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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park youngsun Choi Soonyang Kwono youngjun Lee Jiwoong kim Jae-joon kim Jihye Lee Jeongho Ahn Hidong Kwak yusin yang Taeyong Jo Myungjun Lee Kwangrak kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

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Liquid crystal-integrated metasurfaces for an active photonic platform

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Opto-Electronic Advances 2024年第6期7卷 5-29页

作者： Dohyun Kang Hyeonsu Heo younghwan yang Junhwa Seong Hongyoon kim Joohoon kim Junsuk Rho Department of Mechanical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)Pohang 37673Republic of Korea Department of Electrical Engineering Pohang University of Science and Technology(POSTECH)Pohang 36763Republic of Korea POSCOPOSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics Pohang 37673Republic of Korea National Institute of Nanomaterials Technology(NINT) Pohang 37673Republic of Korea

Metasurfaces have opened the door to next-generation optical devices due to their ability to dramatically modulate electromagnetic waves at will using periodically arranged ***,metasurfaces typically have static optical responses with fixed geometries of nanostructures,which poses challenges for implementing transition to technology by replacing conventional optical *** solve this problem,liquid crystals(LCs)have been actively employed for designing tunable metasurfaces using their adjustable birefringent in real ***,we review recent studies on LCpowered tunable metasurfaces,which are categorized as wavefront tuning and spectral *** to numerous reviews on tunable metasurfaces,this review intensively explores recent development of LC-integrated *** the end of this review,we briefly introduce the latest research trends on LC-powered metasurfaces and suggest further directions for improving *** hope that this review will accelerate the development of new and innovative LC-powered devices.

关键词： tunable metasurface liquid crystal active metasurface electrically tunable optical system

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Rapid monitoring of indoor airborne influenza and coronavirus with high air flowrate electrostatic sampling and PCR analysis

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Frontiers of Environmental Science & Engineering 2024年第7期18卷 73-85页

作者： Sanggwon An Sangsoo Choi Hyeong Rae kim Jungho Hwang School of Mechanical Engineering Yonsei UniversitySeoul 02876Republic of Korea Gas Metrology Group Korea Research Institute of Standards and Science(KRISS)Daejeon 34113Republic of Korea

The World Health Organization has raised concerns about the possibility of airborne transmission in enclosed and poorly ventilated ***,rapid monitoring of airborne viruses is necessary in multi-use facilities with dense ***,an electrostatic air sampler(250 L/min)was developed in this work to obtain indoor viral aerosol samples for analysis via the Polymerase Chain Reaction(PCR).Aerosol tests with H1N1 and HCoV-229E were performed to evaluate the sample collection *** analysis,along with another aerosol test,was conducted to evaluate the recovery of the virus particles collected by the *** laboratory tests,our electrostatic sampler obtained viral samples that were detectable by PCR under the simulated viral pandemic scenario(3000 RNA copies per cubic meter of air)within 40 *** resulting cycle threshold(C)values were 35.07 and 37.1 for H1N1 and HCoV-229E,*** the performance evaluation in the laboratory,field tests were conducted in a university classroom from October 28 to December 2,*** A and HCoV-229E were detected in two air samples,and the corresponding C,values were 35.3 and *** PCR results are similar to those obtained from laboratory tests,considering the simulatedviralpandemic scenario.

关键词： Airborne virus Electrostatic sampler Rapid monitoring Indoor environment Field test

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Negative Stiffness Mechanism on An Asymmetric Wave Energy Converter by Using A Weakly Nonlinear Potential Model

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China Ocean Engineering 2024年第4期38卷 689-700页

作者： Sunny Kumar POGULURI Dongeun kim yoon Hyeok BAE Department of Ocean Engineering IIT MadrasChennaiIndia Multidisciplinary Graduate School Program for Wind Energy Jeju National UniversityJejuRepublic of Korea Mechanical and System Design Engineering Hongik UniversitySeoulRepublic of Korea

