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Rare Metals 2005年第4期24卷 370-375页

作者： ZHANG Yujuan yan pengxun WU Zhiguo ZHANG Pingyu Laboratory for Special Functional Materials Henan University Kaifeng 475001 China Department of Physics Lanzhou University Lanzhou 730000 China

Titanium nitride （TIN） films with nanostructure were prepared at ambient temperature on a （111） silicon substrate by the filtered cathodic arc plasma （FCAP） technology with an in-plane ＂S＂ filter. The effects of deposition parameters on the grain size, texture and nano-hardness of the films were systematically investigated. The grain size was obtained through calculation using the Scherrer formula and observed by TEM. The results of X-ray diffraction and electron diffraction indicated that increasing either negative substrate bias or argon flow promoted the formation of （111） preferred orientation. High argon flow leads to biaxial texture. The micro-hardness of the TIN films as a function of grain size showed a behavior according to the Hall-Petch relation under high argon flow.

关键词： inorganic nonmetallic materials titanium nitride deposition nanostructure

Coating curly carbon nanotubes with monocrystalline Zn(BO_2)_2 and the mechanism of straightening the tubes

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Science China(Physics,Mechanics & Astronomy) 2006年第3期49卷 377-384页

作者： LIU Jinzhang yan pengxun YUE Guanghui Institute for Plasma and Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma and Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma and Metal Materials Lanzhou University Lanzhou 730000 China

We overgrew single-crystalline Zn(BO2)2 coatings on carbon nanotubes (CNTs) for the first time. Scanning electron microscopy and transmission electron mi- croscopy analyses revealed that the carbon nanotube-zinc borate composite rods are from tens to hundreds of nm in diameter. It is notable that the original curly tubes were straightened by the monocrystalline coatings. In addition, the crystal nucleation and growth on the surface of CNT were explained. We set a two-dimensional model, which is based on our experimental result, to qualitatively explain the mechanism of straightening the curly tubes by coating them with single-crystals.

关键词： multi-walled carbon nanotubes,zinc borate,single crystal,supercooling

Improving the Thermal Stability of Cu_3N Films by Addition of Mn

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Journal of Materials Science & Technology 2015年第8期31卷 822-827页

作者： Xiaoyan Fan Zhenjiang Li Alan Meng Chun Li Zhiguo Wu pengxun yan Advanced Optoelectronic Materials and Technologies Engineering Laboratory of Qingdao School of Mathematics and PhysicsQingdao University of Science and Technology Key Laboratory of Polymer Material Advanced Manufacturing Technology of Shandong Province Qingdao University of Science and Technology College of Chemistry and Molecular Engineering Qingdao University of Science and Technology Department of Physics Ocean University of China School of Physical Science and Technology Lanzhou University

Mn-doped Cu3N films were deposited by cylindrical magnetron sputtering equipment on the common glass at room temperature. The incorporation of Mn can change the preferred growth orientation from Cu-rich plane （111） to N-rich plane （100） due to the improvement of nitridation of Cu. The shrinkage of the lattice and the X-ray photoelectron spectroscopy results reveal that Mn should replace Cu atoms in the lattice or be segregated in the grain boundaries. The thickness of Mn-doped film is smaller than that of the pure one due to the less physisorption of N species among the columnar grains. The mean grain size and the energy gap become larger with increasing Mn concentration to 2.2 at.% and then decrease when the concentration of Mn is higher than 2.2 at.%. Notably, weak doping of 1.5 at.% Mn successfully promotes the decomposed temperature by -50℃. According to the results of XRD and SEM for Mn- doped films annealed in vacuum, a possible decomposed mechanism with increasing the annealing temperature is proposed.

关键词： Magnetron sputtering Cu3N film Mn-doped Thermal stability

Research on the preparation of amorphous diamond nanorod arrays and their excellent field emitting properties

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Science China(Technological Sciences) 2006年第2期49卷 156-163页

作者： yan pengxun LI Xiaochun XU Jianwei LI Xin LI Chun LIU yang Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China Institute for Plasma & Metal Materials Lanzhou University Lanzhou 730000 China

Amorphous diamond nanorod arrays with excellent field emitting have been fabricated firstly on the AAO template by the filtered cathodic arc plasma technique. Microscopic analysis has displayed that the nanorods are very uniformly distributed, and the density is very high up to ～109 cm-2. The nanorod arrays are found to have an extremely low turn-on field of 0.16 V/μm, which is lower than other reported materials, and a high- emission current density of 180 mA/cm2 under an applied field of 2 V/μm can also be obtained. Scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), and filed emitting tester are employed to characterize the nanorod arrays. The field emission mechanism of the nanorod arrays is also discussed.

