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Effect of methane content and the oscillating electric field between electrodes on atmospheric Ar/methane plasma jet and DLC coating deposition

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Plasma Science and Technology 2020年第8期22卷 76-89页

作者： Reza SAFARI farshad sohbatzadeh Department of Atomic and Molecular Physics Faculty of Basic SciencesUniversity of MazandaranBabolsar 47416Iran

In this work,the effects of the methane gas flow and the internal oscillating electric field between electrodes on radio-frequency(RF)atmospheric pressure argon/methane plasma jet and process of diamond-like carbon(DLC)film deposition have been *** of RF atmospheric Ar/methane plasma jet such as active species density,length,electron temperature,appearance and ionization process of argon/methane plasma jet are changed due to the changing of methane flow content and electric field vector and its *** increasing methane flow,the formation of C2 hydrocarbon and CH band content is decreased because injected electrical energy to a mixture of Ar/methane gases is insufficient to stabilize the ionization process of methane gas and the electrical-chemical reaction rate is *** shortening the gas gap between two electrodes,electric field strength and its gradient are increased leading to more energy injection to the ***-chemical reactions are strengthened leading to increasing the CH band *** phenomena introduce the Ar/methane plasma jet in different modes causing to deposit the DLC film with different structures and *** using quartz glass and alumina ceramic as dielectric barriers tubes,RF atmospheric pressure Ar/methane plasma jet has been used to deposit DLC coating in different *** methane content and shortening the gas gap leads to decreasing sp3 bonded content and the quality of the deposited film.

关键词： RF atmospheric plasma methane flow electric field

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