Salter's duck,an asymmetrical wave energy converter(WEC)device,showed high efficiency in extracting energy from 2D regular waves in the past;yet,challenges remain for fluctuating wave *** can potentially be addressed by adopting a negative stiffness mechanism(NSM)in WEC devices to enhance system efficiency,even in highly nonlinear and steep 3D waves.A weakly nonlinear model was developed which incorporated a nonlinear restoring moment and NSM into the linear formulations and was applied to an asymmetric WEC using a time domain potential flow *** model was initially validated by comparing it with published experimental and numerical computational fluid dynamics *** current results were in good agreement with the published *** was found that the energy extraction increased in the range of 6%to 17%during the evaluation of the effectiveness of the NSM in regular *** irregular wave conditions,specifically at the design wave conditions for the selected test site,the energy extraction increased by 2.4%,with annual energy production increments of approximately *** findings highlight the potential of NSM in enhancing the performance of asymmetric WEC devices,indicating more efficient energy extraction under various wave conditions.

关键词： asymmetric wave energy converter negative stiffness mechanism weakly nonlinear potential flow power

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Integration of earth-abundant cocatalysts for high-performance photoelectrochemical energy conversion

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Journal of Energy Chemistry 2024年第1期88卷 336-355,I0008页

作者： Joonhee Ma Sang Hyun Ahn Soo young kim Department of Materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea School of Chemical Engineering and Materials Science Chung-Ang University84 Heukseok-roDongjak-guSeoul 06974Republic of Korea

Photoelectrochemical(PEC)energy conversion has emerged as a promising and efficient approach to sustainable energy harvesting and *** utilizing semiconductor photoelectrodes,PEC devices can harness solar energy and drive electrochemical reactions such as water splitting or carbon dioxide(CO_(2))reduction to generate clean fuels and value-added ***,PEC energy conversion faces several challenges such as high overpotential,sluggish reaction kinetics,charge carrier recombination,and stability issues,which limit its practical ***,significant research has been conducted to improve the overall conversion efficiency of PEC *** particularly promising approach is the use of cocatalysts,which involves introducing specific cocatalysts onto the photoelectrode surface to promote charge separation,improve reaction kinetics,and reduce the overpotential,thereby enhancing the overall performance of PEC energy *** review provides a comprehensive overview of the recent developments in the earth-abundant cocatalysts for PEC water splitting and CO_(2) *** main earth-abundant catalysts for the PEC water splitting include transition-metal dichalcogenide(TMD)-based materials,metal phosphides/carbides,and metal oxides/***,PEC-CO_(2)RR was divided into C_(1) and C_(2+)based on the final product since various products could be produced,focusing on diverse earth-abundant materials-based *** addition,we provide and highlight key advancements achieved in the very recent reports on novel PEC system design engineering with ***,the current problems associated with PEC systems are discussed along with a suggested direction to overcome these obstacles.

关键词： Solar energy Photo-electrochemical Water splitting CO_(2)reduction Cocatalysts

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Real-world utility of serological tests in patients with suspected scrub typhus in the Republic of Korea:A single-center,retrospective,observational study

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Asian Pacific Journal of Tropical Medicine 2024年第6期17卷 273-280,I0004,I0005页

作者： Seulki kim A Reum kim Seungjin Lim Su Jin Lee Moonsuk Bae Division of Infectious Diseases Department of Internal MedicinePusan National University Yangsan HospitalYangsanRepublic of Korea Research Institute for Convergence of Biomedical Science and Technology Pusan National University Yangsan HospitalYangsanRepublic of Korea Department of Internal Medicine Pusan National University School of MedicineBusanRepublic of Korea