关键词： amorphous diamond nanorod arrays, magnetic filtered plasma, AAO, field electron emitting.

A comparative study of the properties of TiN films deposited by MAIP and FCAP

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Rare Metals 2007年第6期26卷 552-559页

作者： ZHANG Yujuan NIU Jian WANG Zhi ZHANG Pingyu yan pengxun Laboratory for Special Functional Materials Henan University Kaifeng 475001 China Department of Physics Lanzhou University Lanzhou 730000 China

In this study two types of TIN films were prepared, one using the filtered cathodic arc plasma （FCAP） technique with an in-plane ＂S＂ triter, and the other using the multi-arc ion-plating （MAIP）, and both deposited under the same parameters. Comparisons of the texture, hardness, roughness, tribological and electrochemical corrosion behaviors of the two types of TiN films were given. The TiN films obtained by the FCAP technology were found to be highly uniform, smooth and macroparticle-free. The TiN films deposited by FCAP had a （111） preferred orientation, while there was no texture in the films deposited by MAIP. Under low load the two kinds of TiN coatings had very different wear mechanisms; the films of FCAP had a lower wear rate and friction coefficient compared with the TiN films deposited by the MAIP technique. The dense and hole-free structure of TiN films of FCAP could effectively avoid the avalanche of TiN films from the substrate during corrosion tests.

关键词： inorganic nonmetallic materials micro-mechanical properties micro-scratch TiN filtered arc corrosion

High-Power-Density Plasma Deposition of Diamond-Like Carbons Films

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Chinese Physics Letters 1994年第9期11卷 558-560页

作者： yan pengxun yanG Si-ze yanG Jie LI Qing LI Bing LIU Chizi CHEN Xishen Institute of Physics Academia SinicaBeijing 100080

We present a new method utilizing a high-power-density plasma for depositing diamond-like carbon(DLC)*** main advantage of this technique is the possibility that films with good adhesion to the substrate can be prepared under room temperature and low *** DLC films are deposited on the silicon substrate *** structure of the DLC films was characterized by high energy electron diffraction,scanning electron microscopy,Raman spectroscopy,x-ray photoelectron spectroscopy,and infrared absorption spectrum.

关键词： films utilizing DLC

Preparation and particle size characterization of Cu nanoparticles prepared by anodic arc plasma

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Rare Metals 2006年第2期25卷 172-176页

作者： WEI Zhiqiang XIA Tiandong FENG Wangjun DAI Jianfeng WANG Qing LI Weixue yan pengxun School of Sciences Lanzhou University of Technology Lanzhou 730050 China College of Materials Science and Engineering Lanzhou University of Technology Lanzhou 730050 China Institute of Plasma and Metal Materials Lanzhou University Lanzhou 730000 China

Copper nanoparticles were successfully prepared in large scale by means of anodic arc discharging plasma method in inert atmosphere. The particle size, specific surface area, crystal structure, and morphology of the samples were characterized by X-ray diffraction （XRD）, BET equation, transmission electron microscopy （TEM）, and the corresponding selected area electron diffraction （SAED）. The experimental results indicate that the crystal structure of the samples is fcc structure the same as that of the bulk materials. The specific surface area is 11 m^2/g, the particle size distribution is 30 to 90 nm, and the average particle size is about 67 nm obtained from TEM and confirmed from XRD and BET results. The nanoparticles with uniform size, high purity, narrow size distribution and spherical shape can be prepared by this convenient and effective method.

