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Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF3 mixture remote plasma source

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Plasma Science and Technology 2019年第6期21卷 52-57页

作者： h J YEOM D h chOI Y S lee J h KIM D J SEONG S J YOU h c lee Korea Research Institute of Standards and Science(KRISS) Daejeon 34113 Republic of Korea Department of Physics Chungnam National University Daejeon 34134 Republic of Korea

In this study,plasma density measurements were performed near the plume region of the remote plasma source (RPS) in Ar/NF3 gas mixtures using a microwave cutoff *** measured plasma density is in the range of 1010-1011 cm-3 in the discharge conditions with RPS powers of 2-4 kW and gas pressures of 0.87-4 *** plasma density decreased with increasing gas pressures and RPS powers under various Ar/NF3 mixing *** decrease in the plasma density measured at the fixed measurement position (plume region) can be understood by the reduction of the electron energy relaxation length with increases in the gas pressures and mixing ratio of NF3/(Ar/NF3).We also performed downstream etching of silicon and silicon oxide films in this *** etch rate of the silicon films significantly increases while the silicon oxide is slightly etched with the gas pressures and *** was also found that the etch rate strongly depends on the wafer position on the processing chamber electrode,and that the etch selectivity reached 96-131 in the discharge conditions of RF powers (3730-4180 W) and gas pressures (3.6-4 Torr).

关键词： remote plasma source electron density cutoff probe downstream etch

cerebral ischemia and neuroregeneration

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Neural Regeneration Research 2018年第3期13卷 373-385页

作者： Reggie h.c.lee Michelle h.h.lee celeste Y.c.Wu Alexandre couto e Silva harlee E.Possoit Tsung-han hsieh Alireza Minagar hung Wen Lin Department of Neurology Louisiana State University Health Science Center center for Brain health Louisiana State University Health Science Center Institute of cellular and System Medicine National Health Research Institutes Department of cellular Biology and Anatomy Louisiana State University Health Science Center cardiovascular and Metabolomics Research center Hualien Tzu Chi Hospital

cerebral ischemia is one of the leading causes of morbidity and mortality worldwide. Although stroke （a form of cerebral ischemia）-related costs are expected to reach 240.67 billion dollars by 2030, options for treatment against cerebral ischemia/stroke are limited. All therapies except anti-thrombolytics （i.e., tissue plasminogen activator） and hypothermia have failed to reduce neuronal injury, neurological deficits, and mortality rates following cerebral ischemia, which suggests that development of novel therapies again st stroke/cerebral ischemia are urgently needed. here, we discuss the possible mechanism（s） underlying cerebral ischemia-induced brain injury, as well as current and future novel therapies （i.e., growth factors, nicotinamide adenine dinucleotide, melatonin, resveratrol, protein kinase c isozymes, pifithrin, hypothermia, fatty acids, sympathoplegic drugs, and stem cells） as it relates to cerebral ischemia.

关键词： cerebral ischemia melatonin resveratrol protein kinase c pifithrin-α fatty acids sympathetic nervous system neuromodulation therapy traditional chinese therapies stem cel

comparing the Effectiveness of coatings on carbide andcermet cutting Tool Inserts

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Journal of Materials Science & Technology 1995年第4期11卷 269-275页

作者： K.h. W.Seah M.Rahman and c.h.lee (Dept. of Mech. & Prod. Eng., National University of Singapore, 10 Kent Ridge crescent, Singapore 0511 T.N.Goh (Dept. of Ind. & Sys. Eng., National University of Singapore, 10 Kent Ridge crescent, Singapore 0511) National Univ of Singapore Singapore

A series of metal cutting experiments was performed on a cNc lathe to evaluate the performance of various coatings on different tool substrates. The workpiece material was plain medium carbon steel and the cutting tool materials were carbide and cermet inserts coated with various single as well as multilayer coatings. Machining was done under various cutting conditions of speed and feed-rate, and for various durations of cutting. The output parameters studied were the cutting forces (axial, radial and tangential), the surface roughness of the workpiece, as well as the tool wear (crater and flank wear). From these results, the performances of the various cutting inserts are evaluated and compared. Results show that cutting forces are significantly lower when using coated cermets than when using coated carbides although different coatings on the same substrate also result in different cutting forces. however, there is less difference in the surface roughness of the finished workpiece for the various coatings and substrates.

关键词： Tool comparing the Effectiveness of coatings on carbide andcermet cutting Tool Inserts

饲粮不同赖氨酸水平对早期断奶仔猪生产性能的影响

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饲料工业 2010年第20期31卷 5-7页

作者：谢建兵 h.c.lee 段红伟于锋兰州大学草地农业科技学院甘肃省兰州市730020 联英管理(上海)有限公司广州市威司特生物科技有限公司乐达(广州)香味剂有限公司

试验旨在研究饲粮不同赖氨酸水平对早期断奶仔猪生产性能的影响。选择28日龄断奶、平均初始体重(6.74±0.03)kg的杜长大三元杂交仔猪150头,随机分为3组,每组2个重复(圈),每个重复25头猪,分别饲喂总赖氨酸水平为1.35%、1.42%、1.60%的3... 详细信息