Objective:Serological tests are widely used for scrub typhus diagnosis;however,their limitations are *** study aims to assess their practical value in clinical ***:We analyzed the data of adult patients with suspected scrub typhus who visited a tertiary care hospital in the Republic of Korea from September to December from 2019 to *** included patients had an acute fever and at least one of the following ten secondary findings:myalgia,skin rash,eschar,headache,thrombocytopenia,increased liver enzyme levels,lymphadenopathy,hepatomegaly,splenomegaly,and pleural *** diagnoses were grouped as scrub typhus or other diseases by two infectious disease ***:Among 136 patients who met the eligibility criteria,109 had scrub typhus and 27 had different *** and paired total antibodies using immunofluorescence assay(IFA),and total antibodies using immunochromatography-based rapid diagnostic testing(ICT)were measured in 98%,22%,and 75%of all patients,*** using paired samples for scrub typhus was established at a median of 11[interquartile range(IQR)10-16]days following the first *** the 82 admitted patients,the median admission time was 9(IQR 7-13)*** to IFA,58(55%)patients with scrub typhus had total immunoglobulin titers≥1:320,while 23(85%)patients with other disease had titersyphus and 10(67%)patients with other diseases showed negative ICT ***:Serological testing for scrub typhus is currently insufficient for decision-making in clinical practice.

关键词： Scrub typhus Serological test Immunofluorescence assay Immunochromatography Rapid detecting test

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On breakthroughs and limits: Resolving structural fine-tuning of photosynthetic supercomplexes

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Molecular Plant 2024年第2期17卷 224-226页

作者： Eunchul kim Marcel Dann Division of Environmental Photobiology National Institute for Basic BiologySOKENDAlOkazaki 444-8585Japan Department of Basic Biology The Graduate University for Advanced StudiesSOKENDAlOkazaki 444-8585Japan Bio-Inspired Energy Conversion Technical University of DarmstadtSchnittspahnstraBe 1064287 DarmstadtGermany

Dynamic regulation of photosynthetic supercomplexes is a key strategy allowing plants to adjust their light-harvesting system in response to varying environmental light conditions(Bassi and Dall'Osto,2021).State transition(i.e.,acclimative re-distribution of peripheral antennae between photosystems[PSs]I and II)is one such regulation mechanism that maintains excitation balance between PSl and PSll.

关键词： complexes breakthrough maintain

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Boosting the catalytic activity toward oxygen reduction via a heterostructure of porous iron oxide-decorated 2D NiO/NG nanosheets

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Journal of Energy Chemistry 2024年第6期93卷 669-681,I0016页

作者： Kakali Maiti Matthew T.Curnan Hyung Jun kim Kyeounghak kim Jeong Woo Han Department of Chemical Engineering Pohang University of Science and Technology(POSTECH)PohangGyeongbuk 37673Republic of Korea Department of Materials Science and Engineering Research Institute of Advanced MaterialsSeoul National UniversitySeoul 08826Republic of Korea Department of Chemical Engineering Clean-Energy Research InstituteHanyang UniversitySeoul 04763Republic of Korea CSIR-Institute of Minerals and Materials Technology RRL CampusAcharya ViharBhubaneswarOdisha 751013India

As a noble metal substitute,two-dimensional(2D)hierarchical nano-frame structures have attracted great interest as candidate catalysts due to their remarkable advantages-high intrinsic activity,high electron mobility,and straightforward surface ***,they may replace Pt-based catalysts in oxygen reduction reaction(ORR)***,a simple method is developed to design hierarchical nano-frame structures assembled via 2D NiO and N-doped graphene(NG)*** procedure can yield nanostructures that satisfy the criteria correlated with improved electrocatalytic performance,such as large surface area,numerous undercoordinated atoms,and high defect ***,porous NG nanosheet architectures,featuring NiO nanosheets densely coordinated with accessible holey Fe_(2)O_(3) moieties,can enhance mesoporosity and balance *** improvements can facilitate charge transport and expose formerly inaccessible reaction sites,maximizing active site density *** functional theory(DFT)calculations reveal favored O_(2) adsorption and dissociation on Fe_(2)O_(3) hybrid structures when supported by 2D NiO and NG nanomaterials,given 2D materials donated charge to Fe_(2)O_(3) active *** systematic studies reveal that synergistic contributions are responsible for enriching the catalytic activity of Fe_(2)O_(3)@NiO/NG in alkaline media-encompassing internal voids and pores,unique hierarchical support structures,and concentrated N-dopant and bimetallic atomic ***,this work expands the toolbox for designing and synthesizing highly efficient 2D/2D shelled functional nanomaterials with transition metals,endeavoring to benefit energy conversion and related ORR applications.