关键词： metal materials Cu nanoparticles anodic arc plasma particle size structure

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镍纳米颗粒填充碳纳米管的制备和表征

稀有金属材料与工程 2012年第7期41卷 1289-1292页

作者：魏智强李维学杨华闫鹏勋兰州理工大学甘肃省有色金属新材料省部共建国家重点实验室甘肃兰州730050 兰州大学甘肃兰州730000

采用阳极弧放电等离子体技术制备了Ni纳米颗粒填充的碳纳米管,并利用高分辨透射电子显微镜（HRTEM）、X射线衍射（XRD）、透射电子显微镜（TEM）、拉曼光谱（Raman）和X射线能量色散分析谱仪（XEDS）等测试手段对样品的化学成分、形态... 详细信息

采用阳极弧放电等离子体技术制备了Ni纳米颗粒填充的碳纳米管,并利用高分辨透射电子显微镜（HRTEM）、X射线衍射（XRD）、透射电子显微镜（TEM）、拉曼光谱（Raman）和X射线能量色散分析谱仪（XEDS）等测试手段对样品的化学成分、形态和物相结构等特征进行了表征。结果表明,采用本实验的方法能获得大量的被纳米金属颗粒填充的碳纳米管,内部填充物为fcc结构的Ni纳米颗粒,外围薄层为石墨碳层。碳纳米管的外径在30~40nm范围内,壁厚5~8nm,内部填充的纳米颗粒呈球形和椭球形,粒径均匀。

关键词：碳纳米管填充纳米颗粒阳极弧放电物相结构

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在ITO玻璃衬底上制备锆钛酸铅铁电薄膜

硅酸盐学报 2000年第5期28卷 407-411页

作者：阎鹏勋谢亮李义王君蒋生蕊兰州大学物理系兰州730000

利用射频反应性溅射沉积技术在掺Sn的In2 O3导电透明膜(ITO)衬底上制备了钙钛矿型Pb(Zr,Ti)O3(PZT)铁电薄膜 .研究了沉积参量与热处理工艺对铁电薄膜结构和性能的影响 .运用X射线衍射、X射线光电子能谱和扫描电镜等技术 ,分析了薄膜的... 详细信息

利用射频反应性溅射沉积技术在掺Sn的In2 O3导电透明膜(ITO)衬底上制备了钙钛矿型Pb(Zr,Ti)O3(PZT)铁电薄膜 .研究了沉积参量与热处理工艺对铁电薄膜结构和性能的影响 .运用X射线衍射、X射线光电子能谱和扫描电镜等技术 ,分析了薄膜的晶体结构、表面形貌和表面元素化学状态 .测量了不同处理条件下薄膜的铁电性能 .结果表明 :在掺Sn的In2 O3导电透明膜衬底上可以得到表面无裂纹、化学计量比符合要求的PZT薄膜 ;薄膜中晶粒均匀分布 ,平均尺寸约 2 50nm ,呈四方状和三角状 ;溅射气氛中氧含量和退火温度对薄膜结构、化学计量比和铁电性能都有明显影响 .

关键词：锆钛酸铅薄膜氧化铟溅射沉积 ITO 铁电薄膜

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约束弧等离子体制备铝纳米粉体的研究

粉末冶金技术 2006年第3期24卷 170-174页

作者：魏智强夏天东闫志巾白利锋闫鹏勋兰州理工大学理学院兰州730050 兰州理工大学有色金属新材料国家重点实验室兰州730050 兰州大学物理科学与技术学院兰州730000

利用自行研制的约束弧等离子体制备金属纳米粉试验装置,成功制备了平均粒度为44nm的铝纳米粉体.利用X射线衍射（XRD）、BET吸附法、透射电子显微镜（TEM）和相应选区电子衍射（SAED）等测试手段对所制备样品的晶体结构、形貌、粒度及其... 详细信息

利用自行研制的约束弧等离子体制备金属纳米粉试验装置,成功制备了平均粒度为44nm的铝纳米粉体.利用X射线衍射（XRD）、BET吸附法、透射电子显微镜（TEM）和相应选区电子衍射（SAED）等测试手段对所制备样品的晶体结构、形貌、粒度及其分布、比表面积进行性能表征.试验结果表明：约束弧等离子体法制备的铝纳米粉晶体结构为fcc结构的晶态,与体材料相比晶格常数发生膨胀.比表面积为41m^2·g^-1,粒径范围分布在20～70nm之间,平均粒径为44m,粒度均匀,分散性好,呈规则球形链状分布.

关键词：等离子体纳米粉形貌晶体结构粒度