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High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

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Microsystems & Nanoengineering 2019年第1期5卷 24-37页

作者： Brahim El Mansouri Luke M.Middelburg Rene H.Poelma Guo Qi Zhang henk wvan zeijl Jia Wei Hui Jiang Johan G.Vogel Willem Dvan Driel Electronic Components Technology and MaterialsFaculty of Electrical EngineeringDelft University of TechnologyMekelweg 42628CD DelftThe Netherlands Else Kooi Laboratory Feldmannweg 172628CT DelftThe Netherlands Electronic Instrumentation Faculty of Electrical EngineeringDelft University of TechnologyMekelweg 42628CD DelftThe Netherlands Signify High Tech Campus 485656AE EindhovenThe Netherlands

Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of ng/√Hz(where g represents earth’s gravity)but they are typically high-cost and *** this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described,aiming for ng/√Hz resolution by maximising mechanical and capacitive *** mechanical sensitivity is obtained through low structural ***-zero stiffness is achieved through geometric design and large deformation into a region where the mechanism is statically balanced or neutrally ***,the device has an integrated capacitive comb transducer and makes use of a high-resolution impedance readout *** sensitivity from displacement to a change in capacitance was maximised within the design and process boundaries given,by making use of a trench isolation technique and exploiting the large-displacement behaviour of the *** measurement results demonstrate that the resonance frequency can be tuned from 8.7 Hz–18.7 Hz,depending on the process parameters and the tilt of the *** this system,which combines an integrated capacitive transducer with a sensitivity of 2.55 aF/nm and an impedance readout chip,the theoretically achievable system resolution equals 17.02 ng/√*** small size of the device and the use of integrated readout electronics allow for a wide range of practical applications for data collection aimed at the internet of things.

关键词： behaviour displacement resolution

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A review of passive thermal management of LED module

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Journal of Semiconductors 2011年第1期32卷 57-60页

作者：叶怀宇 Sau Koh henk van zeijl A.W.J.Gielen 张国旗 Delft Institute of Microsystems and Nanoelectronics(Dimes) Delft University of Technology Materials Innovation Institute(M2i) Mekelweg 22628 CDDelftNetherlands Netherlands Organization for Applied Scientific Research(TNO) De Rondom 1 5612 APEindhovenNetherlands

Recently, the high-brightness LEDs have begun to be designed for illumination application. The increased electrical currents used to drive LEDs lead to thermal issues. Thermal management for LED module is a key design parameter as high operation temperature directly affects their maximum light output, quality, reliability and life time. In this review, only passive thermal solutions used on LED module will be studied. Moreover, new thermal interface materials and passive thermal solutions applied on electronic equipments are discussed which have high potential to enhance the thermal performance of LED Module.

关键词： HB LEDs LED module thermal management passive thermal solution thermal interface material

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Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

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Microsystems & Nanoengineering 2022年第5期8卷 207-223页

作者： Joost Romijn Sten Vollebregt Luke M.Middelburg BrahimEl Mansouri henk W.van zeijl AlexanderMay Tobias Erlbacher Johan Leijtens Guoqi Zhang Pasqualina M.Sarro Laboratory of Electronic Components Technology and Materials(ECTM)Department of MicroelectronicsDelft University of TechnologyDelftThe Netherlands Fraunhofer Institute for Integrated Systems and Devices Technology IISB ErlangenGermany Lens R&D NoordwijkThe Netherlands

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS,which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100mm^(2) *** reported image sensor offers serial digital,analog,and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60μW,which are significant improvements over previous *** optoelectronics have applications in flame detection,satellites,astronomy,UV photography,and *** complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.

关键词： optoelectronic image carbide

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Rhizobium Lipo-chitooligosaccharide Signaling Triggers Accumulation of Cytokinins in Medicago truncatula Roots

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Molecular Plant 2015年第8期8卷 1213-1226页

作者： Arjan van zeijl Rik H.M. Op den Camp Eva E. Deinum Tatsiana Charnikhova henk Franssen Huub J.M. Op den Camp Harro Bouwmeester Wouter Kohlen Ton Bisseling Rene Geurts Department of Plant Sciences Laboratory of Molecular Biology Wageningen University Droevendaalsesteeg 16708 PB Wageningen The Netherlands Department of Systems Biophysics FOM institute AMOLF Science Park 104 1098 XG Amsterdam The Netherlands Department of Plant Sciences Laboratory of Plant Physiology Wageningen University Droevendaalsesteeg 1 6708 PB Wageningen The Netherlands Department of Microbiology IWWR Radboud University Nijmegen Heyendaalseweg 135 6525 AJ Nijmegen The Netherlands College of Science King Saud University Post Office Box 2455 Riyadh 11451 Saudi Arabia

Legume rhizobium symbiosis is initiated upon perception of bacterial secreted lipo-chitooligosaccharides （LCOs）. Perception of these signals by the plant initiates a signaling cascade that leads to nodule formation. Several studies have implicated a function for cytokinin in this process. However, whether cytokinin accu- mulation and subsequent signaling are an integral part of rhizobium LCO signaling remains elusive. Here, we show that cytokinin signaling is required for the majority of transcriptional changes induced by rhizo- bium LCOs. In addition, we demonstrate that several cytokinins accumulate in the root susceptible zone 3 h after rhizobium LCO application, including the biologically most active cytokinins, trans-zeatin and iso- pentenyl adenine. These responses are dependent on calcium- and calmodulin-dependent protein kinase （CCaMK）, a key protein in rhizobial LCO-induced signaling. Analysis of the ethylene-insensitive Mtein21 Mtsickle mutant showed that LCO-induced cytokinin accumulation is negatively regulated by ethylene. Together with transcriptional induction of ethylene biosynthesis genes, it suggests a feedback loop negatively regulating LCO signaling and subsequent cytokinin accumulation. We argue that cytokinin accumulation is a key step in the pathway leading to nodule organogenesis and that this is tightly controlled by feedback loops.

关键词： Medicago truncatula cytokinin ethylene rhizobium lipo-chitooligosaccharides CRE1

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