关键词： N-doped graphene Holey Fe_(2)O_(3)nanocrystals NiO nanosheets High catalytic performance ORR

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A Novel Framework to Construct S-Box Quantum Circuits Using System Modeling: Application to 4-Bit S-Boxes

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Computer Modeling in Engineering & Sciences 2024年第10期141卷 545-561页

作者： yongjin Jeon Seungjun Baek Jongsung kim Department of Financial Information Security Kookmin UniversitySeoul02707Republic of Korea

Quantum computers accelerate many algorithms based on the superposition principle of quantum *** Grover algorithm provides significant performance to malicious users attacking symmetric key *** the performance of attacks using quantum computers depends on the efficiency of the quantum circuit of the encryption algorithms,research research on the implementation of quantum circuits is *** paper presents a new framework to construct quantum circuits of substitution boxes(S-boxes)using system *** model the quantum circuits of S-boxes using two layers:Toffoli and linear *** generate vector spaces based on the values of qubits used in the linear layers and apply them to find quantum *** framework finds the circuit bymatching elements of vector spaces generated fromthe input and output of a given S-box,using the forward search or themeet-in-the-middle *** developed a tool to apply this framework to 4-bit *** the 4-bit S-box quantum circuit construction tool LIGHTER-R only finds circuits that can be implemented with four qubits,the proposed tool achieves the circuits with five *** proposed tool can find quantum circuits of 4-bit odd permutations based on the controlled NOT,NOT,and Toffoli gates,whereas LIGHTER-R is unable to perform this task in the same *** expect this technique to become a critical step toward optimizing S-box quantum circuits.

关键词： System modeling quantum circuit S-box circuit quantum computer

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An Empirical Study on the Effectiveness of Adversarial Examples in Malware Detection

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Computer Modeling in Engineering & Sciences 2024年第6期139卷 3535-3563页

作者： younghoon Ban Myeonghyun kim Haehyun Cho School of Software Soongsil UniversitySeoul06978Korea

Antivirus vendors and the research community employ Machine Learning(ML)or Deep Learning(DL)-based static analysis techniques for efficient identification of new threats,given the continual emergence of novel malware *** the other hand,numerous researchers have reported that Adversarial Examples(AEs),generated by manipulating previously detected malware,can successfully evade ML/DL-based *** antivirus systems,in particular,have been identified as vulnerable to such *** paper firstly focuses on conducting black-box attacks to circumvent ML/DL-based malware *** attack method utilizes seven different perturbations,including Overlay Append,Section Append,and Break Checksum,capitalizing on the ambiguities present in the PE format,as previously employed in evasion attack *** directly applying the perturbation techniques to PE binaries,our attack method eliminates the need to grapple with the problem-feature space dilemma,a persistent challenge in many evasion attack *** a black-box attack,our method can generate AEs that successfully evade both DL-based and ML-based ***,AEs generated by the attack method retain their executability and malicious behavior,eliminating the need for functionality *** thorogh evaluations,we confirmed that the attack method achieves an evasion rate of 65.6%against well-known ML-based malware detectors and can reach a remarkable 99%evasion rate against well-known DL-based malware ***,our AEs demonstrated the capability to bypass detection by 17%of vendors out of the 64 on VirusTotal(VT).In addition,we propose a defensive approach that utilizes Trend Locality Sensitive Hashing(TLSH)to construct a similarity-based defense *** several experiments on the approach,we verified that our defense model can effectively counter AEs generated by the perturbation *** conclusion,our defense model alleviates the limitation of the mos

关键词： Malware classification machine learning adversarial examples evasion attack cybersecurity

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