-crystalline photovoltaic polymers with siloxane-terminated hybrid side-chains

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Science China Chemistry 2017年第4期60卷 528-536页

作者： Yuxiang Li Seyeong Song Song Yi park jin young Kim Han young WOO Department of Cogno-Mechatronics Engineering Pusan National University Miryang 627-706 Republic of Korea Department of Energy and Chemical Engineering Ulsan National Institute of Science and Technology Ulsan 689-798 Republic of Korea Department of Chemistry Korea University Seoul 136-713 Republic of Korea

Three types of semi-cry stalline photovoltaic polymers were synthesized by incorporating a siloxane-terminated organic/inorganic hybrid side-chain and changing the number of fluorine substituents.A branch point away from a polymer main backbone in the siloxane-containing side-chains and the intra-and/or interchain noncovalent coulombic interactions enhance a chain planarity and facile interchain *** resulting polymers formed strongly agglomerated films with high roughness,suggesting strong intermolecular *** optical band gap of ca.1.7 eV was measured for all polymers with a pronounced shoulder peak due to tight π-π *** increasing the fluorine substituents,the frontier energy levels decreased and preferential face-on orientation was *** siloxane-terminated side-chains and fluorine substitution promoted the intermolecular packing,showing well resolved lamellar scatterings up to(300) for this series of polymers in the grazing incidence wide angle X-ray scattering *** PPsiDTBT,PPsiDTFBT and PPsiDT2 FBT devices showed a power conversion efficiency of 3.16%,4.40%and 5.65%,respectively,by blending with PC_(71)***-type bimolecular charge recombination was similar for three polymeric solar *** main loss in the photocurrent generation for PPsiDTBT:PC_(71)BM was interpreted to originate from the trap assisted charge recombination by measuring light-intensity dependent short-circuit current density(J_(SC)) and open-circuit voltage(V_(Oc)).Our results provide a new insight into the rational selection of solubilizing substituents for optimizing crystalline interchain packing with appropriate miscibility with PC71 BM for further optimizing polymer solar cells.

关键词： siloxane side-chain fluorine substitution semi-crystalline charge transport

Dendrite Spacing Selection during Directional Solidification of Pivalic Acid-Ethanol System

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Journal of Materials Science & Technology 2008年第3期24卷 340-342页

作者： Myung-jin Suk young-Min park Youn-Che Kim Department of Materials and-Metallurgical Engineering Kangwon National University

Unidirectional solidification of pivalic acid （PVA）-ethanol （Eth） mixture was performed to examine whether an allowable range of primary dendrite spacing definitely exists at a given growth velocity and how the range is history-dependent. PVA-0.59 wt pct Eth was unidirectionally solidified in the range of growth velocity 0.5-64 μm/s at the temperature gradient of 2.3 K/ram. Sequential change in growth velocity was imposed to determine the upper and lower limits for the allowable range of stable spacing. An allowable range of the steady state primary spacing was observed at a given growth velocity, and the extent of the range seems to be dependent on the degree to which step-increase or step-decrease in growth velocity is accomplished. As the degree of sequential change in growth velocity increases, the history-dependence of the selection for the primary dendrite spacing tends to disappear.

关键词： Dendrite spacing History-dependent Spacing selection Pivalic acid-ethanol

Glucose-mediated mitochondrial reprogramming by cholesterol export at TM4SF5-enriched mitochondria-lysosome contact sites

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Cancer Communications 2024年第1期44卷 47-75页

作者： Ji Eon Kim So-young park Chulhwan Kwak Yoonji Lee Dae-Geun Song Jae Woo Jung Haesong Lee Eun-Ae Shin Yangie Pinanga Kyung-hee Pyo Eun Hae Lee Wonsik Kim Soyeon Kim Chang-Duck Jun Jeanho Yun Sun Choi Hyun-Woo Rhee Kwang-Hyeon Liu Jung Weon Lee Department of Pharmacy College of PharmacySeoul National UniversitySeoulRepublic of Korea Research Institute of Pharmaceutical Sciences College of PharmacySeoul National UniversitySeoulRepublic of Korea BK21 FOUR Community-Based Intelligent Novel Drug Discovery Education Unit College of Pharmacy and Research Institute of Pharmaceutical SciencesKyungpook National UniversityDaeguRepublic of Korea Department of Chemistry Seoul National UniversitySeoulRepublic of Korea College of Pharmacy Chung-Ang UniversitySeoulRepublic of Korea Natural Product Informatics Research Center Korea Institute of Science and Technology(KIST)Gangneung-siGangwon-doRepublic of Korea School of Life Sciences Gwangju Institute of Science and Technology(GIST)GwangjuRepublic of Korea Department of Biochemistry College of MedicineDong-A UniversityBusanRepublic of Korea Global AI Drug Discovery Center College of Pharmacy and Graduate School of Pharmaceutical SciencesEwha Womans UniversitySeoulRepublic of Korea Interdisciplinary Program in Genetic Engineering Seoul National UniversitySeoulRepublic of Korea