试验旨在研究饲粮不同赖氨酸水平对早期断奶仔猪生产性能的影响。选择28日龄断奶、平均初始体重(6.74±0.03)kg的杜长大三元杂交仔猪150头,随机分为3组,每组2个重复(圈),每个重复25头猪,分别饲喂总赖氨酸水平为1.35%、1.42%、1.60%的3种饲粮,饲养试验时间为20d。结果表明,各项生产性能指标均随饲粮总赖氨酸水平提高呈二次曲线变化。以处理Ⅱ(总赖氨酸水平1.42%)为最佳,随着赖氨酸水平的降低或升高,生产性能均下降。当总赖氨酸水平提高到1.60%(处理Ⅲ)时,其日增重、日采食量和每克赖氨酸增重均显著低于处理Ⅱ(P<0.05)。

关键词：赖氨酸水平早期断奶仔猪生产性能

ON ThE REPRESENTATIONS OF ThE cOMPLEX 3-DIMENSIONAL AND ThE REAL 4-DIMENSIONAL ORThOGONAL GROUPS AND ThEII SOMORPhISM

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中国数学会学报 1937年第2期 225-233页

作者：李华宗 National Szechuen University

It is well-known that the camplex linear unimodular group G2 ofa 2-dimensional affine space E2 is a representation of the real orthogonalgToup G4 of a 4-dimensional euclidean space *** this paper it isshown that the same group G,is also a representation of the complexorthogonal group G3 of a 3-dimensional euclidean space R3,and that anisomorphism between G4 and G3 can be established.

关键词： ON ThE REPRESENTATIONS OF ThE cOMPLEX 3-DIMENSIONAL AND ThE REAL 4-DIMENSIONAL ORThOGONAL GROUPS AND ThEII SOMORPhISM

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附带酵母液的甜菜粕在奶牛生产中的应用效果

中国畜牧杂志 2009年第1期45卷 42-45页

作者：赵永亮 h．c．lee 王丽娜于锋兰州大学草地农业科技学院甘肃兰州730000 联英管理(上海)有限公司上海200050

试验Ⅰ和试验Ⅱ均以处于泌乳早期和泌乳中期的健康奶牛为对象,研究日粮中添加附带15%酵母液的甜菜粕和普通甜菜粕对产奶量、采食量和乳成分的影响。结果表明:泌乳早期试验组奶牛产奶量提高4.1%(P<0.05),采食量提高3.7%(P<0.05),乳脂率提... 详细信息

试验Ⅰ和试验Ⅱ均以处于泌乳早期和泌乳中期的健康奶牛为对象,研究日粮中添加附带15%酵母液的甜菜粕和普通甜菜粕对产奶量、采食量和乳成分的影响。结果表明:泌乳早期试验组奶牛产奶量提高4.1%(P<0.05),采食量提高3.7%(P<0.05),乳脂率提高3%,与对照组相比,每天利润增加2.4元/头;泌乳中期试验组奶牛产奶量提高2.7%(P<0.05),采食量提高2.2%(P<0.05),乳脂率提高4.6%(P<0.05),与对照组相比,每天利润增加1.47元/头。本试验结果表明,附带酵母液的甜菜粕在奶牛生产中具有较高的应用价值。

关键词：产奶量采食量酵母液甜菜粕奶牛

high-K Gate Dielectrics for Sub-100nm cMOS Technology

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High-K Gate Dielectrics for Sub-100nm CMOS Technology

主轴支承系统的计算——用结构变型法求静态和动态特性

2001 6～(th) International conference on Solid-State and Integrated circuit Technology

作者： S.J.lee c.h.lee Y.h.Kim h.F.Luan W.P.Bai T.S.Jeon D.L.Kwong Microelectronics Research center Department of Electrical and Computer EngineeringThe University of Texas at AustinAustinTX 78712USA

In this paper, the materials and processing challengesfor the fabrication of ***-thin(EOT<1nm) high-K gate stack for sub-l00 nm cMOStechnology will be reviewed along with our recentresults on cVD hfO. The requirement ...

In this paper, the materials and processing challengesfor the fabrication of ***-thin(EOThigh-K gate stack for sub-l00 nm cMOStechnology will be reviewed along with our recentresults on cVD hfO. The requirement for ultra thinand robust interface layers to avoid any thicknessincrease due to post-deposition processing to achievethinnest EOT will be discussed. Results will bepresented on thermal stability of high-K materials,and interfacial reactions of high-K/Si and high-K/gate electrode. We will also discuss key factorsthat govern the conduction and degradationmechanisms in high-K gate *** poly-Si andmetal nitrides are explored as possible gate electrodematerials and the upper thermal budget limit for suchmaterials are discussed.

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来源： cnki会议评论

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cnki会议

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组合机床与自动化加工技术 1990年第11期 33-37页

作者： G.Spur A.Kirchheim c.h.lee 贾镜如德

本文论述了采用结构变型法对主轴支承系统进行静、动态计算的过程及特点,与用有限元法进行计算作了分析对比。在一定范围内,结构变形法计算结果与有限元法计算结果及实测结果极为近似,而结构变型法简单,计算速度快。图4幅。

关键词：机床主轴支承系统计算

Geometric and statistical properties of the mean-field hydrophobic-polar model, the large-small model, and real protein sequences

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Geometric and statistical properties of the mean-field hydro...