Background:Transmembrane 4 L six family member 5(TM4SF5)translocates subcellularly and functions metabolically,although it is unclear how intracellu-lar TM4SF5 translocation is linked to metabolic *** is thus of interests to understand how the traffic dynamics of TM4SF5 to subcellular endosomal membranes are correlated to regulatory roles of ***:Here,we explored the metabolic significance of TM4SF5 localization at mitochondria-lysosome contact sites(MLCSs),using in vitro cells and in vivo animal systems,via approaches by immunofluorescence,proximity labelling based proteomics analysis,organelle reconstitution ***:Upon extracellular glucose repletion following depletion,TM4SF5 became enriched at MLCSs via an interaction between mitochondrial FK506-binding protein 8(FKBP8)and lysosomal *** labeling showed molecular clustering of phospho-dynamic-related protein I(DRP1)and certain mitophagy receptors at TM4SF5-enriched MLCSs,leading to mitochondrial fis-sion and ***4SF5 bound NPC intracellular cholesterol transporter 1(NPC1)and free cholesterol,and mediated export of lysosomal cholesterol to mitochondria,leading to impaired oxidative phosphorylation but intact tri-carboxylic acid(TCA)cycle andβ-*** mouse models,hepatocyte Tm4sf5 promoted mitophagy and cholesterol transport to mitochondria,both with positive relations to liver ***:Our findings suggested that TM4SF5-enriched MLCSs regu-late glucose catabolism by facilitating cholesterol export for mitochondrial reprogramming,presumably while hepatocellular carcinogenesis,recapitulating aspects for hepatocellular carcinoma metabolism with mitochondrial repro-gramming to support biomolecule synthesis in addition to glycolytic energetics.

关键词： cholesterol fluorescent imaging glucose catabolism hepatocellular carcinogenesis mem-brane contact sites mitochondria function mitophagy oxidative phosphorylation protein-protein interaction tetraspanin

Room-temperature synthesis of ZrSnO4 nanoparticles for electron transport layer in efficient planar hetrojunction perovskite solar cells

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Journal of Materials Science & Technology 2020年第7期42卷 38-45页

作者： young Wook Noh In Su jin Sang Hyun park Jae Woong Jung Department of Advanced Materials Engineering for Information&Electronics Kyung Hee University1732 Deogyeong-daeroGiheung-guYongin-siGyeonggi-do 446-701Republic of Korea

The interface engineering plays a key role in controlled optoelectronic properties of perovskite photovoltaic devices,and thus the electron transport layer(ETL)material with tailored optoelectronic properties remains a challenge for achieving high photovoltaic performance of planar perovskite solar cells(PSCs).Here,the fine and crystalline zirconium stanate(ZrSnO4)nanoparticles(NPs)was synthesized at low temperature,and its optoelectronic properties are systematically *** from the favorable electronic structure of ZrSnO4 NPs for applications in ETL,efficient electron transport and extraction with suppre s sed charge recombination are achieved at the interface of perovskite *** a result,the optimized ZrSnO4 NPs synthesized at room-temperature deliver the optimized power conversion efficiency up to 16.76%with acceptable *** work opens up a new class of ternary metal oxide for the use in ETL of the planar PSCs and should pave the way toward designing new interfacial materials for practical optoelectronic devices.

关键词： ZrSnO4 Electron transport layer Nanoparticles Perovskite solar cells

Enhanced electrical and optical properties of single- layered MoS2 by incorporation of aluminum

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Nano Research 2018年第2期11卷 731-740页

作者： Kim, Hyung-Jun Yang, Suk Kim, Hojoong Moon, jin young park, Kyung park, Yun-jin Kwon, Jang-Yeon School of Integrated Technology Yonsei University Incheon Republic of Korea Yonsei Institute of Convergence Technology Incheon Republic of Korea

Electrical and optical enhancements of single-layer semiconducting materials such as transition metal dichalcogenides have recently been studied to achieve sensitive properties via external treatments, such as the formation of organic/ inorganic protecting layers on field-effect transistors （FETs）, thermal annealing, and nano-dot doping of sensors and detectors. Here, we propose a new analytical approach to electrical and optical enhancement through a passivation process using atomic layer deposition （ALD）, and demonstrate a synthesized MoS2 monolayer incorporated with A1 atoms in an A1203 passivation layer. The incorporated A1 atoms in the MoS2 monolayer are dearly observed by spherical aberration-corrected scanning transmission electron microscopy （Cs-STEM） and TEM-energy-dispersive X-ray spectroscopy results. We demonstrate that the chemically incorporated FETs exhibit highly enhanced mobilities of approximately 3.7 crn2-V-los-1, forty times greater than that of as-synthesized MoS2, with a three- fold improvement in the Dhotoluminescence properties.

关键词： MoS2 aluminum incorporation chemical vapor deposition atomic layer deposition

Lightweight design of 45000r/min spindle using full factorial design and extreme vertices design methods

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Journal of Central South University 2011年第1期18卷 153-158页

作者： park Seong-jin LEE Choon-man HWANG young-kug Department of Mechanical Design and Manufacturing Engineering Changwon National University

Factors for determining the spindle size are the shaft diameter, positions of bearing and motor, and entire length of the spindle. Then, it is important to find the assembling of the optimal design variables, which satisfy the stiffimss and rotational speed required to the spindle. A general full factorial design method was used to verify some factors that affect the natural frequency of a spindle. It is verified that the shorter shaft length and bearing span length represent the higher natural frequency, and there are some effects according to the change in the levels of factors. The detailed spindle dimension is determined by applying an EVD method, which can define the optimal bearing position through considering the limiting condition. Based on the estimated regression model, the optimal spindle size and bearing distance that can improve the primary natural frequency are obtained, and the influence of design factors on the natural frequency is also analyzed.

关键词： high-speed spindle extreme vertices design natural frequency lightweight design full factorial design

Nucleus-Encoded Thylakoid Protein,OsY3IP1,Confers Enhanced Tolerance to Saline and Alkaline Stresses in Rice

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Rice science 2022年第3期29卷 225-236页

作者： Hyeran MOON young-Ah KIM Ryoung SHIN Chang-jin park Department of Molecular Biology Sejong University Department of Bioresources Engineering Sejong University RIKEN Center for Sustainable Resource Science Plant Engineering Research Institute Sejong University

Abiotic stress confers serious damage to the photosynthetic machinery,often resulting in plant growth *** chloroplast open reading frame 3(Ycf3)-interacting protein 1(Y3IP1)is a nucleus-encoded thylakoid protein and plays an essential role in the assembly of photosystem *** full-length cDNA over-expresser(FOX)gene-hunting system is an approach using systemically generated gain-of-function *** the FOX-rice lines,a line CE175 overexpressing rice Y3IP1gene(Os Y3IP1)displayed less inhibition of root growth under saline(NaCl)*** expression of Os Y3IP1 was up-regulated under saline and alkaline(Na2CO3)stresses in the rice variety *** saline and alkaline treatments,transgenic Kitaake overexpressing OsY3IP1-GFP(OsY3IP1-GFPox/Kit)displayed higher levels of chlorophyll content compared to *** the stress conditions,the maximum quantum yield of photosystem II photochemistry levels was higher in OsY3IP1-GFPox/Kit than in *** increased tolerance conferred by OsY3IP1 overexpression correlated with reduced reactive oxygen species *** data provide new insights into the possible role of OsY3IP1 in the pathway suppressing photooxidative damage under stress *** features can be further exploited to improve saline and alkaline tolerances of rice plants in future.

关键词： alkaline reactive oxygen species rice saline stress tolerance

Comparison of laser iridotomy using short duration532-nm Nd: YAG laser (PASCAL) vs conventional laser in dark irides

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International Journal of Ophthalmology(English edition) 2015年第2期8卷 288-291页

作者： Hye jin Chung Hae-young park Su-young Kim HanGil Eye Hospital Department of Ophthalmology and Visual Science College of Medicine the Catholic University of Korea

AIM: To evaluate the outcome of laser iridotomy using532-nm Nd: YAG laser(PASCAL) with short pulse duration and Nd: YAG laser compared to conventional combined laser ***: Retrospective, nonrandomized, comparative case series. Forty-five eyes of 34 patients underwent laser iridotomy. Twenty-two eyes underwent iridotomy using short duration PASCAL and Nd: YAG laser, and 23 eyes underwent iridotomy using conventional combined laser method. The average settings of PASCAL were60 μm and 700-900 m W with a short duration of 0.01 s to reduce the total applied energy. The conventional laser was 50 μm and 700-900 m W for 0.1s. After photocoagulation with these laser, the Nd: YAG laser was added in each group. Endothelial cell counts of preiridotomy and 2mo after iridotomy were measured and ***: All eyes completed iridotomy *** total energy used in the PASCAL group was 1.85 ±1.17 J. Compared to conventional laser 13.25 ±1.67 J, the energy used was very small due to the short exposure time of PASCAL. Endothelial cell counts were reduced by0.88% in the PASCAL group and 6.72% in the conventional laser group(P =0.044). The change in corneal endothelial cell counts before and after iridotomy was significant in conventional combined laser iridotomy group(P =0.004).CONCLUSION: Combined PASCAL and Nd:YAG laseriridotomy is an effective and safe technique in the dark brown irides of Asians. Furthermore, the short duration of exposure in PASCAL offers the advantages of reducing the total energy used and minimizing the corneal damage.

关键词： endothelium laser iridotomy 532-nm Nd: YAG laser